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Please note that some of the items may take longer lead time to ship due to Japan New Year holidays (29-Dec-2024 to 5-Jan-2025). Early order placement is recommended. We apologize for the inconvenience caused and appreciate your kind understanding. [Details]
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Air Slide Table Clean / Low Dust Generation 13/20/22-MXQ Series

SMC

[13-Series, Clean Series]
・ It is suitable for clean environment.
・ It prevents dust generation in the cleanroom.
[20-Series Copper/Fluorine-Free Specifications]
・ Suitable for use in environments that dislike copper and fluorine materials.
・ External dimensions are the same as standard products.
[22-Series, Copper / Fluorine / Silicone-Free + Low Dust Generation]
・ It supports environments with restrictions on copper-based, fluorine-based, and silicone-based materials.
・ The structure is the same as the Clean Series. (Grease and packaging are different from the Clean Series)

(i)Caution

Refer to the manufacturer's catalog for specification and material details.
Product images may be representative images only. Please refer to the manufacturer's catalog for shape details.
CAD data is not available for some model numbers.

Part Number

Configured Part Number is shown.

Product Specifications
Part Numbers
Catalog

Please refer to the table below for details about lead wire / connector specifications.

: 30; 45; 60

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Part Number
13-MXQ20-10
13-MXQ20-10-A93
13-MXQ20-10-A93L
13-MXQ20-10-A93S
13-MXQ20-10-A96
13-MXQ20-10-M9B
13-MXQ20-10-M9BL
13-MXQ20-10-M9BS
13-MXQ20-10-M9NL
13-MXQ20-10-M9NLS
13-MXQ20-10-M9NWL
13-MXQ20-10-M9NZ
13-MXQ20-10A
13-MXQ20-10A-A93
13-MXQ20-10A-A93L
13-MXQ20-10A-A93LS
13-MXQ20-10A-M9B
13-MXQ20-10A-M9BL
13-MXQ20-10A-M9BV
13-MXQ20-10A-M9N
13-MXQ20-10A-M9NL
13-MXQ20-10AS
13-MXQ20-10AS-A93
13-MXQ20-10AS-A93L
13-MXQ20-10AS-A93S
13-MXQ20-10AS-M9B
13-MXQ20-10AS-M9BL
13-MXQ20-10AS-M9BW
13-MXQ20-10AS-M9N
13-MXQ20-10AS-M9NL
13-MXQ20-10AT-M9N
13-MXQ20-10C
13-MXQ20-10C-A93
13-MXQ20-10C-A93L
13-MXQ20-10C-A93V
13-MXQ20-10C-M9B
13-MXQ20-10C-M9BL
13-MXQ20-10C-M9BS
13-MXQ20-10C-M9BV
13-MXQ20-10CS
13-MXQ20-10CS-A93L
13-MXQ20-10CS-M9BL
13-MXQ20-10CT
13-MXQ20-10CT-A93
13-MXQ20-10P-M9B
13-MXQ20-20
13-MXQ20-20-A93
13-MXQ20-20-A93L
13-MXQ20-20-M9B
13-MXQ20-20-M9BL
13-MXQ20-20-M9BV
13-MXQ20-20-M9BVL
13-MXQ20-20-M9N
13-MXQ20-20-M9NL
13-MXQ20-20-M9NV
13-MXQ20-20A
13-MXQ20-20A-A93
13-MXQ20-20A-A93L
13-MXQ20-20A-M9B
13-MXQ20-20A-M9BL

Standard Unit Price	Minimum order quantity	Days to Ship	Cylinder I.D. (Ø)	Stroke (mm)	Table Size: Length L (mm)	Max. Load Mass (Horizontal Mounting) (kg)	Table Size: Width W (mm)	Environment	Table Size: Height H (mm)	Table Parallelism (µm)	Piping Format	Port Screw Type	Adjuster Option	Function Option	Auto Switches	Lead Wire Length (m)	Lead Wire Connector	The number of the switches	Type
MYR 4,138.90	1 Piece(s)	21 Day(s)	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	None	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	No adjuster	Standard	A93	0.5	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	No adjuster	Standard	A93	3	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	No adjuster	Standard	A93	0.5	None	1 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	No adjuster	Standard	A96	0.5	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	No adjuster	Standard	M9B	0.5	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	No adjuster	Standard	M9B	3	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	No adjuster	Standard	M9B	0.5	None	1 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	No adjuster	Standard	M9N	3	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	No adjuster	Standard	M9N	3	None	1 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	No adjuster	Standard	M9NW	3	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	No adjuster	Standard	M9N	5	None	2 pcs.	Clean series
MYR 4,594.90	1 Piece(s)	21 Day(s)	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Dual-end rubber stoppers	Standard	Without auto switch (built-in magnet)	None	None	None	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Dual-end rubber stoppers	Standard	A93	0.5	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Dual-end rubber stoppers	Standard	A93	3	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Dual-end rubber stoppers	Standard	A93	3	None	1 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Dual-end rubber stoppers	Standard	M9B	0.5	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Dual-end rubber stoppers	Standard	M9B	3	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Dual-end rubber stoppers	Standard	M9BV	0.5	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Dual-end rubber stoppers	Standard	M9N	0.5	None	2 pcs.	Clean series
MYR 5,050.90	1 Piece(s)	21 Day(s)	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Dual-end rubber stoppers	Standard	M9N	3	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Forward-end rubber stopper	Standard	Without auto switch (built-in magnet)	None	None	None	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Forward-end rubber stopper	Standard	A93	0.5	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Forward-end rubber stopper	Standard	A93	3	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Forward-end rubber stopper	Standard	A93	0.5	None	1 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Forward-end rubber stopper	Standard	M9B	0.5	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Forward-end rubber stopper	Standard	M9B	3	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Forward-end rubber stopper	Standard	M9BW	0.5	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Forward-end rubber stopper	Standard	M9N	0.5	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Forward-end rubber stopper	Standard	M9N	3	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Reverse-end rubber stopper	Standard	M9N	0.5	None	2 pcs.	Clean series
MYR 4,869.48	1 Piece(s)	21 Day(s)	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Dual-end metal stoppers	Standard	Without auto switch (built-in magnet)	None	None	None	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Dual-end metal stoppers	Standard	A93	0.5	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Dual-end metal stoppers	Standard	A93	3	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Dual-end metal stoppers	Standard	A93V	0.5	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Dual-end metal stoppers	Standard	M9B	0.5	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Dual-end metal stoppers	Standard	M9B	3	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Dual-end metal stoppers	Standard	M9B	0.5	None	1 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Dual-end metal stoppers	Standard	M9BV	0.5	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Forward-end metal stopper	Standard	Without auto switch (built-in magnet)	None	None	None	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Forward-end metal stopper	Standard	A93	3	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Forward-end metal stopper	Standard	M9B	3	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Retraction end metal stopper	Standard	Without auto switch (built-in magnet)	None	None	None	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Retraction end metal stopper	Standard	A93	0.5	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	10	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	No adjuster	Axial direction piping type	M9B	0.5	None	2 pcs.	Clean series
MYR 4,138.90	1 Piece(s)	21 Day(s)	20	20	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	None	Clean series
-	1 Piece(s)	Quote	20	20	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	No adjuster	Standard	A93	0.5	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	20	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	No adjuster	Standard	A93	3	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	20	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	No adjuster	Standard	M9B	0.5	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	20	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	No adjuster	Standard	M9B	3	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	20	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	No adjuster	Standard	M9BV	0.5	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	20	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	No adjuster	Standard	M9BV	3	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	20	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	No adjuster	Standard	M9N	0.5	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	20	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	No adjuster	Standard	M9N	3	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	20	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	No adjuster	Standard	M9NV	0.5	None	2 pcs.	Clean series
MYR 4,594.90	1 Piece(s)	21 Day(s)	20	20	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Dual-end rubber stoppers	Standard	Without auto switch (built-in magnet)	None	None	None	Clean series
-	1 Piece(s)	Quote	20	20	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Dual-end rubber stoppers	Standard	A93	0.5	None	2 pcs.	Clean series
MYR 4,882.72	1 Piece(s)	21 Day(s)	20	20	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Dual-end rubber stoppers	Standard	A93	3	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	20	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Dual-end rubber stoppers	Standard	M9B	0.5	None	2 pcs.	Clean series
-	1 Piece(s)	Quote	20	20	131	5~9.2	60	Dust Proofing	46	40	Standard type	Rc	Dual-end rubber stoppers	Standard	M9B	3	None	2 pcs.	Clean series

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Basic Information

Type	L-Shaped Table Type	Table Material	Aluminum	Guide Type	Linear guide type
Table Surface Treatment	Electroless Nickel Plating	Operating Pressure(MPa)	0.15 to 0.7	Made-to-order	None

Configure

1,267 Part Numbers

View Part Numbers

Configure Remaining Specifications

Completed

Specification/Dimensions

Cylinder I.D.(Ø)
6

8

12

16

20

25
Clear
Stroke(mm)
10

20

30

40

50

75

100

125

150
Clear
Table Size: Length L(mm)
47

52

57

62

67

70

73

75

76

80

83

85

88

90

94

95

98

101

102

104

107

108

111

112

115

117

118

121

122

124

128

131

132

133

135

141

144

147.5

156

157.5

159

168

175

176

181

181.5

192

199

200

206.5

219

220

224

225

244

245.5

249

253

273

277

281

298

298.5

305

323.5
Clear
Table Size: Width W(mm)
27

31

32

36

39

46

49

58

60

70

74

84
Clear
Environment
- Dust Proofing
- Copper-Free/Fluorine-Free
Clear
Table Size: Height H(mm)
20

23

30

37

46

55
Clear
Table Parallelism(µm)
25

30

35

40

45

50

55

60

65

70

75

80

95

105

115

125
Clear
Piping Format
- Standard type
- Symmetrical type
Clear
Port Screw Type
M screw

NPT

Rc
Clear
Adjuster Option
Dual-end absorber

Dual-end metal stoppers

Dual-end rubber stoppers

Extension end absorber + retraction end rubber stopper

Extension end metal stopper + retraction end absorber

Extension end metal stopper + retraction end rubber stopper

Extension end rubber stopper + retraction end absorber

Extension end rubber stopper + retraction end metal stopper

Forward-end absorber

Forward-end metal stopper

Forward-end rubber stopper

No adjuster

Retraction end metal stopper

Reverse-end absorber

Reverse-end rubber stopper
Clear
Function Option
- Axial direction piping type
- Standard
- With buffer
- With buffer + with end lock
- With buffer / axial piping type
- With end lock
Clear
Auto Switches
F8B

F9G

M9B

M9BA

M9BV

M9BW

M9BWV

M9N

M9NV

M9NW

M9NWV

M9P

M9PV

M9PW

M9PWV

A90

A90V

A93

A93V

A96

A96V

Without auto switch (built-in magnet)
Clear
Lead Wire Length(m)
- 0.5
- 1
- 3
- 5
- None
Clear
Lead Wire Connector
- M12 4‑pin
- None
Clear
The number of the switches
- 1 pcs.
- 2 pcs.
- 3 pcs.
- 4 pcs.
- 9 pcs.
- None
Clear
Type
- Clean series
- Copper and Fluorine Unavailable Specifications
- Copper/fluorine/silicon-free + low dust generation
Clear
type
- 13-MXQ
- 20-MXQ
- 22-MXQ
Clear
Max. Load Mass (Horizontal Mounting)(kg)
0.05~0.8

1~4.9

5~9.2
Clear
CAD
- 2D
- 3D
Clear

Days to Ship

All

21 Day(s) or Less

31 Day(s) or Less

32 Day(s) or Less

41 Day(s) or Less

46 Day(s) or Less
Clear

Specify Alterations

The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .

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Air Slide Table Clean / Low Dust Generation 13/20/22-MXQ Series

(i)Caution

Please refer to the table below for details about lead wire / connector specifications.

Basic Information

Configure

Specification/Dimensions

Cylinder I.D.(Ø)

Stroke(mm)

Table Size: Length L(mm)

Table Size: Width W(mm)

Environment

Table Size: Height H(mm)

Table Parallelism(µm)

Piping Format

Port Screw Type

Adjuster Option

Function Option

Auto Switches

Lead Wire Length(m)

Lead Wire Connector

The number of the switches

Type

type

Max. Load Mass (Horizontal Mounting)(kg)

CAD