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Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series (XMC-16-M9//)
Vacuum valve with precision-cast single-piece structure which helps prevent gas accumulation.
[Features]
· Bellows type is particulate-free and cleaned.
· Pressure balanced structure.
· Body material: SCS13 (SUS304 equivalent).
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.
(i)Caution
- ■ SMC Product Line
Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
■ Products Planned for Online Release
Air cylinder-related product pages will be released on this site on an ad-hoc basis.
CQ2/MG types, etc., are already available.
*Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
*The information above is correct as of December 2018. - Some of the items are scheduled to be discontinued as of end of March in 2023. The manufacturer keep the items produced but they are not available with Misumi.
There are not the replacement items and the plan to resumption of sale. Please check the quotation and order screen for details. - The product images may be representative images only. Refer to the manufacturer's catalog for shape details.
Part Number
Configured Part Number is shown.
XMC-16-M9//
Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series Specifications
Angle valve XMC Series external appearance
Angle valve XMC series pilot port direction
In-line type XYC series external appearance
In-line type XYC series pilot port direction
| Model | XMC-16 | XMC-25 XYC-25 | XMC-40 XYC-40 | XMC-50 XYC-50 | XMC-63 XYC-63 | XMC-80 XYC-80 | |
|---|---|---|---|---|---|---|---|
| Flange (Valve) Size | 16, CF034 | 25 | 40, CF070 | 50 | 63, CF114 | 80 | |
| Valve Type | Double acting (dual operation), pressurize to open/close | ||||||
| Fluids | Inert gas vacuum | ||||||
| Operating Temperature (°C) | 5 to 60 (5 to 150 for high temperature type) | ||||||
| Operating Pressure Pa (abs) | 1 × 10-6 to atmospheric pressure | ||||||
| Conductance L/s Note 1: | 5 | 14 | 45 | 80 | 160 | 200 | |
| Amount of leakage Pa·m3/s | Internal | For standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation | |||||
| External | For standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation | ||||||
| Operating Time (s) | 0.08 | 0.15 | 0.35 | 0.4 | 0.54 | 0.7 | |
| Flange Type | KF (NW), CF | KF (NW) | KF (NW), CF | KF (NW) | KF (NW), K (DN), CF | KF (NW), K (DN) | |
| Main Material | Main body: SCS13 (SUS304 equivalent), Bellows: SUS316L, Major parts: SUS304, FKM (standard sealing material) | ||||||
| Pilot Pressure MPa (G) | 0.3 to 0.6 | 0.4 to 0.6 | |||||
| Pilot Port Connection Port Diameter | M5 | Rc 1/8 | |||||
| Weight kg Note 2: | XMC | 0.36 (0.40) | 0.62 | 1.40 (1.76) | 2.10 | 3.80 (5.16) | 6.30 |
| XYC | - | 0.67 | 1.42 | 2.50 | 4.50 | 7.80 | |
Note 1: Conductance is the value for the “molecular flow” of an elbow with the same dimensions.
Note 2: Figures in ( ) indicate the weight for CF (ConFlat) fittings.
Product Drawing
(Unit: mm)
XMC-16 to 40 angle type dimensional drawing
| Model | A | B | C | D | Fn | Fc | G | H | J | P.C.D L1 | L2 |
|---|---|---|---|---|---|---|---|---|---|---|---|
| XMC-16 | 40 | 110 | 38 | 1 | 30 | 34 | 17 | 40 | 26 | P.C.D 27 | 6 × ø4.4 mm |
| XMC-25 | 50 | 120 | 48 | 1 | 40 | - | 26 | 39 | 28 | - | - |
| XMC-40 | 65 | 171 | 66 | 2 | 55 | 70 | 41 | 63 | 36 | P.C.D 58.7 | 6 × ø6.6 mm |
XMC-50 to 80 angle type dimensional drawing
| Model | A | B | C | D | Fn | Fd | Fc | G | H | J | P.C.D L1 | L2 | K |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| XMC-50 | 70 | 183 | 80 | 31 | 75 | - | - | 52 | 77 | 29 | - | - | 10.5 |
| XMC-63 | 88 | 209 | 100 | 39 | 87 | 95 | 114 | 70 | 76.5 | 36 | P.C.D 92.1 | 8 × ø8.4 mm | 9 |
| XMC-80 | 90 | 250 | 117 | 45.5 | 114 | 110 | - | 83 | 105 | 44 | - | - | 9 |
XYC-25, XYC-40 / in-line type dimensional drawing
| Model | A | B | C | D | E | Fn | G | H | J |
|---|---|---|---|---|---|---|---|---|---|
| XYC-25 | 100.2 | 85 | 48 | 1 | 23.5 | 40 | 26 | 64 | 28 |
| XYC-40 | 130 | 115 | 66 | 2 | 38 | 55 | 41 | 84 | 36 |
XYC-50 to 80- in-line type dimensional drawing
| Model | A | B | C | D | E | Fn | Fd | G | H | J | K | M |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| XYC-50 | 178 | 121 | 80 | 31 | 53 | 75 | - | 52 | 104 | 29 | 10.5 | 78 |
| XYC-63 | 209 | 148 | 100 | 39 | 61 | 87 | 95 | 70 | 126 | 36 | 9 | 99 |
| XYC-80 | 268 | 177 | 117 | 45.5 | 80 | 114 | 110 | 83 | 150 | 44 | 9 | 116 |
Product Diagram
XMC angle-type (left) and XYC in-line type (right) diagram
*Refer to p. 497 of the manufacturer's catalog for maintenance parts.
Notes
- *The body material is SCS13 (SUS304 equivalent), the bellows material is SUS316L and the metal material used for other vacuum parts is SUS304. The standard seal material for vacuum parts is FKM, but it can be changed for other materials (see section on part number notation). Check that the fluid in use will not damage the selected material.
- *Select a heat resistance for the actuation pressure tubing materials and fittings that is appropriate for the given operating temperature.
- *The temperature of the switch part must be no higher than 60°C.
- *Refer to the manufacturer's catalog for product information not detailed above.
| Part Number |
|---|
| XMC-16-M9// |
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Flange Type | Flange Nominal | Valve Type | Pilot Port Direction | Temperature Range (°C) | Switch Part Number | Number of Switches | Seal material | Amount of leakage (Pa·m3/s) | Seal Change Location | Length of Lead Wire for Switch (m) |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | KF | 16 | Angle type | Flange side | 5 to 60 | No auto-switch (with built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - |
Loading...
Basic Information
| Type | Pilot Vacuum Valve | Application | Single Use | Mounting Orientation | Direct |
|---|---|---|---|---|---|
| Number of Ports | 2-Port Valve | Switching Type | 2-Position Normally Closed | Pipe Port Type | Flange |
| Seal Type | Bellows Seal |
Please check the type/dimensions/specifications of the part XMC-16-M9// in the Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series series.
Specification/Dimensions
-
Length of Lead Wire for Switch(m)
- 0.5
- 1
- 3
- 5
-
type
- XMC
- XYC
-
Flange Type
- KF
- K
- CF
- Others
-
Flange Nominal
- 16
- 25
- 40
- 50
- 63
- 80
-
Valve Type
- Angle type
- In-line type
-
Pilot Port Direction
- Flange side
- Flange surface, back
- Flange surface, left
- Flange surface, right
-
Temperature Range(°C)
- 5 to 60
- 5 to 150
-
Switch Part Number
-
Number of Switches
- 1 pc. (Detection position: valve closed)
- 1 pc. (Detection position: valve open)
- 1 pc. valve closed
- 1 pc. valve open
- 2 pcs. (Detection position: valve open/closed)
- 2 pcs. valve open/closed
- No auto switch
- No switch
-
Seal material
-
Amount of leakage(Pa·m3/s)
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-11
- Internal: 1.3 × 10-10, External: 1.3 × 10-11
- Internal: 1.3 × 10-10, External: 1.3 × 10-9
- Internal: 1.3 × 10-8, External: 1.3 × 10-11
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-9
- Internal: 1.3 × 10-8, External: 1.3 × 10-9
-
Seal Change Location
-
CAD
- 2D
- 3D
Days to Ship
-
- All
- 21 Day(s) or Less
- 27 Day(s) or Less
- 41 Day(s) or Less
Specify Alterations
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
Products like this...
| Part Number |
|---|
| XMC-16 |
| XMC-16-M9BA |
| XMC-16-M9BA-XQ1A |
| XMC-16-M9BLA |
| XMC-16-M9BLA-XQ1A |
| XMC-16-M9NA |
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Flange Type | Flange Nominal | Valve Type | Pilot Port Direction | Temperature Range (°C) | Switch Part Number | Number of Switches | Seal material | Amount of leakage (Pa·m3/s) | Seal Change Location | Length of Lead Wire for Switch (m) |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | KF | 16 | Angle type | Flange side | 5 to 60 | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | ||
- | 1 Piece(s) | Quote | KF | 16 | Angle type | Flange side | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 16 | Angle type | Flange side | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Kalrez 4079 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal | 0.5 | ||
- | 1 Piece(s) | Quote | KF | 16 | Angle type | Flange side | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 3 | ||
- | 1 Piece(s) | Quote | KF | 16 | Angle type | Flange side | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | Kalrez 4079 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal | 3 | ||
- | 1 Piece(s) | Quote | KF | 16 | Angle type | Flange side | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 |
Additional Products in this Category
- 《Vacuum Specification》Control Equipment Compact Solenoid Valve G010 Series
- High-Vacuum Angle Valve (Multi-Action / Single-Action)
- Butterfly Valve/AXOII Series
- Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series
- Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series
- Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve
- Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD
- Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)
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