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Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series (XYA-63-M9PA)
A vacuum valve with a pressure balanced structure.
[Features]
· Body material: SCS13 (SUS304 equivalent). Made of stainless steel.
· Precision-cast single-piece structure which helps prevent gas accumulation.
· Interchangeable with XL Series aluminum high-vacuum angle valves.
· Bellows type is particulate-free and cleaned.
(i)Caution
- Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
- Refer to the manufacturer's catalog for specification and material details.
- The product images may be representative images only. Refer to the manufacturer's catalog for shape details.
Part Number
Configured Part Number is shown.
XYA-63-M9PA
Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series Specifications
XMA Series external appearance
XYA Series external appearance
Specifications Table
| Model | XMA-16 | XMA-25 XYA-25 | XMA-40 XYA-40 | XMA-50 XYA-50 | XMA-63 XYA-63 | XMA-80 XYA-80 | |
|---|---|---|---|---|---|---|---|
| Flange (Valve) Size | 16, CF034 | 25 | 40, CF070 | 50 | 63, CF114 | 80 | |
| Valve Type | Normally closed (pressurize to open, spring seal) | ||||||
| Fluids | Inert gas vacuum | ||||||
| Operating Temperature (°C) | 5 to 60 (5 to 150 for high temperature type) | ||||||
| Operating Pressure Pa (abs) | 1 × 10-6 to atmospheric pressure | ||||||
| Conductance L/s Note 1: | 5 | 14 | 45 | 80 | 160 | 200 | |
| Amount of leakage Pa·m3/s | Internal | For standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation | |||||
| External | For standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation | ||||||
| Operating Time (s) | 0.05 | 0.1 | 0.21 | 0.24 | 0.26 | 0.28 | |
| Flange Type | KF (NW), CF | KF (NW) | KF (NW), CF | KF (NW) | KF (NW), K (DN), CF | KF (NW), K (DN) | |
| Main Material | Main body: SCS13 (SUS304 equivalent), Bellows: SUS316L, Major parts: SUS304, FKM (standard sealing material) | ||||||
| Pilot Pressure MPa (G) | 0.4 to 0.7 | ||||||
| Pilot Port Connection Port Diameter | M5 | Rc 1/8 | |||||
| Weight kg Note 2: | XMA | 0.33 (0.37) | 0.61 | 1.40 (1.76) | 2 | 3.60 (4.96) | 6.2 |
| XYA | - | 0.66 | 1.42 | 2.40 | 4.30 | 7.70 | |
Note 1: Conductance is the value for the molecular flow of an elbow with the same dimensions.
Note 2: Figures in ( ) indicate the weight for CF (ConFlat) fittings.
Diagram
XMA (angle type), XYA (in-line type) diagram
*Refer to the manufacturer's catalog for maintenance parts.
Drawing
(Unit: mm)
XMA (angle type) dimensional drawing 1
XMA (angle type) dimensional drawing 2
| Model | A | B | C | D | Fn | Fd | Fc | G | H | P.C.D L1 | L2 |
|---|---|---|---|---|---|---|---|---|---|---|---|
| XMA-16 | 40 | 103 | 38 | 1 | 30 | - | 34 | 17 | 40 | P.C.D 27 | 6 × ø4.4 mm |
| XMA-25 | 50 | 113 | 48 | 1 | 40 | - | - | 26 | 39 | - | - |
| XMA-40 | 65 | 158 | 66 | 2 | 55 | - | 70 | 41 | 63 | P.C.D 58.7 | 6 × ø6.6 mm |
| XMA-50 | 70 | 170 | 79 | 2 | 75 | - | - | 52 | 68 | - | - |
| XMA-63 | 88 | 196 | 100 | 3 | 87 | 95 | 114 | 70 | 69 | P.C.D 92.1 | 8 × ø8.4 mm |
| XMA-80 | 90 | 235 | 117 | 3 | 114 | 100 | - | 83 | 96 | - | - |
(Unit: mm)
XYA (in-line type) dimensional drawing 1
XYA (in-line type) dimensional drawing 2
| Model | A | B | C | D | E | Fn | Fd | G | H |
|---|---|---|---|---|---|---|---|---|---|
| XYA-25 | 100.2 | 79.5 | 48 | 1 | 23.5 | 40 | - | 26 | 64 |
| XYA-40 | 130 | 106 | 66 | 2 | 38 | 55 | - | 41 | 84 |
| XYA-50 | 178 | 119 | 79 | 2 | 53 | 75 | - | 52 | 95 |
| XYA-63 | 209 | 149 | 100 | 3 | 61 | 87 | 95 | 70 | 118 |
| XYA-80 | 268 | 178 | 117 | 3 | 80 | 114 | 110 | 83 | 142 |
Notes
- *Refer to the manufacturer's catalog for parts other than those detailed above.
- *The product images are representative images only.
| Part Number |
|---|
| XYA-63-M9PA |
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Flange Type | Flange Nominal | Valve Type | Indicator | Pilot Port Direction | Temperature Range (°C) | Switch Part Number | Number of Switches | Seal material | Amount of leakage (Pa·m3/s) | Seal Change Location | Length of Lead Wire for Switch (m) |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | NW | 63 | In-line type | No indicator | Flange surface, back | 5 to 60 | D-M9P (solid-state auto switch) | 2 pcs. (valve open/closed) | FKM (1349-80) | 1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external) | - | - |
Loading...
Basic Information
| Type | Air-Actuated Vacuum Valve | Application | Single Use | Mounting Orientation | Direct |
|---|---|---|---|---|---|
| Number of Ports | 2-Port Valve | Switching Type | 2-Position Normally Closed | Pipe Port Type | Flange |
| Seal Type | Bellows Seal |
Please check the type/dimensions/specifications of the part XYA-63-M9PA in the Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series series.
Specification/Dimensions
-
Seal Change Location
-
Length of Lead Wire for Switch(m)
- 0.5
- 1
- 3
- 5
-
type
- XMA
- XYA
-
Flange Type
- NW
- Others
-
Flange Nominal
- 16
- 25
- 40
- 50
- 63
- 80
-
Valve Type
- Angle type
- In-line type
-
Indicator
- No indicator
- With indicator
-
Pilot Port Direction
- Flange side
- Flange surface, back
- Flange surface, left
- Flange surface, right
-
Temperature Range(°C)
- 5 to 60
- 5 to 150
-
Switch Part Number
- D-M9B (solid-state auto switch)
- D-M9BL (solid-state auto switch)
- D-M9BM (solid-state auto switch)
- D-M9BZ (solid-state auto switch)
- D-M9N (solid-state auto switch)
- D-M9NL (solid-state auto switch)
- D-M9NM (solid-state auto switch)
- D-M9NZ (solid-state auto switch)
- D-M9P (solid-state auto switch)
- D-M9PL (solid-state auto switch)
- M9B
- M9N
- M9P
- D-A90 (reed auto switch)
- D-A90L (reed auto switch)
- A93
- D-A93 (reed auto switch)
- D-A93L (reed auto switch)
- D-A93Z (reed auto switch)
- No auto-switch (no built-in magnet)
- No auto-switch (with built-in magnet)
-
Number of Switches
- 1 pc. (valve closed)
- 1 pc. (valve open)
- With 1 pc. (Detection position: Valve closing)
- With 1 pc. (Detection position: Valve opening)
- 2 pcs. (valve open/closed)
- With 2 pcs. (Detection position: Valve opening and closing)
- No auto switch
-
Seal material
- Chemraz (Compound No.: SSE38)
- Chemraz (SSE38)
- Barrel Perfluoro (70W)
- Barrel Perfluoro (Compound No.: 70 W)
- Chemraz (Compound No.: SS592)
- Chemraz (SS592)
- Chemraz (SS630)
- VMQ (1232-70)
- VMQ (Formula No.: 1232-70)
- FKM (1349-80)
- FKM (Formula No.: 1349-80)
- EPDM (2101-80)
- EPDM (Formula No.: 2101-80)
- FKM for Plasma (3310-75)
- Kalrez (4079)
- Kalrez (Compound No.: 4079)
-
Amount of leakage(Pa·m3/s)
- 1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-11
- 1.3 × 10-10 (FKM) / 1.3 × 10-9 (FKM) (internal/external)
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-9
- 1.3 × 10-8 / 1.3 × 10-11 (FKM) (internal/external)
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-11
- 1.3 × 10-8 / 1.3 × 10-9 / SUP >(internal/external)
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-9
-
CAD
- 2D
- 3D
Days to Ship
-
- All
- 21 Day(s) or Less
- 46 Day(s) or Less
Specify Alterations
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
Products like this...
| Part Number |
|---|
| XMA-16-M9BA |
| XMA-16-M9BB |
| XMA-16-M9BC |
| XYA-63-M9PA-XR3B |
| XYA-63A |
| XYA-63A-A93C |
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Flange Type | Flange Nominal | Valve Type | Indicator | Pilot Port Direction | Temperature Range (°C) | Switch Part Number | Number of Switches | Seal material | Amount of leakage (Pa·m3/s) | Seal Change Location | Length of Lead Wire for Switch (m) |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | NW | 16 | Angle type | No indicator | Flange side | 5 to 60 | D-M9B (solid-state auto switch) | 2 pcs. (valve open/closed) | FKM (1349-80) | 1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external) | - | - | ||
- | 1 Piece(s) | Quote | NW | 16 | Angle type | No indicator | Flange side | 5 to 60 | D-M9B (solid-state auto switch) | 1 pc. (valve open) | FKM (1349-80) | 1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external) | - | - | ||
- | 1 Piece(s) | Quote | NW | 16 | Angle type | No indicator | Flange side | 5 to 60 | D-M9B (solid-state auto switch) | 1 pc. (valve closed) | FKM (1349-80) | 1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external) | - | - | ||
- | 1 Piece(s) | Quote | NW | 63 | In-line type | No indicator | Flange surface, back | 5 to 60 | D-M9P (solid-state auto switch) | 2 pcs. (valve open/closed) | Chemraz (SSE38) | 1.3 × 10-8 / 1.3 × 10-11 (FKM) (internal/external) | - | - | ||
- | 1 Piece(s) | Quote | NW | 63 | In-line type | With indicator | Flange surface, back | 5 to 60 | No auto-switch (no built-in magnet) | No auto switch | FKM (1349-80) | 1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external) | - | - | ||
- | 1 Piece(s) | Quote | NW | 63 | In-line type | With indicator | Flange surface, back | 5 to 60 | D-A93 (reed auto switch) | 1 pc. (valve closed) | FKM (1349-80) | 1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external) | - | - |
Additional Products in this Category
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- Automatic Butterfly Valve/BV-NII Series
- Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series
- Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve
- Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series
- Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)
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