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Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series

Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series

Vacuum valve with precision-cast single-piece structure which helps prevent gas accumulation.
[Features]
· Bellows type is particulate-free and cleaned.
· Pressure balanced structure.
· Body material: SCS13 (SUS304 equivalent).
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

(i)Caution

  • ■ SMC Product Line
    Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

    ■ Products Planned for Online Release
    Air cylinder-related product pages will be released on this site on an ad-hoc basis.
    CQ2/MG types, etc., are already available.
    *Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
    *The information above is correct as of December 2018.
  • Some of the items are scheduled to be discontinued as of end of March in 2023. The manufacturer keep the items produced but they are not available with Misumi.
    There are not the replacement items and the plan to resumption of sale. Please check the quotation and order screen for details.

  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

PDF

Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series Specifications

Angle valve XMC Series external appearance

Angle valve XMC Series external appearance

Angle valve XMC series pilot port direction

Angle valve XMC series pilot port direction

In-line type XYC series external appearance

In-line type XYC series external appearance

In-line type XYC series pilot port direction

In-line type XYC series pilot port direction

ModelXMC-16XMC-25 XYC-25XMC-40 XYC-40XMC-50 XYC-50XMC-63 XYC-63XMC-80 XYC-80
Flange (Valve) Size16, CF0342540, CF0705063, CF11480
Valve TypeDouble acting (dual operation), pressurize to open/close
FluidsInert gas vacuum
Operating Temperature (°C)5 to 60 (5 to 150 for high temperature type)
Operating Pressure Pa (abs)1 × 10-6 to atmospheric pressure
Conductance L/s Note 1:5144580160200
Amount of leakage Pa·m3/sInternalFor standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation
ExternalFor standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation
Operating Time (s)0.080.150.350.40.540.7
Flange TypeKF (NW), CFKF (NW)KF (NW), CFKF (NW)KF (NW), K (DN), CFKF (NW), K (DN)
Main MaterialMain body: SCS13 (SUS304 equivalent), Bellows: SUS316L, Major parts: SUS304, FKM (standard sealing material)
Pilot Pressure MPa (G)0.3 to 0.60.4 to 0.6
Pilot Port Connection Port DiameterM5Rc 1/8
Weight kg Note 2:XMC0.36 (0.40)0.621.40 (1.76)2.103.80 (5.16)6.30
XYC-0.671.422.504.507.80

Note 1: Conductance is the value for the “molecular flow” of an elbow with the same dimensions.
Note 2: Figures in ( ) indicate the weight for CF (ConFlat) fittings.

Product Drawing

 

(Unit: mm)

 

XMC-16 to 40 angle type dimensional drawing

XMC-16 to 40 angle type dimensional drawing

ModelABCDFnFcGHJP.C.D L1L2
XMC-16401103813034174026P.C.D 276 × ø4.4 mm
XMC-255012048140-263928--
XMC-40651716625570416336P.C.D 58.76 × ø6.6 mm
XMC-50 to 80 angle type dimensional drawing

XMC-50 to 80 angle type dimensional drawing

ModelABCDFnFdFcGHJP.C.D L1L2K
XMC-5070183803175--527729--10.5
XMC-63882091003987951147076.536P.C.D 92.18 × ø8.4 mm9
XMC-809025011745.5114110-8310544--9
XYC-25, XYC-40 / in-line type dimensional drawing

XYC-25, XYC-40 / in-line type dimensional drawing

ModelABCDEFnGHJ
XYC-25100.28548123.540266428
XYC-401301156623855418436
XYC-50 to 80- in-line type dimensional drawing

XYC-50 to 80- in-line type dimensional drawing

ModelABCDEFnFdGHJKM
XYC-5017812180315375-521042910.578
XYC-63209148100396187957012636999
XYC-8026817711745.58011411083150449116

Product Diagram

XMC angle-type (left) and XYC in-line type (right) diagram

XMC angle-type (left) and XYC in-line type (right) diagram

*Refer to p. 497 of the manufacturer's catalog for maintenance parts.

Notes

  • *The body material is SCS13 (SUS304 equivalent), the bellows material is SUS316L and the metal material used for other vacuum parts is SUS304. The standard seal material for vacuum parts is FKM, but it can be changed for other materials (see section on part number notation). Check that the fluid in use will not damage the selected material.
  • *Select a heat resistance for the actuation pressure tubing materials and fittings that is appropriate for the given operating temperature.
  • *The temperature of the switch part must be no higher than 60°C.
  • *Refer to the manufacturer's catalog for product information not detailed above.
Part Number
XMC-16
XMC-16-M9//
XMC-16-M9BA
XMC-16-M9BA-XQ1A
XMC-16-M9BLA
XMC-16-M9BLA-XQ1A
XMC-16-M9NA
XMC-16-M9NA-XN1A
XMC-16-M9PLA
XMC-16-XQ1A
XMC-16C
XMC-16C-M9BA
XMC-16CH0
XMC-16CL
XMC-16CL-M9NA-XN1A
XMC-16CLH0
XMC-16H0
XMC-16K
XMC-16L
XMC-16L-M9BA
XMC-16L-M9BLA
XMC-16L-M9NA-XN1A
XMC-16LH0
XMC-25
XMC-25-A90A
XMC-25-A93A
XMC-25-A93A-XN1A
XMC-25-A93C
XMC-25-A93LA
XMC-25-A93LB
XMC-25-M9//
XMC-25-M9//-XS1B
XMC-25-M9BA
XMC-25-M9BA-XS1B
XMC-25-M9BLA
XMC-25-M9BZA-XS1B
XMC-25-M9NA
XMC-25-M9NA-XN1A
XMC-25-M9NB
XMC-25-M9NLA
XMC-25-M9NLC
XMC-25-M9PLA
XMC-25-XQ1A
XMC-25-XQ1B
XMC-25-XQ1C
XMC-25-XS1B
XMC-25H0
XMC-25H0-XN1A
XMC-25K
XMC-25K-M9BLA
XMC-25K-M9NA
XMC-25K-M9NA-XN1A
XMC-25KH0-XN1A
XMC-25L
XMC-25L-A90A
XMC-25L-A90LA
XMC-25L-A93A
XMC-25L-M9//
XMC-25L-M9//-XN1A
XMC-25L-M9BA
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipFlange Type Flange Nominal Valve Type Pilot Port Direction Temperature Range
(°C)
Switch Part Number Number of Switches Seal material Amount of leakage
(Pa·m3/s)
Seal Change Location Length of Lead Wire for Switch
(m)

-

1 Piece(s) Quote KF16Angle typeFlange side5 to 60No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-

-

1 Piece(s) Quote KF16Angle typeFlange side5 to 60No auto-switch (with built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-

-

1 Piece(s) Quote KF16Angle typeFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5

-

1 Piece(s) Quote KF16Angle typeFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal0.5

-

1 Piece(s) Quote KF16Angle typeFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3

-

1 Piece(s) Quote KF16Angle typeFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal3

-

1 Piece(s) Quote KF16Angle typeFlange side5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5

-

1 Piece(s) Quote KF16Angle typeFlange side5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal0.5

-

1 Piece(s) Quote KF16Angle typeFlange side5 to 60D-M9P solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3

-

1 Piece(s) Quote KF16Angle typeFlange side5 to 60No auto-switch (no built-in magnet)No switchKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal-

-

1 Piece(s) Quote CF16Angle typeFlange side5 to 60No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-

-

1 Piece(s) Quote CF16Angle typeFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5

-

1 Piece(s) Quote CF16Angle typeFlange side5 to 150No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-

-

1 Piece(s) Quote CF16Angle typeFlange surface, back5 to 60No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-

-

1 Piece(s) Quote CF16Angle typeFlange surface, back5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal0.5

-

1 Piece(s) Quote CF16Angle typeFlange surface, back5 to 150No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-

-

1 Piece(s) Quote KF16Angle typeFlange side5 to 150No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-

-

1 Piece(s) Quote KF16Angle typeFlange surface, left5 to 60No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-

-

1 Piece(s) Quote KF16Angle typeFlange surface, back5 to 60No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-

-

1 Piece(s) Quote KF16Angle typeFlange surface, back5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5

-

1 Piece(s) Quote KF16Angle typeFlange surface, back5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3

-

1 Piece(s) Quote KF16Angle typeFlange surface, back5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal0.5

-

1 Piece(s) Quote KF16Angle typeFlange surface, back5 to 150No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-

-

1 Piece(s) Quote KF25Angle typeFlange side5 to 60No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-

-

1 Piece(s) Quote KF25Angle typeFlange side5 to 60D-A90 reed auto switch (Flange size 16 not supported)2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5

-

1 Piece(s) Quote KF25Angle typeFlange side5 to 60D-A93 reed auto switch (Flange size 16 not supported)2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5

-

1 Piece(s) Quote KF25Angle typeFlange side5 to 60D-A93 reed auto switch (Flange size 16 not supported)2 pcs. valve open/closedEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal0.5

-

1 Piece(s) Quote KF25Angle typeFlange side5 to 60D-A93 reed auto switch (Flange size 16 not supported)1 pc. valve closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5

-

1 Piece(s) Quote KF25Angle typeFlange side5 to 60D-A93 reed auto switch (Flange size 16 not supported)2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3

-

1 Piece(s) Quote KF25Angle typeFlange side5 to 60D-A93 reed auto switch (Flange size 16 not supported)1 pc. valve openFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3

-

1 Piece(s) Quote KF25Angle typeFlange side5 to 60No auto-switch (with built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-

-

1 Piece(s) Quote KF25Angle typeFlange side5 to 60No auto-switch (with built-in magnet)No switchVMQ 1232-70Internal: 1.3 × 10-8, External: 1.3 × 10-11Valve seal-

-

1 Piece(s) Quote KF25Angle typeFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5

-

1 Piece(s) Quote KF25Angle typeFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedVMQ 1232-70Internal: 1.3 × 10-8, External: 1.3 × 10-11Valve seal0.5

-

1 Piece(s) Quote KF25Angle typeFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3

-

1 Piece(s) Quote KF25Angle typeFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedVMQ 1232-70Internal: 1.3 × 10-8, External: 1.3 × 10-11Valve seal5

-

1 Piece(s) Quote KF25Angle typeFlange side5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5

-

1 Piece(s) Quote KF25Angle typeFlange side5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal0.5

-

1 Piece(s) Quote KF25Angle typeFlange side5 to 60D-M9N solid-state auto switch1 pc. valve openFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5

-

1 Piece(s) Quote KF25Angle typeFlange side5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3

-

1 Piece(s) Quote KF25Angle typeFlange side5 to 60D-M9N solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3

-

1 Piece(s) Quote KF25Angle typeFlange side5 to 60D-M9P solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3

-

1 Piece(s) Quote KF25Angle typeFlange side5 to 60No auto-switch (no built-in magnet)No switchKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal-

-

1 Piece(s) Quote KF25Angle typeFlange side5 to 60No auto-switch (no built-in magnet)No switchKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-11Valve seal-

-

1 Piece(s) Quote KF25Angle typeFlange side5 to 60No auto-switch (no built-in magnet)No switchKalrez 4079Internal: 1.3 × 10-10, External: 1.3 × 10-9External seal-

-

1 Piece(s) Quote KF25Angle typeFlange side5 to 60No auto-switch (no built-in magnet)No switchVMQ 1232-70Internal: 1.3 × 10-8, External: 1.3 × 10-11Valve seal-

-

1 Piece(s) Quote KF25Angle typeFlange side5 to 150No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-

-

1 Piece(s) Quote KF25Angle typeFlange side5 to 150No auto-switch (no built-in magnet)No switchEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal-

-

1 Piece(s) Quote KF25Angle typeFlange surface, left5 to 60No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-

-

1 Piece(s) Quote KF25Angle typeFlange surface, left5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3

-

1 Piece(s) Quote KF25Angle typeFlange surface, left5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5

-

1 Piece(s) Quote KF25Angle typeFlange surface, left5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal0.5

-

1 Piece(s) Quote KF25Angle typeFlange surface, left5 to 150No auto-switch (no built-in magnet)No switchEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal-

-

1 Piece(s) Quote KF25Angle typeFlange surface, back5 to 60No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-

-

1 Piece(s) Quote KF25Angle typeFlange surface, back5 to 60D-A90 reed auto switch (Flange size 16 not supported)2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5

-

1 Piece(s) Quote KF25Angle typeFlange surface, back5 to 60D-A90 reed auto switch (Flange size 16 not supported)2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None3

-

1 Piece(s) Quote KF25Angle typeFlange surface, back5 to 60D-A93 reed auto switch (Flange size 16 not supported)2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5

-

1 Piece(s) Quote KF25Angle typeFlange surface, back5 to 60No auto-switch (with built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None-

-

1 Piece(s) Quote KF25Angle typeFlange surface, back5 to 60No auto-switch (with built-in magnet)No switchEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal-

-

1 Piece(s) Quote KF25Angle typeFlange surface, back5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None0.5

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Basic Information

Type Pilot Vacuum Valve Application Single Use Mounting Orientation Direct
Number of Ports 2-Port Valve Switching Type 2-Position Normally Closed Pipe Port Type Flange
Seal Type Bellows Seal

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