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[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)
Japanese Only
Part Number
Configured Part Number is shown.
XLFV-80G-2M9NZA-5GU-XN1A
Part number | XLF (V)-16-2 | XLF (V)-25-2 | XLF (V)-40-2 | XLF (V)-50-2 | XLF (V)-63-2 | XLF (V)-80-2 | |
---|---|---|---|---|---|---|---|
Valve Type | Normally closed (pressurize to open, spring seal) | ||||||
Operating fluid | Inert gas vacuum | ||||||
Operating temperature °C | 5 to 50 | ||||||
Operating Pressure Pa (abs) | 1 × 10^-5 to atmospheric pressure | ||||||
Conductance L/s^*1) | 5 | 14 | 45 | 80 | 160 | 200 | |
Leakage Pa · m^3/s | Internal | For standard material (FKM) 1.3 × 10^-10 At room temperature, excluding gas permeation | |||||
External | For standard material (FKM) 1.3 × 10^-10 At room temperature, excluding gas permeation | ||||||
Flange Type | KF (NW) | KF (NW)·K (DN) | |||||
Main materials^*2) | Main body: aluminum alloy main part: stainless steel, FKM (standard sealing material) | ||||||
Surface Treatment | External: hard anodized aluminum, Internal: base material | ||||||
Pilot pressure MPa (G) | 0.4 to 0.7 | ||||||
Pilot Port Connection port diameter | M5: 1 (P) / 3 (R) ports | Rc1/8: 1 (P) port, M5: 3 (R) ports | |||||
Weight (kg) | 0.34 | 0.54 | 1.3 | 2.0 | 3.4 | 5.8 |
Note 1: Conductance is the same as that of an elbow with the same dimensions.
*2) Vacuum grease [Y-VAC2] is applied to the sliding part of the seal of the vacuum part.
Part Number |
---|
XLFV-80G-2M9NZA-5GU-XN1A |
Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Flange Type | Flange Nominal | Voltage | Sonic Speed Conductance | Indicator | Pilot Port Direction | Switch Part Number | Number of Switches | Seal material | Amount of leakage (Pa·m3/s) | Electrical Entry Method | Light/Surge Voltage Suppressor | Body Surface Treatment | Seal Change Location | CE-marked | Length of Lead Wire for Switch (m) |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | KF | 80 | DC24V | 200L/S | With indicator | Flange surface, back | D-M9N (solid-state auto switch) | 2 pcs. valve open/closed | EPDM 2101-80 | Internal: 1.3 × -8, External: 1.3 × -9 | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor (non-polarized type) | External: hard anodized aluminum, Internal: base material | Valve seal 1 / valve seal 2 / external seal | Not compatible | 5 |
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Type | High Vacuum Solenoid | Application | Single Use | Mounting Orientation | Direct |
---|---|---|---|---|---|
Number of Ports | 2-Port Valve | Solenoid Type | Single | Switching Type | 2-Position Normally Closed |
Driving Type | Directly Operated | Pipe Port Type | Flange | Seal Type | Elastic Seal |
Please check the type/dimensions/specifications of the part XLFV-80G-2M9NZA-5GU-XN1A in the Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve series.
Part Number |
---|
XLFV-16G-2-5GZ |
XLFV-16G-2M9//-5G-Q |
XLFV-16G-2M9//-5GZ |
XLFV-16G-2M9//-5LZ |
XLFV-16G-2M9//-5WOZ |
XLFV-80G-2M9NZA-5GU-XN1B |
Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Flange Type | Flange Nominal | Voltage | Sonic Speed Conductance | Indicator | Pilot Port Direction | Switch Part Number | Number of Switches | Seal material | Amount of leakage (Pa·m3/s) | Electrical Entry Method | Light/Surge Voltage Suppressor | Body Surface Treatment | Seal Change Location | CE-marked | Length of Lead Wire for Switch (m) |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | KF | 16 | DC24V | 5L/S | With indicator | Flange surface, back | No auto-switch (no magnet) | No switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -11 | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | External: hard anodized aluminum, Internal: base material | None | Not compatible | - | ||
- | 1 Piece(s) | Quote | KF | 16 | DC24V | 5L/S | With indicator | Flange surface, back | No auto-switch (with magnet) | No auto switch | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-11 | Grommet (lead wire length: 300 mm) | None | External: hard anodized aluminum, Internal: base material | None | - | - | ||
- | 1 Piece(s) | Quote | KF | 16 | DC24V | 5L/S | With indicator | Flange surface, back | No auto-switch (with magnet) | No switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -11 | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor | External: hard anodized aluminum, Internal: base material | None | Not compatible | - | ||
- | 1 Piece(s) | Quote | KF | 16 | DC24V | 5L/S | With indicator | Flange surface, back | No auto-switch (with magnet) | No auto switch | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-11 | L-type plug connector | With light and surge voltage suppressor | External: hard anodized aluminum, Internal: base material | None | Not compatible | - | ||
MYR 2,497.01 | 1 Piece(s) | 27 Day(s) or more | KF | 16 | DC24V | 5L/S | With indicator | Flange surface, back | No auto-switch (with magnet) | No auto switch | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-11 | - | - | External: hard anodized aluminum, Internal: base material | None | Not compatible | - | ||
- | 1 Piece(s) | Quote | KF | 80 | DC24V | 200L/S | With indicator | Flange surface, back | D-M9N (solid-state auto switch) | 2 pcs. valve open/closed | EPDM 2101-80 | Internal: 1.3 × -8, External: 1.3 × -9 | Grommet (lead wire length: 300 mm) | With light and surge voltage suppressor (non-polarized type) | External: hard anodized aluminum, Internal: base material | Valve seal 1 / valve seal 2 | Not compatible | 5 |
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