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Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve (Part Numbers)

Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve

[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)

(i)Caution

  • Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
  • Some of the items are scheduled to be discontinued as of end of March in 2023. The manufacturer keep the items produced but they are not available with Misumi.
    There are not the replacement items and the plan to resumption of sale. Please check the quotation and order screen for details.

  • Refer to the manufacturer's catalog for specification and material details.
  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

PDF

Japanese Only

Drawing

Drawing of aluminum high vacuum L-shaped valve normally-closed O-ring seal XLFV series air operated type with solenoid valve

Product Specifications

Product Specifications

Part numberXLF (V)-16-2XLF (V)-25-2XLF (V)-40-2XLF (V)-50-2XLF (V)-63-2XLF (V)-80-2
Valve TypeNormally closed (pressurize to open, spring seal)
Operating fluidInert gas vacuum
Operating temperature °C5 to 50
Operating Pressure Pa (abs)1 × 10^-5 to atmospheric pressure
Conductance L/s^*1)5144580160200
Leakage Pa · m^3/sInternalFor standard material (FKM) 1.3 × 10^-10 At room temperature, excluding gas permeation
ExternalFor standard material (FKM) 1.3 × 10^-10 At room temperature, excluding gas permeation
Flange TypeKF (NW)KF (NW)·K (DN)
Main materials^*2)Main body: aluminum alloy main part: stainless steel, FKM (standard sealing material)
Surface TreatmentExternal: hard anodized aluminum, Internal: base material
Pilot pressure MPa (G)0.4 to 0.7
Pilot Port
Connection port diameter
M5: 1 (P) / 3 (R) portsRc1/8: 1 (P) port, M5: 3 (R) ports
Weight (kg)0.340.541.32.03.45.8

Note 1: Conductance is the same as that of an elbow with the same dimensions.
*2) Vacuum grease [Y-VAC2] is applied to the sliding part of the seal of the vacuum part.

Standard table

Standard table of aluminum high vacuum L-shaped valve normally-closed O-ring seal XLFV series air operated type with solenoid valve
Part Number
XLFV-16F-2-5G
XLFV-16G-2-5GZ
XLFV-16G-2M9//-5GZ
XLFV-16G-2M9NA-1G
XLFV-25G-2-5GZ
XLFV-25G-2-5MS
XLFV-25G-2M9//-5GZ
XLFV-25G-2M9BA-4G
XLFV-25G-2M9NLA-5GZ
XLFV-25J-2M9BLA-5HZ
XLFV-40F-2-4GZ
XLFV-40F-2M9NLA-5GS
XLFV-40G-2-1H
XLFV-40G-2-5LZ
XLFV-40G-2-5MS
XLFV-40G-2M9NA-1G
XLFV-40J-2M9NLA-5GS
XLFV-40K-2M9BLA-5LZ
XLFV-40M-2M9BLA-5LZ
XLFV-80G-2M9NA-5GU-XA
XLFV-80G-2M9NA-5GU-XAN1A
XLFV-80G-2M9NA-5GU-XAP1A
XLFV-80G-2M9NZA-5GU
XLFV-80G-2M9NZA-5GU-XA
XLFV-80G-2M9NZA-5GU-XN1A
XLFV-80G-2M9NZA-5GU-XN1B
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipFlange Type Flange Nominal Voltage Sonic Speed Conductance Indicator Pilot Port Direction Switch Part Number Number of Switches Seal material Amount of leakage
(Pa·m3/s)
Electrical Entry Method Light/Surge Voltage Suppressor Body Surface Treatment Seal Change Location CE-marked Length of Lead Wire for Switch
(m)

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1 Piece(s) Quote KF16DC24V5L/SWith indicatorFlange surface, leftNo auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -11Grommet (lead wire length: 300 mm)NoneExternal: hard anodized aluminum, Internal: base materialNoneNot compatible-

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1 Piece(s) Quote KF16DC24V5L/SWith indicatorFlange surface, backNo auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -11Grommet (lead wire length: 300 mm)With light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible-

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1 Piece(s) Quote KF16DC24V5L/SWith indicatorFlange surface, backNo auto-switch (with magnet)No switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -11Grommet (lead wire length: 300 mm)With light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible-

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1 Piece(s) Quote KF16AC100V5L/SWith indicatorFlange surface, backD-M9N (solid-state auto switch)2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -11Grommet (lead wire length: 300 mm)NoneExternal: hard anodized aluminum, Internal: base materialNoneNot compatible0.5

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1 Piece(s) Quote KF25DC24V14L/SWith indicatorFlange surface, backNo auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -11Grommet (lead wire length: 300 mm)With light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible-

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1 Piece(s) Quote KF25DC24V14L/SWith indicatorFlange surface, backNo auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -11M-type plug connectorWith surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible-

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1 Piece(s) Quote KF25DC24V14L/SWith indicatorFlange surface, backNo auto-switch (with magnet)No switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -11Grommet (lead wire length: 300 mm)With light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible-

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1 Piece(s) Quote KF25AC220V14L/SWith indicatorFlange surface, backD-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -11Grommet (lead wire length: 300 mm)NoneExternal: hard anodized aluminum, Internal: base materialNoneNot compatible0.5

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1 Piece(s) Quote KF25DC24V14L/SWith indicatorFlange surface, backD-M9N (solid-state auto switch)2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -11Grommet (lead wire length: 300 mm)With light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible3

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1 Piece(s) Quote KF25DC24V14L/SWith indicatorFlange surface, rightD-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -11Grommet (lead wire length: 600 mm)With light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible3

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1 Piece(s) Quote KF40AC220V45L/SWith indicatorFlange surface, leftNo auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -11Grommet (lead wire length: 300 mm)With light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible-

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1 Piece(s) Quote KF40DC24V45L/SWith indicatorFlange surface, leftD-M9N (solid-state auto switch)2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -11Grommet (lead wire length: 300 mm)With surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible3

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1 Piece(s) Quote KF40AC100V45L/SWith indicatorFlange surface, backNo auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -11Grommet (lead wire length: 600 mm)NoneExternal: hard anodized aluminum, Internal: base materialNoneNot compatible-

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1 Piece(s) Quote KF40DC24V45L/SWith indicatorFlange surface, backNo auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -11L-type plug connectorWith light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible-

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1 Piece(s) Quote KF40DC24V45L/SWith indicatorFlange surface, backNo auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -11M-type plug connectorWith surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible-

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1 Piece(s) Quote KF40AC100V45L/SWith indicatorFlange surface, backD-M9N (solid-state auto switch)2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -11Grommet (lead wire length: 300 mm)NoneExternal: hard anodized aluminum, Internal: base materialNoneNot compatible0.5

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1 Piece(s) Quote KF40DC24V45L/SWith indicatorFlange surface, rightD-M9N (solid-state auto switch)2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -11Grommet (lead wire length: 300 mm)With surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible3

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1 Piece(s) Quote KF40DC24V45L/SNo indicatorFlange surface, leftD-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -11L-type plug connectorWith light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible3

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1 Piece(s) Quote KF40DC24V45L/SNo indicatorFlange surface, rightD-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -11L-type plug connectorWith light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible3

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1 Piece(s) Quote KF80DC24V200L/SWith indicatorFlange surface, backD-M9N (solid-state auto switch)2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -11Grommet (lead wire length: 300 mm)With light and surge voltage suppressor (non-polarized type)External: hard anodized aluminum, internal: anodic oxidationNoneNot compatible0.5

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1 Piece(s) Quote KF80DC24V200L/SWith indicatorFlange surface, backD-M9N (solid-state auto switch)2 pcs. valve open/closedEPDM 2101-80Internal: 1.3 × -8, External: 1.3 × -9Grommet (lead wire length: 300 mm)With light and surge voltage suppressor (non-polarized type)External: hard anodized aluminum, internal: anodic oxidationValve seal 1 / valve seal 2 / external sealNot compatible0.5

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1 Piece(s) Quote KF80DC24V200L/SWith indicatorFlange surface, backD-M9N (solid-state auto switch)2 pcs. valve open/closedBarrel Perfluoro 70WInternal: 1.3 × -8, External: 1.3 × -9Grommet (lead wire length: 300 mm)With light and surge voltage suppressor (non-polarized type)External: hard anodized aluminum, internal: anodic oxidationValve seal 1 / valve seal 2 / external sealNot compatible0.5

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1 Piece(s) Quote KF80DC24V200L/SWith indicatorFlange surface, backD-M9N (solid-state auto switch)2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -11Grommet (lead wire length: 300 mm)With light and surge voltage suppressor (non-polarized type)External: hard anodized aluminum, Internal: base materialNoneNot compatible5

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1 Piece(s) Quote KF80DC24V200L/SWith indicatorFlange surface, backD-M9N (solid-state auto switch)2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -11Grommet (lead wire length: 300 mm)With light and surge voltage suppressor (non-polarized type)External: hard anodized aluminum, internal: anodic oxidationNoneNot compatible5

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1 Piece(s) Quote KF80DC24V200L/SWith indicatorFlange surface, backD-M9N (solid-state auto switch)2 pcs. valve open/closedEPDM 2101-80Internal: 1.3 × -8, External: 1.3 × -9Grommet (lead wire length: 300 mm)With light and surge voltage suppressor (non-polarized type)External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external sealNot compatible5

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1 Piece(s) Quote KF80DC24V200L/SWith indicatorFlange surface, backD-M9N (solid-state auto switch)2 pcs. valve open/closedEPDM 2101-80Internal: 1.3 × -8, External: 1.3 × -9Grommet (lead wire length: 300 mm)With light and surge voltage suppressor (non-polarized type)External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2Not compatible5

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Basic Information

Type High Vacuum Solenoid Application Single Use Mounting Orientation Direct
Number of Ports 2-Port Valve Solenoid Type Single Switching Type 2-Position Normally Closed
Driving Type Directly Operated Pipe Port Type Flange Seal Type Elastic Seal

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