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Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)
A vacuum valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.
(i)Caution
- ■ SMC Product Line
Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
■ Products Planned for Online Release
Air cylinder-related product pages will be released on this site on an ad-hoc basis.
CQ2/MG types, etc., are already available.
*Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
*The information above is correct as of December 2018. - The product images may be representative images only. Refer to the manufacturer's catalog for shape details.
Part Number
Configured Part Number is shown.
Stainless Steel High Vacuum Angle Valves / In-Line Valves, Manual/Bellows Seal, XMH/XYH Series Specifications
Angle valve XMH Series external appearance
In-line type XYH series external appearance
| Model | XMH-16 | XMH-25 XYH-25 | XMH-40 XYH-40 | XMH-50 XYH-50 | |
|---|---|---|---|---|---|
| Flange (Valve) Size | 16, CF034 | 25 | 40, CF070 | 50 | |
| Valve Type | Manual | ||||
| Fluids | Inert gas vacuum | ||||
| Operating Temperature (°C) | 5 to 150 | ||||
| Operating Pressure Pa (abs) | 1 × 10-6 to atmospheric pressure | ||||
| Conductance L/s Note 1: | 5 | 14 | 45 | 80 | |
| Amount of leakage Pa·m3/s | Internal | For standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation | |||
| External | For standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation | ||||
| Flange Type | KF (NW), CF | KF (NW) | KF (NW), CF | KF (NW) | |
| Main Material | Main body: SCS13 (SUS304 equivalent), Bellows: SUS316L, Major parts: SUS304, FKM (standard sealing material) | ||||
| Actuation torque N·m | 0.1 ≤ | 0.15≦ | 0.35≦ | 0.5≦ | |
| Handle revolutions | 5 | 7 | 10 | 13 | |
| Weight kg Note 2: | XMH | 0.31 (0.35) | 0.57 | 1.35 (1.71) | 2.02 |
| XYH | - | 0.62 | 1.37 | 2.42 | |
Note 1: Conductance is the value for the “molecular flow” of an elbow with the same dimensions.
Note 2: Figures in ( ) indicate the weight for CF (ConFlat) fittings.
Product Drawing
(Unit: mm)
XMH angle-type dimensional drawing
XYH in-line type dimensional drawing
| Model | A | B | C | D | Fn | Fc | G | H | J | P.C.D. L1 | L2 |
|---|---|---|---|---|---|---|---|---|---|---|---|
| XMH-16 | 40 | 100.5 | 38 | 1 | 30 | 34 | 17 | 35 | 18 | P.C.D 27 | 6 × ø4.4 mm |
| XMH-25 | 50 | 114 | 48 | 1 | 40 | - | 26 | 40.5 | 21.5 | - | - |
| XMH-40 | 65 | 162.5 | 66 | 2 | 55 | 70 | 41 | 57 | 30 | P.C.D 58.7 | 6 × ø6.6 mm |
| XMH-50 | 70 | 179.5 | 79 | 2 | 75 | - | 52 | 70 | 35 | - | - |
| Model | A | B | C | D | E | Fn | G | H | J |
|---|---|---|---|---|---|---|---|---|---|
| XYH-25 | 100.2 | 75.8 | 48 | 1 | 23.5 | 40 | 26 | 40.5 | 21.5 |
| XYH-40 | 130 | 102.5 | 66 | 2 | 38 | 55 | 41 | 57 | 30 |
| XYH-50 | 178 | 119 | 79 | 2 | 53 | 75 | 52 | 70 | 35 |
Product Diagram
XMH angle-type (left) and XYH in-line type (right) diagram
*Refer to the manufacturer's catalog for maintenance parts.
Notes
- *The body material is SCS13 (SUS304 equivalent), the bellows material is SUS316L and the metal material used for other vacuum parts is SUS304. The standard seal material for vacuum parts is FKM, but it can be changed for other materials (see section on part number notation). Check that the fluid in use will not damage the selected material.
- *Select a heat resistance for the actuation pressure tubing materials and fittings that is appropriate for the given operating temperature.
- *Refer to the manufacturer's catalog for parts other than those detailed above.
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Flange Type | Flange Nominal | Sonic Speed Conductance | Valve Type | Seal material | Amount of leakage (Pa·m3/s) | Seal Change Location |
|---|---|---|---|---|---|---|---|---|---|---|---|
MYR 2,758.53 | 1 Piece(s) | 21 Day(s) | KF | 16 | 5 | Angle type | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | ||
- | 1 Piece(s) | Quote | KF | 16 | 5 | Angle type | EPDM 2101-80 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal | ||
- | 1 Piece(s) | Quote | KF | 16 | 5 | Angle type | EPDM 2101-80 | Internal: 1.3 × 10-8, External: 1.3 × 10-11 | Valve seal | ||
- | 1 Piece(s) | Quote | KF | 16 | 5 | Angle type | EPDM 2101-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-9 | External seal | ||
- | 1 Piece(s) | Quote | KF | 16 | 5 | Angle type | Barrel Perfluoro 70W | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal | ||
- | 1 Piece(s) | Quote | KF | 16 | 5 | Angle type | Barrel Perfluoro 70W | Internal: 1.3 × 10-8, External: 1.3 × 10-11 | Valve seal | ||
- | 1 Piece(s) | Quote | KF | 16 | 5 | Angle type | Barrel Perfluoro 70W | Internal: 1.3 × 10-10, External: 1.3 × 10-9 | External seal | ||
- | 1 Piece(s) | Quote | KF | 16 | 5 | Angle type | Kalrez 4079 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal | ||
- | 1 Piece(s) | Quote | KF | 16 | 5 | Angle type | Kalrez 4079 | Internal: 1.3 × 10-8, External: 1.3 × 10-11 | Valve seal | ||
- | 1 Piece(s) | Quote | KF | 16 | 5 | Angle type | Kalrez 4079 | Internal: 1.3 × 10-10, External: 1.3 × 10-9 | External seal | ||
- | 1 Piece(s) | Quote | KF | 16 | 5 | Angle type | Chemraz SS592 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal | ||
- | 1 Piece(s) | Quote | KF | 16 | 5 | Angle type | Chemraz SS630 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal | ||
- | 1 Piece(s) | Quote | KF | 16 | 5 | Angle type | Chemraz SSE38 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal | ||
- | 1 Piece(s) | Quote | KF | 16 | 5 | Angle type | FKM for Plasma 3310-75 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal | ||
- | 1 Piece(s) | Quote | KF | 16 | 5 | Angle type | FKM for Plasma 3310-75 | Internal: 1.3 × 10-8, External: 1.3 × 10-11 | Valve seal | ||
- | 1 Piece(s) | Quote | KF | 16 | 5 | Angle type | FKM for Plasma 3310-75 | Internal: 1.3 × 10-10, External: 1.3 × 10-9 | External seal | ||
- | 1 Piece(s) | Quote | CF | 16 | 5 | Angle type | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | ||
- | 1 Piece(s) | Quote | CF | 16 | 5 | Angle type | Kalrez 4079 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal | ||
- | 1 Piece(s) | Quote | CF | 16 | 5 | Angle type | Kalrez 4079 | Internal: 1.3 × 10-8, External: 1.3 × 10-11 | Valve seal | ||
- | 1 Piece(s) | Quote | CF | 16 | 5 | Angle type | Kalrez 4079 | Internal: 1.3 × 10-10, External: 1.3 × 10-9 | External seal | ||
MYR 2,951.43 | 1 Piece(s) | 21 Day(s) | KF | 25 | 14 | Angle type | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | ||
- | 1 Piece(s) | Quote | KF | 25 | 14 | Angle type | EPDM 2101-80 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal | ||
- | 1 Piece(s) | Quote | KF | 25 | 14 | Angle type | Barrel Perfluoro 70W | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal | ||
- | 1 Piece(s) | Quote | KF | 25 | 14 | Angle type | Kalrez 4079 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal | ||
- | 1 Piece(s) | Quote | KF | 25 | 14 | Angle type | Kalrez 4079 | Internal: 1.3 × 10-8, External: 1.3 × 10-11 | Valve seal | ||
- | 1 Piece(s) | Quote | KF | 25 | 14 | Angle type | Kalrez 4079 | Internal: 1.3 × 10-10, External: 1.3 × 10-9 | External seal | ||
- | 1 Piece(s) | Quote | KF | 25 | 14 | Angle type | Chemraz (Compound No.: SSE38) | Internal: 1.3 × 10^-8 External: 1.3 × 10^-9 | Valve seal / external seal | ||
- | 1 Piece(s) | Quote | KF | 25 | 14L/S | Angle type | VMQ (Formula No.: 1232-70) | Internal: 1.3 × 10^-8 External: 1.3 × 10^-9 | Valve seal / external seal | ||
- | 1 Piece(s) | Quote | KF | 25 | 14 | Angle type | FKM for Plasma 3310-75 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal | ||
- | 1 Piece(s) | Quote | KF | 25 | 14 | Angle type | FKM for Plasma 3310-75 | Internal: 1.3 × 10-8, External: 1.3 × 10-11 | Valve seal | ||
- | 1 Piece(s) | Quote | KF | 25 | 14 | Angle type | FKM for Plasma 3310-75 | Internal: 1.3 × 10-10, External: 1.3 × 10-9 | External seal | ||
MYR 4,561.80 | 1 Piece(s) | 21 Day(s) | KF | 40 | 45 | Angle type | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | ||
- | 1 Piece(s) | Quote | KF | 40 | 45 | Angle type | EPDM 2101-80 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal | ||
MYR 5,912.13 | 1 Piece(s) | 21 Day(s) | KF | 40 | 45 | Angle type | Kalrez 4079 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal | ||
- | 1 Piece(s) | Quote | KF | 40 | 45 | Angle type | Kalrez 4079 | Internal: 1.3 × 10-10, External: 1.3 × 10-9 | External seal | ||
- | 1 Piece(s) | Quote | KF | 40 | 45 | Angle type | FKM for Plasma 3310-75 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal | ||
MYR 4,904.35 | 1 Piece(s) | 21 Day(s) | CF | 40 | 45 | Angle type | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | ||
- | 1 Piece(s) | Quote | CF | 40 | 45 | Angle type | EPDM 2101-80 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal | ||
- | 1 Piece(s) | Quote | CF | 40 | 45 | Angle type | EPDM 2101-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-9 | External seal | ||
- | 1 Piece(s) | Quote | CF | 40 | 45 | Angle type | Kalrez 4079 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal | ||
- | 1 Piece(s) | Quote | KF | 50 | 80 | Angle type | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | ||
- | 1 Piece(s) | Quote | KF | 50 | 80 | Angle type | EPDM 2101-80 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal | ||
- | 1 Piece(s) | Quote | KF | 50 | 80 | Angle type | Kalrez 4079 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal | ||
MYR 3,510.73 | 1 Piece(s) | 21 Day(s) | KF | 25 | 14 | In-line type | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | ||
- | 1 Piece(s) | Quote | KF | 25 | 14 | In-line type | EPDM 2101-80 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal | ||
- | 1 Piece(s) | Quote | KF | 25 | 14 | In-line type | Barrel Perfluoro 70W | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal | ||
- | 1 Piece(s) | Quote | KF | 25 | 14 | In-line type | Barrel Perfluoro 70W | Internal: 1.3 × 10-8, External: 1.3 × 10-11 | Valve seal | ||
- | 1 Piece(s) | Quote | KF | 25 | 14 | In-line type | Barrel Perfluoro 70W | Internal: 1.3 × 10-10, External: 1.3 × 10-9 | External seal | ||
- | 1 Piece(s) | Quote | KF | 25 | 14 | In-line type | Kalrez 4079 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal | ||
- | 1 Piece(s) | Quote | KF | 25 | 14 | In-line type | Kalrez 4079 | Internal: 1.3 × 10-8, External: 1.3 × 10-11 | Valve seal | ||
- | 1 Piece(s) | Quote | KF | 25 | 14 | In-line type | Kalrez 4079 | Internal: 1.3 × 10-10, External: 1.3 × 10-9 | External seal | ||
- | 1 Piece(s) | Quote | KF | 25 | 14 | In-line type | Chemraz SS592 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal | ||
- | 1 Piece(s) | Quote | KF | 25 | 14 | In-line type | Chemraz SS630 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal | ||
- | 1 Piece(s) | Quote | KF | 25 | 14 | In-line type | Chemraz SSE38 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal | ||
- | 1 Piece(s) | Quote | KF | 25 | 14 | In-line type | FKM for Plasma 3310-75 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal | ||
- | 1 Piece(s) | Quote | KF | 25 | 14 | In-line type | FKM for Plasma 3310-75 | Internal: 1.3 × 10-8, External: 1.3 × 10-11 | Valve seal | ||
- | 1 Piece(s) | Quote | KF | 25 | 14 | In-line type | FKM for Plasma 3310-75 | Internal: 1.3 × 10-10, External: 1.3 × 10-9 | External seal | ||
MYR 5,121.10 | 1 Piece(s) | 21 Day(s) | KF | 40 | 45 | In-line type | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | ||
- | 1 Piece(s) | Quote | KF | 40 | 45 | In-line type | EPDM 2101-80 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal | ||
- | 1 Piece(s) | Quote | KF | 40 | 45 | In-line type | Barrel Perfluoro 70W | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal |
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Basic Information
| Type | Manual Vacuum Valve | Application | Single Use | Mounting Orientation | Direct |
|---|---|---|---|---|---|
| Number of Ports | 2-Port Valve | Switching Type | 2-Position Normally Closed | Pipe Port Type | Flange |
| Seal Type | Bellows Seal |
Specification/Dimensions
-
Flange Type
- KF
- CF
-
Flange Nominal
- 16
- 25
- 40
- 50
-
Sonic Speed Conductance
-
Valve Type
- Angle type
- In-line type
-
Seal material
-
Amount of leakage(Pa·m3/s)
- Internal: 1.3 × 10-10, External: 1.3 × 10-11
- Internal: 1.3 × 10-10, External: 1.3 × 10-9
- Internal: 1.3 × 10-8, External: 1.3 × 10-11
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-9
- Internal: 1.3 × 10-8, External: 1.3 × 10-9
-
Seal Change Location
-
type
- XMH
- XMH-25
- XYH
- XYH-50
-
CAD
- 2D
- 3D
Days to Ship
-
- All
- 21 Day(s) or Less
Specify Alterations
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
Additional Products in this Category
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- Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series
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