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Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve (XLDV-50M-M9NA-3LZ)

Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve XLDV-50M-M9NA-3LZ

SMC

SMC

A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Air-operated type with solenoid valve.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

(i)Caution

  • ■ SMC Product Line
    Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

    ■ Products Planned for Online Release
    Air cylinder-related product pages will be released on this site on an ad-hoc basis.
    CQ2/MG types, etc., are already available.
    *Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
    *The information above is correct as of December 2018.
  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

PDF

Part Number

Configured Part Number is shown.

XLDV-50M-M9NA-3LZ

Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting, Bellows Seal, O-Ring Seal, XLDV Series, Air-Operated Type with Solenoid Valve Specifications

XLDV Series external appearance

XLDV Series external appearance

XLDV Series operating port direction

XLDV Series operating port direction

ModelXLD (V)-25XLD(V)-40XLD(V)-50XLD(V)-63XLD(V)-80
Valve TypeAlways closed (spring return and seal) (both main and initial exhaust valves)
FluidsInert gas vacuum
Operating Temperature (°C)XLDV5 to 60 (5 to 150 for high temperature type)
5 to 50
Operating Pressure Pa (abs)1 × 10-6 to atmospheric pressure
Conductance L/s Note 1:Main Exhaust Valve144580160200
Initial Exhaust Valve0.5 to 32 to 82.5 to 114 to 184 to 18
Amount of leakage Pa·m3/sInternalFor standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation
ExternalFor standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation
Flange TypeKF (NW)KF (NW) / K (DN)
Main Material Note 3:Main body: aluminum alloy, Bellows: SUS316L, Main parts: stainless steel, FKM (standard sealing material)
Surface TreatmentExternal: hard anodized aluminum, Internal: base material
Pilot Pressure MPa (G)0.4 to 0.7 (both main and initial exhaust valves)
Pilot Port Connection Port DiameterXLDVM5: 1 (P), 3 (R) ports
Weight (kg)XLDV0.571.31.93.55.7

Note 1: The main exhaust valve conductance is the value for the "molecular flow" of an elbow with the same dimensions. The initial exhaust valve conductance is the "viscous flow" value.
Note 2: For valve heater specifications, see "Common Option (1) Heater" in the manufacturer's catalog.
Note 3: A coating of vacuum grease (Y-VAC2) has been applied to the seal-material sliding section (initial exhaust valve sliding part) of the vacuum part.

Product Drawing

 

(Unit: mm)

 

XLDV-25 type with solenoid valve dimensional drawing

XLDV-25 type with solenoid valve dimensional drawing

XLDV-40, XLDV-50, XLDV-63, XLDV-80 type with solenoid valve dimensional drawing

XLDV-40, XLDV-50, XLDV-63, XLDV-80 type with solenoid valve dimensional drawing

ModelABCFnFdGMNK
XLDV-40651706655-4148.553.515
XLDV-50701837975-525557.517.5
XLDV-638821710087957066.572.220
XLDV-8090256117114110837582.626.5

Product Diagram

Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting, Bellows Seal, O-Ring Seal diagram

Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting, Bellows Seal, O-Ring Seal diagram

XLDV-25 type with solenoid valve diagram

XLDV-25 type with solenoid valve diagram

XLDV-40, XLDV-50, XLDV-63, XLDV-80 type with solenoid valve diagram

XLDV-40, XLDV-50, XLDV-63, XLDV-80 type with solenoid valve diagram

*Refer to the manufacturer's catalog for maintenance parts.

Product Working Principle

Initial exhaust valve conductance settings graph

Initial exhaust valve conductance settings graph

  1. 1. Initial exhaust valve opening adjustment
    Adjust the initial exhaust rate before use without applying pilot pressure to pilot port S. Set the initial exhaust rate to zero by turning the adjustment nut clockwise until it stops. (Do not use tools.) Adjust the initial exhaust rate by turning the adjustment nut counterclockwise.
  2. 2. Opening of the initial exhaust valve (valve S)
    Pilot pressure is constantly applied to the 1 (P) port. The valve opens by the adjusted amount when the initial exhaust solenoid valve is turned ON.
  3. 3. Opening of the main exhaust valve (valve M)
    Pilot pressure is constantly applied to the 1 (P) port. The valve opens fully when the main exhaust solenoid valve is turned ON.
  4. 4. Closing of the initial and main exhaust valves
    Turning off the initial and main exhaust solenoid valves resets the S and M valves and creates a seal.

Note: The adjustment nut does not rotate during valve operation. However, rotation of the adjustment nut can be fixed to prevent operation errors. To fix the adjustment nut after setting it, tighten it to the torque shown under "A" Section Thread Tightening Torque" below. (Applying excessive torque can result in damaged components or abnormal noises.)

""A" Section Thread Tightening Torque

  • XLD-25V/XLDV-40/XLDV-50: 0.08 N·m (0.8 kgf·cm) or less
  • XLDV-63/XLDV-80: 0.3 N·m (3 kgf·cm) or less

Product Options Descriptions

  • Auto switch (for main exhaust valve)
    The magnet actuates the auto switch. Uses 2 auto switches to detect the "opening and closing" positions and 1 auto switch to detect one of either the "open" or "closing" position. Auto switches operate at ordinary temperatures only (5 to 60°C).
  • Heater
    Simple heating using thermistors. The valve body can be heated to 100°C or 120°C, but this will differ depending on the valve size. The type and number of thermistors used will vary depending on the size and temperature setting. For high temperature specifications, the bonnet assembly is a heat resistant structure. This is not applicable for types with solenoid valves.

Notes

  • *The body material is A6063, the bellows material is SUS316L and the metal material used for other vacuum parts is SUS304. The standard seal material for vacuum parts is FKM, but other materials can be selected (see section on part number notation). Check that the fluid in use will not damage the selected material.
  • *Select a heat resistance for the actuation pressure tubing materials and fittings that is appropriate for the given operating temperature.
  • *The temperature of the switch part on the auto switch must be no higher than 60°C.
  • *When using with heaters (thermistors), install a device for preventing overheating.
  • *For types with a solenoid valve, keep the solenoid valve part at a temperature no higher than 50°C.
  • *Refer to the manufacturer's catalog for product information not detailed above.
30
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  1. 1
Part Number
XLDV-50M-M9NA-3LZ
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipFlange Type Flange Nominal Voltage Sonic Speed Conductance Pilot Port Direction Switch Part Number Number of Switches Seal material Amount of leakage
(Pa·m3/s) 		Electrical Entry Method Light/Surge Voltage Suppressor Body Surface Treatment Seal Change Location CE-marked Length of Lead Wire for Switch
(m)

-

1 Piece(s) Quote KF50AC110V80L/SFlange surface, rightD-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11L-type plug connectorWith light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNone0.5

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  1. 1
 

Basic Information

Type High Vacuum Solenoid Application Single Use Mounting Orientation Direct
Number of Ports 2-Port Valve Solenoid Type Single Switching Type 2-Position Normally Closed
Driving Type Directly Operated Pipe Port Type Flange Seal Type Bellows Seal

Please check the type/dimensions/specifications of the part XLDV-50M-M9NA-3LZ in the Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve series.

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Specification/Dimensions

  • type

    • XLDV
    • XLDV-25
    • XLDV-40
    • XLDV-50
    • XLDV-63
    • XLDV-80

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  • Flange Type

    • KF
    • K

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  • Flange Nominal

    • 25
    • 40
    • 50
    • 63
    • 80

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  • Voltage

    • DC12V
    • DC24V
    • AC100V
    • AC200V
    • AC110V
    • AC220V

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  • Sonic Speed Conductance

    • 14L/S
    • 45L/S
    • 80L/S
    • 160L/S
    • 200L/S

    Clear

  • Pilot Port Direction

    • Flange surface, back
    • Flange surface, left
    • Flange surface, right

    Clear

  • Switch Part Number

    • D-M9B solid-state auto switch
    • D-M9N solid-state auto switch
    • D-M9P solid-state auto switch
    • M9B
    • M9N
    • D-A90 reed auto switch
    • D-A93 reed auto switch
    • No auto-switch (no built-in magnet)
    • No auto-switch (with built-in magnet)

    Clear

  • Number of Switches

    • 1 pc. valve closed
    • 1 pc. valve open
    • 2 pcs. valve open/closed
    • With 2 pcs. (Detection position: Valve opening and closing)
    • No auto switch
    • No switch

    Clear

  • Seal material

    • Chemraz (Compound No.: SSE38)
    • Barrel Perfluoro (Compound No.: 70 W)
    • FKM 1349-80
    • FKM (Formula No.: 1349-80)
    • EPDM (Formula No.: 2101-80)

    Clear

  • Amount of leakage(Pa·m3/s)

    • Internal: 1.3 × 10^-10 External: 1.3 × 10^-11
    • Internal: 1.3 × 10-10, External: 1.3 × 10-11
    • Internal: 1.3 × 10^-8 External: 1.3 × 10^-9

    Clear

  • Electrical Entry Method

    • Grommet (lead wire length: 300 mm)
    • Grommet (lead wire length: 600 mm)
    • L-type plug connector
    • M-type plug connector

    Clear

  • Light/Surge Voltage Suppressor

    • None
    • With light and surge voltage suppressor
    • With light and surge voltage suppressor (non-polarized type)
    • With surge voltage suppressor

    Clear

  • Body Surface Treatment

    • External: hard anodized aluminum, Internal: base material
    • External: hard anodized aluminum, internal: anodic oxidation

    Clear

  • Seal Change Location

    • None
    • Valve seal / S valve seal assembly / O-ring for fixing
    • Valve seal / external seal / S valve seal assembly / O-ring for fixing

    Clear

  • CE-marked

    • CE-marked
    • None
    • Not compatible

    Clear

  • Length of Lead Wire for Switch(m)

    • 0.5
    • 1
    • 3
    • 5

    Clear

  • CAD

    • 2D
    • 3D

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Days to Ship

    • All
    • 21 Day(s) or Less

    Clear

Specify Alterations

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XLDV-50M-M9NA-5H
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Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipFlange Type Flange Nominal Voltage Sonic Speed Conductance Pilot Port Direction Switch Part Number Number of Switches Seal material Amount of leakage
(Pa·m3/s) 		Electrical Entry Method Light/Surge Voltage Suppressor Body Surface Treatment Seal Change Location CE-marked Length of Lead Wire for Switch
(m)

-

1 Piece(s) Quote KF25AC200V14L/SFlange surface, leftNo auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11L-type plug connectorWith light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNone-

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1 Piece(s) Quote KF25DC24V14L/SFlange surface, leftNo auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11Grommet (lead wire length: 300 mm)NoneExternal: hard anodized aluminum, Internal: base materialNoneNone-

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1 Piece(s) Quote KF25DC24V14L/SFlange surface, leftNo auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11Grommet (lead wire length: 300 mm)With surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNone-

-

1 Piece(s) Quote KF50DC24V80L/SFlange surface, rightD-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11Grommet (lead wire length: 600 mm)NoneExternal: hard anodized aluminum, Internal: base materialNoneNone0.5

-

1 Piece(s) Quote K63DC24V160L/SFlange surface, leftNo auto-switch (with built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11L-type plug connectorWith light and surge voltage suppressor (non-polarized type)External: hard anodized aluminum, Internal: base materialNoneNone-

-

1 Piece(s) Quote K63DC24V160L/SFlange surface, backD-A90 reed auto switch1 pc. valve openFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11Grommet (lead wire length: 300 mm)With light and surge voltage suppressor (non-polarized type)External: hard anodized aluminum, Internal: base materialNoneNone0.5

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