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Vacuum Pad, Standard Small Type, VPMA, Barb Fitting Type (Part Numbers)
Small vacuum pad ideal for use in semiconductor manufacturing equipment. *CAD data currently being revised for this series. This will be available as soon as modifications are complete.
[Features]
· Containers of different shapes are available, including the general type which is ideal for flat work surfaces (ones that are rigid enough not to flap), the deep type ideal for round fruits (apples, etc.) and balls, and the small type ideal for small works and for use at semiconductor manufacturing facilities.
· A wide range of pad sizes, pad materials, and holder shapes are available.
· Pad holders have been added for applications requiring copper-based metal not to be used and as part of efforts to reduce ozone concentrations.
· Copper-based metal is not used for metal parts. HNBR is used for sealing rubber material.
Japanese Only
Part Number
Configured Part Number is shown.
Dimensions
Standard table
| Model code | Tube I.D. øD | Pad O.D. ød | Thread M | B | L | C | Hex. H | Connection config. code |
|---|---|---|---|---|---|---|---|---|
| VPMA0.7RM[5]-3B[9] | 2 | 0.7 | M4×0.5 | 18 | 4 | 6 | 6 | -T4 |
| VPMA0.7RM[5]-4B[9] | 2.5 | M5×0.5 | 19 | 7 | 7 | |||
| VPMA1RM[5]-3B[9] | 2 | 1 | M4×0.5 | 18 | 6 | 6 | ||
| VPMA1RM[5]-4B[9] | 2.5 | M5×0.5 | 19 | 7 | 7 | |||
| VPMA1.5RM[5]-3B[9] | 2 | 1.5 | M4×0.5 | 18 | 6 | 6 | ||
| VPMA1.5RM[5]-4B[9] | 2.5 | M5×0.5 | 19 | 7 | 7 | |||
| VPMA2RM[5]-3B[9] | 2 | 2 | M4×0.5 | 18 | 6 | 6 | ||
| VPMA2RM[5]-4B[9] | 2.5 | M5×0.5 | 19 | 7 | 7 | |||
| VPMA3RM[5]-3B[9] | 2 | 3 | M4×0.5 | 18 | 6 | 6 | ||
| VPMA3RM[5]-4B[9] | 2.5 | M5×0.5 | 19 | 7 | 7 | |||
| VPMA4RM[5]-3B[9] | 2 | 4 | M4×0.5 | 18 | 6 | 6 | ||
| VPMA4RM[5]-4B[9] | 2.5 | M5×0.5 | 19 | 7 | 7 | |||
| VPMA6R[5]-3B[9] | 2 | 6 | M4×0.5 | 23 | 7 | 6 | 6 | -T8 |
| VPMA6R[5]-4B[9] | 2.5 | M5×0.5 | 24 | 7 | ||||
| VPMA8R[5]-3B[9] | 2 | 8 | M4×0.5 | 21.5 | 5.5 | 6 | ||
| VPMA8R[5]-4B[9] | 2.5 | M5×0.5 | 22.5 | 7 | ||||
| VPMA10R[5]-3B[9] | 2 | 10 | M6×0.75 | 28 | 8 | 6 | 8 | -M4 |
| VPMA10R[5]-4B[9] | 2.5 | 29 | 7 | |||||
| VPMA15R(A)[5]-3B[9] | 2 | 15 | 29(30) | 9(10) | 6 | |||
| VPMA15R(A)[5]-4B[9] | 2.5 | 30(31) | 7 | |||||
| VPMA20R(A)[5]-4B[9] | 2.5 | 20 | M10×1 | 36.6(37.6) | 10(11) | 7 | 12 | -M6 |
| VPMA20R(A)[5]-6B[9] | 4 | |||||||
| VPMA25R(A)[5]-4B[9] | 2.5 | 25 | 37.6(38.6) | 11(12) | ||||
| VPMA25R(A)[5]-6B[9] | 4 | |||||||
| VPMA30R(A)[5]-4B[9] | 2.5 | 30 | 37.6(40.6) | 11(14) | ||||
| VPMA30R(A)[5]-6B[9] | 4 | |||||||
| VPMA40R(A)[5]-4B[9] | 2.5 | 40 | 40.6(44.1) | 14(17.5) | ||||
| VPMA40R(A)[5]-6B[9] | 4 | |||||||
| VPMA50R(A)[5]-4B[9] | 2.5 | 50 | 41.6(44.6) | 15(18) | ||||
| VPMA50R(A)[5]-6B[9] | 4 |
Units: mm
*Value in ( ) is the dimension of a deep type pad.
*[5]: Replaced with Pad rubber material code. Refer to the catalog for details.
*[9]: Replaced with "-S3" for -S3 spec. (Copper alloy free material for metal parts and FKM or HNBR for sealing parts).
*Pad material N, NE, and G are not suitable for use under ozone environment.
*Tightening torque of a pad holder fixing bulkhead nut is as below.
▪Pad dia.: ø0.7~ø8 mm: Thread size M4×0.5 ▶ 1~1.2 N·m, M5×0.5 ▶ 1.5~2 N·m.
▪Pad dia.: ø10, ø15 mm ▶ 2~3 N·m.
▪Pad dia.: ø20~ø50 mm ▶ 5~7 N·m
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | RoHS | Pad Shape | Mounting Method | Rubber Group Material | Environment | Color | Outer Diameter d (φ) | Height L1 (mm) | Full length B (mm) | Mount Connection Screw | Vacuum Outlet Tube Outer Diameter (φ) |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
MYR 98.70 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 15 | 10 | 30 | M6 | 3 | ||
MYR 98.70 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 15 | 10 | 31 | M6 | 4 | ||
MYR 61.80 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | NBR which conforms to Food Sanitation Law | Standard | Gray | 15 | 10 | 30 | M6 | 3 | ||
MYR 61.80 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | NBR which conforms to Food Sanitation Law | Standard | Gray | 15 | 10 | 31 | M6 | 4 | ||
MYR 58.89 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 15 | 10 | 30 | M6 | 3 | ||
MYR 58.89 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 15 | 10 | 31 | M6 | 4 | ||
MYR 64.32 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 15 | 10 | 30 | M6 | 3 | ||
MYR 64.32 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 15 | 10 | 31 | M6 | 4 | ||
MYR 76.98 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | Urethane Rubber | Standard | Blue | 15 | 10 | 30 | M6 | 3 | ||
MYR 76.98 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | Urethane Rubber | Standard | Blue | 15 | 10 | 31 | M6 | 4 | ||
MYR 104.13 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 20 | 11 | 37.6 | M10 | 4 | ||
MYR 104.13 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 20 | 11 | 37.6 | M10 | 6 | ||
MYR 67.23 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | NBR which conforms to Food Sanitation Law | Standard | Gray | 20 | 11 | 37.6 | M10 | 4 | ||
MYR 67.23 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | NBR which conforms to Food Sanitation Law | Standard | Gray | 20 | 11 | 37.6 | M10 | 6 | ||
MYR 64.32 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 20 | 11 | 37.6 | M10 | 4 | ||
MYR 64.32 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 20 | 11 | 37.6 | M10 | 6 | ||
MYR 69.75 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 20 | 11 | 37.6 | M10 | 4 | ||
MYR 69.75 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 20 | 11 | 37.6 | M10 | 6 | ||
MYR 82.41 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | Urethane Rubber | Standard | Blue | 20 | 11 | 37.6 | M10 | 4 | ||
MYR 82.41 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | Urethane Rubber | Standard | Blue | 20 | 11 | 37.6 | M10 | 6 | ||
MYR 104.13 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 25 | 12 | 38.6 | M10 | 4 | ||
MYR 104.13 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 25 | 12 | 38.6 | M10 | 6 | ||
MYR 67.23 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | NBR which conforms to Food Sanitation Law | Standard | Gray | 25 | 12 | 38.6 | M10 | 4 | ||
MYR 67.23 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | NBR which conforms to Food Sanitation Law | Standard | Gray | 25 | 12 | 38.6 | M10 | 6 | ||
MYR 64.32 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 25 | 12 | 38.6 | M10 | 4 | ||
MYR 64.32 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 25 | 12 | 38.6 | M10 | 6 | ||
MYR 69.75 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 25 | 12 | 38.6 | M10 | 4 | ||
MYR 69.75 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 25 | 12 | 38.6 | M10 | 6 | ||
MYR 82.41 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | Urethane Rubber | Standard | Blue | 25 | 12 | 38.6 | M10 | 4 | ||
MYR 82.41 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | Urethane Rubber | Standard | Blue | 25 | 12 | 38.6 | M10 | 6 | ||
MYR 104.13 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 30 | 14 | 40.6 | M10 | 4 | ||
MYR 104.13 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 30 | 14 | 40.6 | M10 | 6 | ||
MYR 69.04 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | NBR which conforms to Food Sanitation Law | Standard | Gray | 30 | 14 | 40.6 | M10 | 4 | ||
MYR 69.04 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | NBR which conforms to Food Sanitation Law | Standard | Gray | 30 | 14 | 40.6 | M10 | 6 | ||
MYR 66.13 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 30 | 14 | 40.6 | M10 | 4 | ||
MYR 66.13 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 30 | 14 | 40.6 | M10 | 6 | ||
MYR 71.56 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 30 | 14 | 40.6 | M10 | 4 | ||
MYR 71.56 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 30 | 14 | 40.6 | M10 | 6 | ||
MYR 84.22 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | Urethane Rubber | Standard | Blue | 30 | 14 | 40.6 | M10 | 4 | ||
MYR 84.22 | 1 Piece(s) | 9 Day(s) or more | - | Deep Type | Pad Screw Fixed | Urethane Rubber | Standard | Blue | 30 | 14 | 40.6 | M10 | 6 |
Loading...
Basic Information
| Pad Type | Standard / Holder Set | Material | Rubber-based | Mounting Fitting | Fixed Type |
|---|---|---|---|---|---|
| Vacuum Outlet Direction | Top | Fall Prevention Valve | None | Direct Attached Filter | None |
| Metal parts material | Standard Specifications |
Specification/Dimensions
-
Mounting Method
- Recessed Type
- Pad Screw Fixed
-
Rubber Group Material
- Nitrile Rubber
- NBR which conforms to Food Sanitation Law
- Silicon Rubber
- Urethane Rubber
- Fluorine Rubber
- Nitrile Rubber
-
Environment
- Standard
- Static electricity diffusion
-
Color
- Black
- Gray
- White
- Blue
-
Outer Diameter d(φ)
-
Height L1(mm)
-
Full length B(mm)
-
Mount Connection Screw
- M4
- M5
- M6
- M10
-
Vacuum Outlet Tube Outer Diameter(φ)
- 3
- 4
- 6
-
type
- VPMA
-
Pad Shape
- Deep Type
- Small
-
CAD
- 2D
- 3D
Days to Ship
-
- All
- 9 Day(s) or Less
Specify Alterations
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
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- Vacuum Pad, Thin Small Type, VPMA, Barb Fitting Type
- Pad with Included Fitting and Fixing Bracket / PDTK / PDYK
- Pad With Buffer Type Bracket/NAPCTS and YS
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