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Vacuum Regulator Clean Series Copper/Fluorine-Free Specifications 10-/20-IRV10/20 Series (Part Numbers)

Vacuum Regulator Clean Series Copper/Fluorine-Free Specifications 10-/20-IRV10/20 Series

[10-Series Clean Series]
・ This product can be used in a clean environment
・ It prevents dust generation in the cleanroom

[20-Series Copper/Fluorine-Free Specifications]
・ It can be used in environments where copper and fluorine materials should be avoided
・ External dimensions are the same as standard products

(i)Caution

  • Refer to the manufacturer's catalog for specification and material details.
  • The product images are representative only. Please refer to the manufacturer's catalog for shape details.

PDF

Japanese Only

Part Number

Configured Part Number is shown.

Part Number
10-IRV10-C06
10-IRV10-C06B
10-IRV10-C06BG
10-IRV10-C06BGN
10-IRV10-C06BZA
10-IRV10-C06BZN
10-IRV10-C06G
10-IRV10-C06L
10-IRV10-C06LG
10-IRV10-C06ZN
10-IRV10-C08
10-IRV10-C08B
10-IRV10-C08BG
10-IRV10-C08BZN
10-IRV10-C08BZP
10-IRV10-C08G
10-IRV10-C08LG
10-IRV10-C08ZA
10-IRV10-LC06
10-IRV10-LC06B
10-IRV10-LC06BG
10-IRV10-LC06BGN
10-IRV10-LC06BZA
10-IRV10-LC06BZN
10-IRV10-LC06G
10-IRV10-LC06L
10-IRV10-LC06LG
10-IRV10-LC06LZN
10-IRV10-LC08
10-IRV10-LC08B
10-IRV10-LC08BG
10-IRV10-LC08BGN
10-IRV10-LC08BZN
10-IRV10-LC08G
10-IRV10-LC08L
10-IRV10-LC08LG
10-IRV10-LC08ZN
10-IRV10-LN07
10-IRV10-LN07BG
10-IRV10-N07
10-IRV10-N07BG
10-IRV10-N09BG
10-IRV10A-C06
10-IRV10A-C06BZN
10-IRV10A-C06G
10-IRV10A-C06GN
10-IRV10A-C06L
10-IRV10A-C06LG
10-IRV10A-C06LGN
10-IRV10A-C06LZA
10-IRV10A-C06ZA
10-IRV10A-C08
10-IRV10A-C08BG
10-IRV10A-LC06
10-IRV10A-LC06BZN
10-IRV10A-LC06BZP
10-IRV10A-LC06LG
10-IRV10A-LC06ZN
10-IRV10A-LC08
10-IRV10A-LC08BG
10-IRV10A-LC08L
10-IRV20-C06
10-IRV20-C06B
10-IRV20-C06BG
10-IRV20-C06BZN
10-IRV20-C06G
10-IRV20-C06L
10-IRV20-C06LG
10-IRV20-C08
10-IRV20-C08B
10-IRV20-C08BG
10-IRV20-C08BZN
10-IRV20-C08G
10-IRV20-C08LG
10-IRV20-C10
10-IRV20-C10B
10-IRV20-C10BG
10-IRV20-C10BGN
10-IRV20-C10BZA
10-IRV20-C10BZN
10-IRV20-C10G
10-IRV20-C10GN
10-IRV20-C10ZN
10-IRV20-LC06
10-IRV20-LC06B
10-IRV20-LC06BG
10-IRV20-LC06BZA
10-IRV20-LC06BZN
10-IRV20-LC06BZP
10-IRV20-LC06G
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipApplicable Fluid
(l/min)
Shape Supply Side, Connecting Tube Diameter Control Side, Connecting Tube Diameter Piping specifications Accessories Monitor output Supply side fitting shape Control side fitting shape Bracket Type

MYR 526.20

1 Piece(s) 21 Day(s) Maximum flow rate 140 L/min (ANR)StandardØ6Ø6Standard connectionsNo-StraightStraightNoClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)StandardØ6Ø6Standard connectionsNo-StraightStraightWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)StandardØ6Ø6Standard connectionsWith Pressure Gauge-StraightStraightWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)StandardØ6Ø6Standard connectionsGauge nut assembly-StraightStraightWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)StandardØ6Ø6Standard connectionsWith digital pressure switchNPN open collector 2 outputsStraightStraightWith bracketClean series

MYR 1,052.38

1 Piece(s) 21 Day(s) Maximum flow rate 140 L/min (ANR)StandardØ6Ø6Standard connectionsWith digital pressure switchNPN open collector 1 outputStraightStraightWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)StandardØ6Ø6Standard connectionsWith Pressure Gauge-StraightStraightNoClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)StandardØ6Ø6Standard connectionsNo-StraightStraightWith bottom bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)StandardØ6Ø6Standard connectionsWith Pressure Gauge-StraightStraightWith bottom bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)StandardØ6Ø6Standard connectionsWith digital pressure switchNPN open collector 1 outputStraightStraightNoClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)StandardØ8Ø8Standard connectionsNo-StraightStraightNoClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)StandardØ8Ø8Standard connectionsNo-StraightStraightWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)StandardØ8Ø8Standard connectionsWith Pressure Gauge-StraightStraightWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)StandardØ8Ø8Standard connectionsWith digital pressure switchNPN open collector 1 outputStraightStraightWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)StandardØ8Ø8Standard connectionsWith digital pressure switchPNP open collector 1 outputStraightStraightWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)StandardØ8Ø8Standard connectionsWith Pressure Gauge-StraightStraightNoClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)StandardØ8Ø8Standard connectionsWith Pressure Gauge-StraightStraightWith bottom bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)StandardØ8Ø8Standard connectionsWith digital pressure switchNPN open collector 2 outputsStraightStraightNoClean series

MYR 546.50

1 Piece(s) 21 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsNo-ElbowElbowNoClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsNo-ElbowElbowWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsWith Pressure Gauge-ElbowElbowWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsGauge nut assembly-ElbowElbowWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsWith digital pressure switchNPN open collector 2 outputsElbowElbowWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsWith digital pressure switchNPN open collector 1 outputElbowElbowWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsWith Pressure Gauge-ElbowElbowNoClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsNo-ElbowElbowWith bottom bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsWith Pressure Gauge-ElbowElbowWith bottom bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsWith digital pressure switchNPN open collector 1 outputElbowElbowWith bottom bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ8Ø8Standard connectionsNo-ElbowElbowNoClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ8Ø8Standard connectionsNo-ElbowElbowWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ8Ø8Standard connectionsWith Pressure Gauge-ElbowElbowWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ8Ø8Standard connectionsGauge nut assembly-ElbowElbowWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ8Ø8Standard connectionsWith digital pressure switchNPN open collector 1 outputElbowElbowWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ8Ø8Standard connectionsWith Pressure Gauge-ElbowElbowNoClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ8Ø8Standard connectionsNo-ElbowElbowWith bottom bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ8Ø8Standard connectionsWith Pressure Gauge-ElbowElbowWith bottom bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ8Ø8Standard connectionsWith digital pressure switchNPN open collector 1 outputElbowElbowNoClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type Elbow_____Standard connectionsNo-ElbowElbowNoClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type Elbow_____Standard connectionsWith Pressure Gauge-ElbowElbowWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)Standard_____Standard connectionsNo-StraightStraightNoClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)Standard_____Standard connectionsWith Pressure Gauge-StraightStraightWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)Standard___Standard connectionsWith Pressure Gauge-StraightStraightWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)StandardØ6Ø6Single-sided connection specificationNo-StraightStraightNoClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)StandardØ6Ø6Single-sided connection specificationWith digital pressure switchNPN open collector 1 outputStraightStraightWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)StandardØ6Ø6Single-sided connection specificationWith Pressure Gauge-StraightStraightNoClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)StandardØ6Ø6Single-sided connection specificationGauge nut assembly-StraightStraightNoClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)StandardØ6Ø6Single-sided connection specificationNo-StraightStraightWith bottom bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)StandardØ6Ø6Single-sided connection specificationWith Pressure Gauge-StraightStraightWith bottom bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)StandardØ6Ø6Single-sided connection specificationGauge nut assembly-StraightStraightWith bottom bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)StandardØ6Ø6Single-sided connection specificationWith digital pressure switchNPN open collector 2 outputsStraightStraightWith bottom bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)StandardØ6Ø6Single-sided connection specificationWith digital pressure switchNPN open collector 2 outputsStraightStraightNoClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)StandardØ8Ø8Single-sided connection specificationNo-StraightStraightNoClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)StandardØ8Ø8Single-sided connection specificationWith Pressure Gauge-StraightStraightWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Single-sided connection specificationNo-ElbowElbowNoClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Single-sided connection specificationWith digital pressure switchNPN open collector 1 outputElbowElbowWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Single-sided connection specificationWith digital pressure switchPNP open collector 1 outputElbowElbowWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Single-sided connection specificationWith Pressure Gauge-ElbowElbowWith bottom bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Single-sided connection specificationWith digital pressure switchNPN open collector 1 outputElbowElbowNoClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ8Ø8Single-sided connection specificationNo-ElbowElbowNoClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ8Ø8Single-sided connection specificationWith Pressure Gauge-ElbowElbowWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ8Ø8Single-sided connection specificationNo-ElbowElbowWith bottom bracketClean series

MYR 546.50

1 Piece(s) 21 Day(s) Maximum flow rate 240 L/min (ANR)StandardØ6Ø6Standard connectionsNo-StraightStraightNoClean series

-

1 Piece(s) Quote Maximum flow rate 240 L/min (ANR)StandardØ6Ø6Standard connectionsNo-StraightStraightWith bracketClean series

MYR 725.27

1 Piece(s) 21 Day(s) Maximum flow rate 240 L/min (ANR)StandardØ6Ø6Standard connectionsWith Pressure Gauge-StraightStraightWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 240 L/min (ANR)StandardØ6Ø6Standard connectionsWith digital pressure switchNPN open collector 1 outputStraightStraightWith bracketClean series

MYR 710.28

1 Piece(s) 21 Day(s) Maximum flow rate 240 L/min (ANR)StandardØ6Ø6Standard connectionsWith Pressure Gauge-StraightStraightNoClean series

-

1 Piece(s) Quote Maximum flow rate 240 L/min (ANR)StandardØ6Ø6Standard connectionsNo-StraightStraightWith bottom bracketClean series

-

1 Piece(s) Quote Maximum flow rate 240 L/min (ANR)StandardØ6Ø6Standard connectionsWith Pressure Gauge-StraightStraightWith bottom bracketClean series

MYR 546.50

1 Piece(s) 21 Day(s) Maximum flow rate 240 L/min (ANR)StandardØ8Ø8Standard connectionsNo-StraightStraightNoClean series

-

1 Piece(s) Quote Maximum flow rate 240 L/min (ANR)StandardØ8Ø8Standard connectionsNo-StraightStraightWith bracketClean series

MYR 725.27

1 Piece(s) 21 Day(s) Maximum flow rate 240 L/min (ANR)StandardØ8Ø8Standard connectionsWith Pressure Gauge-StraightStraightWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 240 L/min (ANR)StandardØ8Ø8Standard connectionsWith digital pressure switchNPN open collector 1 outputStraightStraightWith bracketClean series

MYR 710.28

1 Piece(s) 21 Day(s) Maximum flow rate 240 L/min (ANR)StandardØ8Ø8Standard connectionsWith Pressure Gauge-StraightStraightNoClean series

-

1 Piece(s) Quote Maximum flow rate 240 L/min (ANR)StandardØ8Ø8Standard connectionsWith Pressure Gauge-StraightStraightWith bottom bracketClean series

-

1 Piece(s) Quote Maximum flow rate 240 L/min (ANR)Standardø10ø10Standard connectionsNo-StraightStraightNoClean series

-

1 Piece(s) Quote Maximum flow rate 240 L/min (ANR)Standardø10ø10Standard connectionsNo-StraightStraightWith bracketClean series

MYR 725.27

1 Piece(s) 21 Day(s) Maximum flow rate 240 L/min (ANR)Standardø10ø10Standard connectionsWith Pressure Gauge-StraightStraightWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 240 L/min (ANR)Standardø10ø10Standard connectionsGauge nut assembly-StraightStraightWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 240 L/min (ANR)Standardø10ø10Standard connectionsWith digital pressure switchNPN open collector 2 outputsStraightStraightWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 240 L/min (ANR)Standardø10ø10Standard connectionsWith digital pressure switchNPN open collector 1 outputStraightStraightWith bracketClean series

MYR 710.28

1 Piece(s) 21 Day(s) Maximum flow rate 240 L/min (ANR)Standardø10ø10Standard connectionsWith Pressure Gauge-StraightStraightNoClean series

-

1 Piece(s) Quote Maximum flow rate 240 L/min (ANR)Standardø10ø10Standard connectionsGauge nut assembly-StraightStraightNoClean series

-

1 Piece(s) Quote Maximum flow rate 240 L/min (ANR)Standardø10ø10Standard connectionsWith digital pressure switchNPN open collector 1 outputStraightStraightNoClean series

-

1 Piece(s) Quote Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsNo-ElbowElbowNoClean series

-

1 Piece(s) Quote Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsNo-ElbowElbowWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsWith Pressure Gauge-ElbowElbowWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsWith digital pressure switchNPN open collector 2 outputsElbowElbowWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsWith digital pressure switchNPN open collector 1 outputElbowElbowWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsWith digital pressure switchPNP open collector 1 outputElbowElbowWith bracketClean series

-

1 Piece(s) Quote Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsWith Pressure Gauge-ElbowElbowNoClean series

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Basic Information

Type Vacuum Regulator Control Method Directly Operated Supply Side, Connection Type One-Touch Plumbing
Control Side, Connection Type One-Touch Plumbing Customized specifications No

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