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A high vacuum angle valve that requires no air to drive, enabling use in portable equipment.
[Features]
· Uses no sliding metal parts, minimizing particulate matter.
· The pressure balance mechanism allows an unrestricted exhaust direction.
· A control power supply circuit for solenoid valve drive is now standard.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
Part Number
Configured Part Number is shown.
XLS-25-P5G
XLS Series (no control power supply) external appearance
XLS Series (with control power supply) external appearance
Model | XLS-16 | XLS-25 | XLS-16-P□G | XLS-25-P□G | |
---|---|---|---|---|---|
Valve Type | Normally closed (N.C.) | ||||
Fluids | Inert gas vacuum | ||||
Operating Temperature (°C) | 5 to 40 | ||||
Operating Pressure Pa (abs) | 0.1 MPa (G) to 1 × 10-6 (abs) | ||||
Conductance L/s Note 1: | 5 | 8 | 5 | 8 | |
Amount of leakage Pa·m3/s | Internal | 1.3 × 10 -8, values at normal temperature and excluding gas permeation | |||
External | 1.3 × 10 -11, values at normal temperature and excluding gas permeation | ||||
Flange Type and Size | KF16 | KF25 | KF16 | KF25 | |
Main Material Note 2: | Main body: aluminum alloy, Main parts: stainless steel, PFA, FKM (standard sealing material) | ||||
Surface Treatment | External: hard anodized aluminum, Internal: base material | ||||
Control Power Supply Yes/No | None | Yes | |||
Operating Power Supply Voltage | 24/6, 48/12, 100/24 V DC | 24 V DC, 100/200 V AC | |||
Allowable Voltage Fluctuation % | ±10 | ||||
Electrical Entry | G, C, D, T types | G type only | |||
Lead Wire | AWG20, outer diameter: 2.63 mm | VCTF2 × 0.75, outer diameter: 2.3 mm, Sheath outer diameter: 6.6 mm | |||
Coil Insulation Type | Class B | ||||
Maximum Operating Frequency (Hz) | 0.17 | ||||
Weight (kg) | 0.4 | 0.7 | 0.7 | 1.0 |
Note 1: Conductance is the same as that of an elbow with the same dimensions.
Note 2: A coating of vacuum grease (Y-VAC3) has been applied to the valve seat section of the vacuum part.
Model | Startup | Holding | ||||
---|---|---|---|---|---|---|
Power (W) | Current (A) | Power (W) | Current (A) | |||
XLS-16- | □G/C/D/T, P5G | 36 | 1.5 | 4.8 | 0.38 | |
P1G | 50 Hz | 30.5 | 0.47 | 14.8 | 0.35 | |
60 Hz | 10 | 0.27 | ||||
P2G | 50 Hz | 30 | 0.24 | 4.9 | 0.11 | |
60 Hz | 2.3 | 0.10 | ||||
XLS-25- | □G/C/D/T, P5G | 47 | 2.0 | 5.3 | 0.5 | |
P1G | 50 Hz | 42 | 0.62 | 20 | 0.46 | |
60 Hz | 13.5 | 0.36 | ||||
P2G | 50 Hz | 45 | 0.35 | 6.7 | 0.15 | |
60 Hz | 3.0 | 0.12 |
(Unit: mm)
Grommet (G) dimensional drawing
Conduit (C) dimensional drawing
Terminal (T) dimensional drawing
DIN terminal (D) dimensional drawing
(Unit: mm)
Grommet (G) dimensional drawing
Model | A | B | C | D | E | F | G | J | K | L | M |
---|---|---|---|---|---|---|---|---|---|---|---|
XLS-16-□G | 40 | 104 | 113 | 38 | 30 | 35 | 17 | 23 | - | - | 25.5 |
XLS-16-□C | 96 | 41 | - | - | |||||||
XLS-16-□D | 60 | 48 | - | ||||||||
XLS-16-□T | 129 | 95 | 62 | - | |||||||
XLS-25-□G | 50 | 128.5 | 138.5 | 48 | 40 | 40 | 26 | 25.5 | - | - | 28 |
XLS-25-□C | 121.5 | 43 | - | - | |||||||
XLS-25-□D | 120.5 | 63 | 51 | - | |||||||
XLS-25-□T | 121.5 | 154.5 | 97 | 66 | - | ||||||
XLS-16-P□G | 40 | 96 | 113 | 38 | 30 | 35 | 17 | 23 | 87 | 66.5 | - |
XLS-25-P□G | 50 | 121.5 | 138.5 | 48 | 40 | 40 | 26 | 25.5 | 89.5 | 69 | - |
XLS Series diagram
*Refer to p. 465 of the manufacturer's catalog for maintenance parts.
*The pressure balance mechanism allows an unrestricted exhaust direction.
Part Number |
---|
XLS-25-P5G |
Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Flange Nominal | Voltage | Sonic Speed Conductance | Electrical Entry Method | CE-marked | Control Power Supply Yes/No |
---|---|---|---|---|---|---|---|---|---|---|
MYR 3,115.22 | 1 Piece(s) | 21 Day(s) | 25 | DC24V | 8L/S | Grommet | None | With control power supply |
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Type | Solenoid Valve | Application | Single Use | Mounting Orientation | Direct |
---|---|---|---|---|---|
Number of Ports | 2-Port Valve | Solenoid Type | Single | Switching Type | 2-Position Normally Closed |
Driving Type | Directly Operated | Pipe Port Type | Flange | Flange Type | KF |
Seal Type | Bellows Seal |
Please check the type/dimensions/specifications of the part XLS-25-P5G in the Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance) series.
Part Number |
---|
XLS-16-5C |
XLS-16-5D |
XLS-16-5D-Q |
XLS-16-5G |
XLS-16-5G-Q |
XLS-16-5T |
Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Flange Nominal | Voltage | Sonic Speed Conductance | Electrical Entry Method | CE-marked | Control Power Supply Yes/No |
---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | 16 | DC24V | 5L/S | Conduit | None | None | ||
- | 1 Piece(s) | Quote | 16 | DC24V | 5L/S | DIN terminal | None | None | ||
- | 1 Piece(s) | Quote | 16 | DC24V | 5L/S | DIN terminal | CE-marked | None | ||
MYR 2,372.72 | 1 Piece(s) | 21 Day(s) | 16 | DC24V | 5L/S | Grommet | None | None | ||
- | 1 Piece(s) | Quote | 16 | DC24V | 5L/S | Grommet | CE-marked | None | ||
- | 1 Piece(s) | Quote | 16 | DC24V | 5L/S | Terminal | None | None |
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