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- Please note that some of the items may take longer lead time to ship due to Japan New Year holidays (29-Dec-2024 to 5-Jan-2025). Early order placement is recommended. We apologize for the inconvenience caused and appreciate your kind understanding. [Details]
- Please note that E-Invoice will be sent to our customers by email. For more information, please read News.
Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series (Part Numbers)
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)
(i)Caution
- Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
- Some of the items are scheduled to be discontinued as of end of March in 2023. The manufacturer keep the items produced but they are not available with Misumi.
There are not the replacement items and the plan to resumption of sale. Please check the quotation and order screen for details. - Refer to the manufacturer's catalog for specification and material details.
- The product images may be representative images only. Refer to the manufacturer's catalog for shape details.
Japanese Only
Part Number
Configured Part Number is shown.
■Please refer to the following for the details of the auto switch D-F7NJ.
■Please refer to the following for the details of the auto switch D-M9NJ.
■Please refer to the following for the details of the auto switch D-M9NJ.
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Flange Type | Flange Nominal | Sonic Speed Conductance | Pilot Port Direction | Temperature Range (°C) | Switch Part Number | Number of Switches | Seal material | Amount of leakage (Pa·m3/s) | Body Surface Treatment | Seal Change Location | Length of Lead Wire for Switch (m) | Heater Yes/No |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | KF | 50 | 80L/S | Flange side | 5 to 60 | D-M9B (Z) solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | 5 | None | ||
- | 1 Piece(s) | Quote | KF | 50 | 80L/S | Flange side | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 50 | 80L/S | Flange side | 5 to 150 | No auto-switch (no magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 50 | 80L/S | Flange side | 5 to 150 | No auto-switch (no magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | - | With heater for 120℃ | ||
- | 1 Piece(s) | Quote | KF | 50 | 80L/S | Flange side | 5 to 150 | D-M9NJL | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | 3 | With heater for 120℃ | ||
- | 1 Piece(s) | Quote | KF | 50 | 80L/S | Flange side | 5 to 150 | D-M9PJL | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | 3 | With heater for 120℃ | ||
- | 1 Piece(s) | Quote | KF | 50 | 80L/S | Flange surface, back | 5 to 60 | No auto-switch (no magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 50 | 80L/S | Flange surface, right | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 63 | 160L/S | Flange side | 5 to 60 | No auto-switch (no magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 63 | 160L/S | Flange side | 5 to 60 | D-A93 (L) reed auto switch (Flange size 16 not supported) | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | 3 | None | ||
- | 1 Piece(s) | Quote | KF | 63 | 160L/S | Flange side | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 63 | 160L/S | Flange side | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | Kalrez 4079 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | Valve seal 1 / valve seal 2 / external seal | 0.5 | None | ||
- | 1 Piece(s) | Quote | K | 63 | 160L/S | Flange surface, left | 5 to 150 | No auto-switch (no magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 63 | 160L/S | Flange surface, left | 5 to 60 | No auto-switch (no magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 63 | 160L/S | Flange surface, left | 5 to 60 | No auto-switch (with magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange side | 5 to 60 | No auto-switch (no magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange side | 5 to 60 | No auto-switch (no magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, internal: anodic oxidation | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange side | 5 to 60 | No auto-switch (no magnet) | No switch | Barrel Perfluoro 70W | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, internal: anodic oxidation | Valve seal 1 / valve seal 2 | - | None | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange side | 5 to 60 | D-A93 (L) reed auto switch (Flange size 16 not supported) | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | 3 | None | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange side | 5 to 60 | No auto-switch (with magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange side | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange side | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, internal: anodic oxidation | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange side | 5 to 60 | D-M9B (L) solid-state auto switch | 1 pc. valve closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | 3 | None | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange side | 5 to 60 | D-M9B (L) solid-state auto switch | 1 pc. valve closed | Barrel Perfluoro 70W | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, internal: anodic oxidation | Valve seal 1 / valve seal 2 / external seal | 3 | None | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange side | 5 to 60 | D-M9N (L) solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | 3 | None | ||
- | 1 Piece(s) | Quote | K | 80 | 200L/S | Flange surface, back | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange side | 5 to 150 | No auto-switch (no magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange side | 5 to 150 | No auto-switch (no magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | - | With heater for 120℃ | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange surface, back | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | None | 0.5 | None | ||
- | 1 Piece(s) | Quote | KF | 80 | 200L/S | Flange surface, back | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Kalrez 4079 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | Valve seal 1 / valve seal 2 | 0.5 | None |
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Basic Information
| Type | Pilot Vacuum Valve | Application | Single Use | Mounting Orientation | Direct |
|---|---|---|---|---|---|
| Number of Ports | 2-Port Valve | Switching Type | 2-Position Normally Closed | Pipe Port Type | Flange |
| Seal Type | Bellows Seal |
Specification/Dimensions
-
Flange Type
- KF
- K
-
Flange Nominal
- 16
- 25
- 40
- 50
- 63
- 80
-
Sonic Speed Conductance
-
Pilot Port Direction
- Flange side
- Flange surface, back
- Flange surface, left
- Flange surface, right
-
Temperature Range(°C)
- 5 to 60
- 5 to 60°C
- 5 to 150
- 5 to 150℃
-
Switch Part Number
- F7NJ
- D-M9B (L) solid-state auto switch
- D-M9B (M) solid-state auto switch
- D-M9B (Z) solid-state auto switch
- D-M9B solid-state auto switch
- D-M9N (L) solid-state auto switch
- D-M9N (M) solid-state auto switch
- D-M9N (Z) solid-state auto switch
- D-M9N solid-state auto switch
- D-M9NJL
- D-M9P (L) solid-state auto switch
- D-M9P (Z) solid-state auto switch
- D-M9PJL
- M9B
- M9J/
- M9N
- M9NJ
- M9P
- M9PJ
- A90
- D-A90 (L) reed auto switch (Flange size 16 not supported)
- A93
- D-A93 (L) reed auto switch (Flange size 16 not supported)
- D-A93 reed auto switch (Flange size 16 not supported)
- No auto-switch (no magnet)
- No auto-switch (with magnet)
-
Number of Switches
- 1 pc. valve closed
- 1 pc. valve open
- With 1 pc. (Detection position: Valve closing)
- With 1 pc. (Detection position: Valve opening)
- 2 pcs. valve open/closed
- With 2 pcs. (Detection position: Valve opening and closing)
- No auto switch
- No switch
-
Seal material
-
Amount of leakage(Pa·m3/s)
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-11
- Internal: 1.3 × 10-10, External: 1.3 × 10-11
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-9
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-9
- Internal: 1.3 × 10-8, External: 1.3 × 10-9
-
Body Surface Treatment
- External: hard anodized aluminum, Internal: base material
- External: hard anodized aluminum, internal: anodic oxidation
-
Seal Change Location
-
Length of Lead Wire for Switch(m)
- 0.5
- 1
- 3
- 5
-
Heater Yes/No
- With heater for 100°C
- With heater for 120℃
- None
-
type
- XLC
- XLC-16
- XLC-25
- XLC-40
- XLC-50
- XLC-63
- XLC-80
-
CAD
- 2D
- 3D
Days to Ship
-
- All
- 21 Day(s) or Less
- 27 Day(s) or Less
- 61 Day(s) or Less
Specify Alterations
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
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