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Vacuum Pad, Standard Small Type, VPME (VPME1.5RMS-M3)

Vacuum Pad, Standard Small Type, VPME VPME1.5RMS-M3

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  • Vacuum Pad, Standard Small Type, VPME
  • Vacuum Pad, Standard Small Type, VPME

Small vacuum pad ideal for use in semiconductor manufacturing equipment, *CAD data currently being revised for this series. This will be available as soon as modifications are complete.

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Part Number

Configured Part Number is shown.

VPME1.5RMS-M3

A Small Vacuum Pad Ideal For Use In Semiconductor Manufacturing Facilities

Pad material
Nitrile rubber, silicone rubber, urethane rubber, fluorine rubber, conductive silicone rubber, conductive butadiene rubber (low-resistance type), conductive NBR (low-resistance type), Food Sanitation Law-compliant NBR, HNBR, EPDM
Pad size
: Ø0.7 (diameter 0.7 mm), Ø1 (diameter 1 mm), Ø1.5 (diameter 1.5 mm), Ø2 (diameter 2 mm), Ø3 (diameter 3 mm), Ø4 (diameter 4 mm), Ø6 (diameter 6 mm), Ø8 (diameter 8 mm), Ø10 (diameter 10 mm), Ø15 (diameter 15 mm), Ø20 (diameter 20 mm), Ø25 (diameter 25 mm), Ø30 (diameter 30 mm), Ø40 (diameter 40 mm), Ø50 (diameter 50 mm), Ø60 (diameter 60 mm), Ø80 (diameter 80 mm), Ø100 (diameter 100 mm), Ø150 (diameter 150 mm), Ø200 (diameter 200 mm)

  • *Static electricity-diffusing rubber and conductive rubber (low-resistance type) and Food Sanitation Law-compliant NBR are Ø1 to 50 (diameter 1 to 50 mm).

Fixed Type

 Vacuum Outlet, UpperVacuum Outlet, HorizontalDirect Attachment
TypeStandardSmallStandardSmallStandardSmall
SymbolVPAVPMAVPBVPMBVPEVPME

Spring Type

 Vacuum Outlet, UpperVacuum Outlet, HorizontalDirect Attachment
TypeStandardSmallStandardSmallStandard
SymbolVPCVPMCVPDVPMDVPF

Coupling size

Single-action Coupling (mm)Ø1.8, Ø3, Ø4, Ø6
Barbed Coupling
(Applicable Tube Outer Diameter × Inner Diameter) (mm)
Ø1.8 × Ø1, Ø3 × Ø2, 
Ø4 × Ø2.5, Ø6 × Ø4

Screw size
Flat female screws for pipes: Rp (G) 1/8, Rp s(G) 1/4

Standard shape for thick and flat workpieces. Deep shape ideal for round fruit (apples, etc.), bowls, etc.

Standard shape for thick and flat workpieces. Deep shape ideal for round fruit (apples, etc.), bowls, etc.

Small pads can be used with semiconductor parts

Small pads can be used with semiconductor parts

Small holders downsized from existing vacuum pad holders (A, B, C, D and E types) to save space. Also compatible with the optional fall prevention valve and directly attachable-type pad filters.

Small holders downsized from existing vacuum pad holders (A, B, C, D and E types) to save space.
Also compatible with the optional fall prevention valve and directly attachable-type pad filters.

The pad can be changed without detaching the holder from the equipment.
Pad holders compatible with applications requiring no copper-based metal use and low concentration ozone measures are available.
No copper-based metals are used in the metal component materials, and HNBR is used for the rubber sealing material.

  • *Pad material: Nitrile, conductive rubber (low resistance type) and Food Sanitation Law-compliant NBR are not suitable for low-concentration ozone measures.
Part Number
VPME1.5RMS-M3
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipRubber Group Material Environment Color Outer Diameter d
(φ)
Height L1
(mm)
Full length B
(mm)
Mount Connection Screw Vacuum Outlet Screw Metal parts material

MYR 36.10

1 Piece(s) 9 Day(s) or more [Silicon Rubber] Silicone RubberStandard[White] White1.549M3 × 0.5M3 × 0.5Standard Specifications

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Basic Information

Pad Type Standard / Holder Set Pad Shape Small Mounting Method Recessed Type
Material Rubber-based Mounting Fitting Fixed Type Vacuum Outlet Direction Top
Fall Prevention Valve None

Please check the type/dimensions/specifications of the part VPME1.5RMS-M3 in the Vacuum Pad, Standard Small Type, VPME series.

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Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipRubber Group Material Environment Color Outer Diameter d
(φ)
Height L1
(mm)
Full length B
(mm)
Mount Connection Screw Vacuum Outlet Screw Metal parts material

MYR 36.10

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1 Piece(s) 9 Day(s) or more [Silicon Rubber] Silicone Rubber +CarbonStandard / Static electricity diffusionBlack0.749M3 × 0.5M3 × 0.5Standard Specifications

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1 Piece(s) 9 Day(s) or more [Silicon Rubber] Silicone Rubber +CarbonStandard / Static electricity diffusionBlack1.549M3 × 0.5M3 × 0.5Standard Specifications

MYR 45.12

1 Piece(s) 9 Day(s) or more Urethane RubberStandardBlue1.549M3 × 0.5M3 × 0.5Standard Specifications

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