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300 mm Wafer Compatible, Parallel Seal Type Slit Valve XGTP Series
Parallel seal type slit valve XGTP series.
[Features]
・ Long lifespan: 3 million uses (At normal temperature)
・ Dust generation amount: Reduced to 1/5 or less
・ 22% reduction in air consumption
・ Easy bellows replacement
・ The gate can be replaced from the top
・ Mechanical end lock mechanism adopted
(i)Caution
- Refer to the manufacturer's catalog for specification and material details.
- The product images are representative only. Please refer to the manufacturer's catalog for shape details.
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | Size | Types of Related components | Connector type | Specifications | Valve Model | Material | Auto switch | End Lock |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | - | Fixing bolt | - | - | - | SUS316 | - | - | ||
MYR 871.85 | 1 Piece(s) | 21 Day(s) | - | O-ring (Bonnet assembly) | - | - | - | FKM | - | - | ||
- | 1 Piece(s) | Quote | - | O-ring (Gate part) | - | - | - | FKM | - | - | ||
MYR 871.85 | 1 Piece(s) | 21 Day(s) | - | O-ring (Body opening surface) | - | - | - | FKM | - | - | ||
MYR 9,953.48 | 1 Piece(s) | 21 Day(s) | - | O-ring (Gate part) | - | - | - | Kalrez 4079 | - | - | ||
- | 1 Piece(s) | Quote | - | Gate | - | - | - | A6063 | - | - | ||
- | 1 Piece(s) | Quote | - | Bellows | - | - | - | AM350 | - | - | ||
- | 1 Piece(s) | Quote | Height 50 × width 366 mm (Open window) | Slit valve | None | Long lifespan of 3 million uses (At normal temperature) | Insert type (Without body) | FKM (Gate part seal) | None | OPEN/CLOSE end lock | ||
- | 1 Piece(s) | Quote | Height 50 × width 366 mm (Open window) | Slit valve | None | Long lifespan of 3 million uses (At normal temperature) | Insert type (Without body) | FKM (Gate part seal) | D-A93 | OPEN/CLOSE end lock | ||
- | 1 Piece(s) | Quote | Height 50 × width 366 mm (Open window) | Slit valve | None | Long lifespan of 3 million uses (At normal temperature) | Insert type (Without body) | FKM (Gate part seal) | D-A93 | None | ||
- | 1 Piece(s) | Quote | Height 50 × width 366 mm (Open window) | Slit valve | D-sub connector | Long lifespan of 3 million uses (At normal temperature) | Insert type (Without body) | FKM (Gate part seal) | D-A93 | OPEN/CLOSE end lock | ||
- | 1 Piece(s) | Quote | Height 50 × width 366 mm (Open window) | Slit valve | None | Long lifespan of 3 million uses (At normal temperature) | Insert type (Without body) | FKM (Gate part seal) | None | None | ||
- | 1 Piece(s) | Quote | Height 50 × width 366 mm (Open window) | Slit valve | None | Long lifespan of 3 million uses (At normal temperature) | Insert type (Without body) | Kalrez 4079 (Gate part seal) | None | OPEN/CLOSE end lock | ||
- | 1 Piece(s) | Quote | Height 50 × width 366 mm (Open window) | Slit valve | None | Long lifespan of 3 million uses (At normal temperature) | Insert type (Without body) | Kalrez 4079 (Gate part seal) | D-A93 | OPEN/CLOSE end lock | ||
- | 1 Piece(s) | Quote | Height 50 × width 366 mm (Open window) | Slit valve | None | Long lifespan of 3 million uses (At normal temperature) | Insert type (Without body) | Kalrez 4079 (Gate part seal) | D-A93 | None | ||
- | 1 Piece(s) | Quote | Height 50 × width 366 mm (Open window) | Slit valve | None | Long lifespan of 3 million uses (At normal temperature) | Cassette type (Standard body) | FKM (Gate part seal) | None | OPEN/CLOSE end lock | ||
- | 1 Piece(s) | Quote | Height 50 × width 366 mm (Open window) | Slit valve | None | Long lifespan of 3 million uses (At normal temperature) | Cassette type (Standard body) | FKM (Gate part seal) | D-A93 | OPEN/CLOSE end lock | ||
- | 1 Piece(s) | Quote | Height 50 × width 366 mm (Open window) | Slit valve | None | Long lifespan of 3 million uses (At normal temperature) | Cassette type (Standard body) | FKM (Gate part seal) | D-A93 | None | ||
- | 1 Piece(s) | Quote | Height 50 × width 366 mm (Open window) | Slit valve | Multi connector (AMP) | Long lifespan of 3 million uses (At normal temperature) | Cassette type (Standard body) | FKM (Gate part seal) | D-A93 | OPEN/CLOSE end lock | ||
- | 1 Piece(s) | Quote | Height 50 × width 366 mm (Open window) | Slit valve | Multi connector (AMP) | Long lifespan of 3 million uses (At normal temperature) | Cassette type (Standard body) | FKM (Gate part seal) | D-A93 | None | ||
- | 1 Piece(s) | Quote | Height 50 × width 366 mm (Open window) | Slit valve | D-sub connector | Long lifespan of 3 million uses (At normal temperature) | Cassette type (Standard body) | FKM (Gate part seal) | D-A93 | OPEN/CLOSE end lock | ||
- | 1 Piece(s) | Quote | Height 50 × width 366 mm (Open window) | Slit valve | None | Long lifespan of 3 million uses (At normal temperature) | Cassette type (Standard body) | FKM (Gate part seal) | None | None | ||
- | 1 Piece(s) | Quote | Height 50 × width 366 mm (Open window) | Slit valve | None | Long lifespan of 3 million uses (At normal temperature) | Cassette type (Standard body) | Kalrez 4079 (Gate part seal) | None | OPEN/CLOSE end lock | ||
- | 1 Piece(s) | Quote | Height 50 × width 366 mm (Open window) | Slit valve | None | Long lifespan of 3 million uses (At normal temperature) | Cassette type (Standard body) | Kalrez 4079 (Gate part seal) | D-A93 | OPEN/CLOSE end lock | ||
- | 1 Piece(s) | Quote | Height 50 × width 366 mm (Open window) | Slit valve | None | Long lifespan of 3 million uses (At normal temperature) | Cassette type (Standard body) | Kalrez 4079 (Gate part seal) | D-A93 | None | ||
- | 1 Piece(s) | Quote | Height 50 × width 366 mm (Open window) | Slit valve | Multi connector (AMP) | Long lifespan of 3 million uses (At normal temperature) | Cassette type (Standard body) | Kalrez 4079 (Gate part seal) | D-A93 | OPEN/CLOSE end lock | ||
- | 1 Piece(s) | Quote | Height 50 × width 366 mm (Open window) | Slit valve | None | Long lifespan of 3 million uses (At normal temperature) | Cassette type (Half-MESK body) | FKM (Gate part seal) | None | OPEN/CLOSE end lock | ||
- | 1 Piece(s) | Quote | Height 50 × width 366 mm (Open window) | Slit valve | None | Long lifespan of 3 million uses (At normal temperature) | Cassette type (Half-MESK body) | FKM (Gate part seal) | D-A93 | OPEN/CLOSE end lock | ||
- | 1 Piece(s) | Quote | Height 50 × width 366 mm (Open window) | Slit valve | None | Long lifespan of 3 million uses (At normal temperature) | Cassette type (Half-MESK body) | FKM (Gate part seal) | D-A93 | None | ||
- | 1 Piece(s) | Quote | Height 50 × width 366 mm (Open window) | Slit valve | Multi connector (AMP) | Long lifespan of 3 million uses (At normal temperature) | Cassette type (Half-MESK body) | FKM (Gate part seal) | D-A93 | OPEN/CLOSE end lock | ||
- | 1 Piece(s) | Quote | Height 50 × width 366 mm (Open window) | Slit valve | None | Long lifespan of 3 million uses (At normal temperature) | Cassette type (Half-MESK body) | Kalrez 4079 (Gate part seal) | D-A93 | OPEN/CLOSE end lock | ||
- | 1 Piece(s) | Quote | Height 50 × width 366 mm (Open window) | Slit valve | None | Long lifespan of 3 million uses (At normal temperature) | Cassette type (Half-MESK body) | Kalrez 4079 (Gate part seal) | D-A93 | None |
Loading...
Specification/Dimensions
-
Size
- Height 50 × width 366 mm (Open window)
-
Types of Related components
- Bellows
- Fixing bolt
- Gate
- O-ring (Body opening surface)
- O-ring (Bonnet assembly)
- O-ring (Gate part)
- Slit valve
-
Connector type
- D-sub connector
- Multi connector (AMP)
- None
-
Specifications
- Long lifespan of 3 million uses (At normal temperature)
-
Valve Model
- Cassette type (Half-MESK body)
- Cassette type (Standard body)
- Insert type (Without body)
-
Material
- SUS316
- AM350
- Kalrez 4079
- Kalrez 4079 (Gate part seal)
- A6063
- FKM
- FKM (Gate part seal)
-
Auto switch
- D-A93
- None
-
End Lock
- None
- OPEN/CLOSE end lock
-
type
- XGT300
- XGTP300
- XGTP311
- XGTP312
- XGTP313
Days to Ship
-
- All
- 21 Day(s) or Less
Specify Alterations
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
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