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5-Port Solenoid Valve, Plug-in Type, Clean Series, 10-SZ3000 Series

SMC

[10-Series, Clean Series]
Suitable for clean environment
Prevents dust generation in the cleanroom

(i)Caution

Refer to the manufacturer's catalog for specification and material details.
Product images may be representative images only. Please refer to the manufacturer's catalog for shape details.

Part Number

Configured Part Number is shown.

: 30; 45; 60

Part Number
10-SZ3A60-5LOZ-C4
10-SZ3A60-5LOZ-C6
10-SZ3A60-5LOZ-L4
10-SZ3A60-5LOZD-C4
10-SZ3A60-5LOZD-C6
10-SZ3A60-5LOZJ-C4
10-SZ3A60-5NLOZ-C4
10-SZ3A60-6LOZ-C6
10-SZ3A60K-5LOZ-C4
10-SZ3A60K-5LOZ-C6
10-SZ3A60K-5LOZD-C4
10-SZ3A60K-5LOZD-C6
10-SZ3A60K-5LOZD-M5
10-SZ3B60-5LOZ-C4
10-SZ3C60-5LOZ-C4
10-SZ3C60K-5LOZ-C4
10-SZ3160-5LOZ-B4
10-SZ3160-5LOZ-C4
10-SZ3160-5LOZ-C6
10-SZ3160-5LOZ-L4
10-SZ3160-5LOZ-L6
10-SZ3160-5LOZD-C4
10-SZ3160-5LOZD-C6
10-SZ3160-5LOZJ-C6
10-SZ3160-5LOZJD-B4
10-SZ3160-5LOZJD-B6
10-SZ3160-5LOZJD-C4
10-SZ3160-6LOZJD-C6
10-SZ3160K-5LOZ-C4
10-SZ3160K-5LOZ-C6
10-SZ3160K-5LOZD-C4
10-SZ3160K-5LOZD-C6
10-SZ3160K-5LOZJD-C6
10-SZ3160K-6LOZJ-C4
10-SZ3160R-5LOZ-C4
10-SZ3160R-5LOZ-C6
10-SZ3160R-5LOZD-C4
10-SZ3160R-5LOZD-L4
10-SZ3260-5LOZ-B4
10-SZ3260-5LOZ-B6
10-SZ3260-5LOZ-C4
10-SZ3260-5LOZ-C6
10-SZ3260-5LOZ-L4
10-SZ3260-5LOZ-L6
10-SZ3260-5LOZ-M5
10-SZ3260-5LOZD-C4
10-SZ3260-5LOZD-C6
10-SZ3260-5LOZJ-C4
10-SZ3260-5LOZJ-C6
10-SZ3260-5LOZJD-B4
10-SZ3260-5LOZJD-B6
10-SZ3260-5LOZJD-C4
10-SZ3260-5NLOZ-C6
10-SZ3260K-5LOZ-C4
10-SZ3260K-5LOZ-C6
10-SZ3260K-5LOZD-C6
10-SZ3260K-6LOZJ-C4
10-SZ3260R-5LOZ-C4
10-SZ3260R-5LOZ-C6
10-SZ3360-5LOZ-B6

Standard Unit Price	Minimum order quantity	Days to Ship	Switching Type	Voltage	Number of Solenoids	Pipe Port Type	Status at Power Off	Plumbing Thread Nominal	Connecting Tube Diameter	Pressure Rating (MPa)	CV Value	Pilot Air Supply	Manual	Back-pressure check valve	Common specifications	Switch specifications	Pilot port thread type
-	1 Piece(s)	Quote	[Others] 4 positions (N.C. + N.C.)	DC24V	Double	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø4	0.15 to 0.7	0.14	Internal	Non-locking, push type	None	Positive common	Without switch	-
-	1 Piece(s)	Quote	[Others] 4 positions (N.C. + N.C.)	DC24V	Double	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø6	0.15 to 0.7	0.18	Internal	Non-locking, push type	None	Positive common	Without switch	-
-	1 Piece(s)	Quote	[Others] 4 positions (N.C. + N.C.)	DC24V	Double	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø4	0.15 to 0.7	-	Internal	Non-locking, push type	None	Positive common	Without switch	Upward
-	1 Piece(s)	Quote	[Others] 4 positions (N.C. + N.C.)	DC24V	Double	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø4	0.15 to 0.7	0.14	Internal	Push-turn locking screwdriver-operated type	None	Positive common	Without switch	-
-	1 Piece(s)	Quote	[Others] 4 positions (N.C. + N.C.)	DC24V	Double	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø6	0.15 to 0.7	0.18	Internal	Push-turn locking screwdriver-operated type	None	Positive common	Without switch	-
-	1 Piece(s)	Quote	[Others] 4 positions (N.C. + N.C.)	DC24V	Double	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø4	0.15 to 0.7	0.14	Internal	Non-locking, push type	None	Positive common	With switch	-
-	1 Piece(s)	Quote	[Others] 4 positions (N.C. + N.C.)	DC24V	Double	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø4	0.15 to 0.7	0.14	Internal	Non-locking, push type	None	Negative common	Without switch	-
-	1 Piece(s)	Quote	[Others] 4 positions (N.C. + N.C.)	DC12V	Double	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø6	0.15 to 0.7	0.18	Internal	Non-locking, push type	None	Positive common	Without switch	-
-	1 Piece(s)	Quote	[Others] 4 positions (N.C. + N.C.)	DC24V	Double	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø4	0.15 to 0.7	0.14	Internal	Non-locking, push type	Built-in	Positive common	Without switch	-
-	1 Piece(s)	Quote	[Others] 4 positions (N.C. + N.C.)	DC24V	Double	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø6	0.15 to 0.7	0.18	Internal	Non-locking, push type	Built-in	Positive common	Without switch	-
-	1 Piece(s)	Quote	[Others] 4 positions (N.C. + N.C.)	DC24V	Double	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø4	0.15 to 0.7	0.14	Internal	Push-turn locking screwdriver-operated type	Built-in	Positive common	Without switch	-
-	1 Piece(s)	Quote	[Others] 4 positions (N.C. + N.C.)	DC24V	Double	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø6	0.15 to 0.7	0.18	Internal	Push-turn locking screwdriver-operated type	Built-in	Positive common	Without switch	-
-	1 Piece(s)	Quote	[Others] 4 positions (N.C. + N.C.)	DC24V	Double	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	-	0.15 to 0.7	0.17	Internal	Push-turn locking screwdriver-operated type	Built-in	Positive common	Without switch	-
-	1 Piece(s)	Quote	[Others] 4 positions (N.O. + N.O.)	DC24V	Double	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø4	0.15 to 0.7	0.14	Internal	Non-locking, push type	None	Positive common	Without switch	-
-	1 Piece(s)	Quote	[Others] 4 positions (N.C. + N.O.)	DC24V	Double	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø4	0.15 to 0.7	0.14	Internal	Non-locking, push type	None	Positive common	Without switch	-
-	1 Piece(s)	Quote	[Others] 4 positions (N.C. + N.O.)	DC24V	Double	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø4	0.15 to 0.7	0.14	Internal	Non-locking, push type	Built-in	Positive common	Without switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	[Single] Single	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø4	0.15 to 0.7	-	Internal	Non-locking, push type	None	Positive common	Without switch	Downward
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	[Single] Single	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø4	0.15 to 0.7	0.14	Internal	Non-locking, push type	None	Positive common	Without switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	[Single] Single	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø6	0.15 to 0.7	0.18	Internal	Non-locking, push type	None	Positive common	Without switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	[Single] Single	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø4	0.15 to 0.7	-	Internal	Non-locking, push type	None	Positive common	Without switch	Upward
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	[Single] Single	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø6	0.15 to 0.7	-	Internal	Non-locking, push type	None	Positive common	Without switch	Upward
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	[Single] Single	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø4	0.15 to 0.7	0.14	Internal	Push-turn locking screwdriver-operated type	None	Positive common	Without switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	[Single] Single	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø6	0.15 to 0.7	0.18	Internal	Push-turn locking screwdriver-operated type	None	Positive common	Without switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	[Single] Single	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø6	0.15 to 0.7	0.18	Internal	Non-locking, push type	None	Positive common	With switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	[Single] Single	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø4	0.15 to 0.7	-	Internal	Push-turn locking screwdriver-operated type	None	Positive common	With switch	Downward
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	[Single] Single	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø6	0.15 to 0.7	-	Internal	Push-turn locking screwdriver-operated type	None	Positive common	With switch	Downward
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	[Single] Single	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø4	0.15 to 0.7	0.14	Internal	Push-turn locking screwdriver-operated type	None	Positive common	With switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC12V	[Single] Single	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø6	0.15 to 0.7	0.18	Internal	Push-turn locking screwdriver-operated type	None	Positive common	With switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	[Single] Single	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø4	0.15 to 0.7	0.14	Internal	Non-locking, push type	Built-in	Positive common	Without switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	[Single] Single	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø6	0.15 to 0.7	0.18	Internal	Non-locking, push type	Built-in	Positive common	Without switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	[Single] Single	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø4	0.15 to 0.7	0.14	Internal	Push-turn locking screwdriver-operated type	Built-in	Positive common	Without switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	[Single] Single	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø6	0.15 to 0.7	0.18	Internal	Push-turn locking screwdriver-operated type	Built-in	Positive common	Without switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	[Single] Single	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø6	0.15 to 0.7	0.18	Internal	Push-turn locking screwdriver-operated type	Built-in	Positive common	With switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC12V	[Single] Single	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø4	0.15 to 0.7	0.14	Internal	Non-locking, push type	Built-in	Positive common	With switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	[Single] Single	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø4	0.25 to 0.7	0.14	External	Non-locking, push type	None	Positive common	Without switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	[Single] Single	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø6	0.25 to 0.7	0.18	External	Non-locking, push type	None	Positive common	Without switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	[Single] Single	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø4	0.25 to 0.7	0.14	External	Push-turn locking screwdriver-operated type	None	Positive common	Without switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	[Single] Single	One-Touch Plumbing	Self-Recovery (Pressure Differential Return)	-	Ø4	0.25 to 0.7	-	External	Push-turn locking screwdriver-operated type	None	Positive common	Without switch	Upward
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	Double	One-Touch Plumbing	Self-Retaining	-	Ø4	0.1 to 0.7	-	Internal	Non-locking, push type	None	Positive common	Without switch	Downward
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	Double	One-Touch Plumbing	Self-Retaining	-	Ø6	0.1 to 0.7	-	Internal	Non-locking, push type	None	Positive common	Without switch	Downward
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	Double	One-Touch Plumbing	Self-Retaining	-	Ø4	0.1 to 0.7	0.14	Internal	Non-locking, push type	None	Positive common	Without switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	Double	One-Touch Plumbing	Self-Retaining	-	Ø6	0.1 to 0.7	0.18	Internal	Non-locking, push type	None	Positive common	Without switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	Double	One-Touch Plumbing	Self-Retaining	-	Ø4	0.1 to 0.7	-	Internal	Non-locking, push type	None	Positive common	Without switch	Upward
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	Double	One-Touch Plumbing	Self-Retaining	-	Ø6	0.1 to 0.7	-	Internal	Non-locking, push type	None	Positive common	Without switch	Upward
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	Double	One-Touch Plumbing	Self-Retaining	-	-	0.1 to 0.7	0.17	Internal	Non-locking, push type	None	Positive common	Without switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	Double	One-Touch Plumbing	Self-Retaining	-	Ø4	0.1 to 0.7	0.14	Internal	Push-turn locking screwdriver-operated type	None	Positive common	Without switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	Double	One-Touch Plumbing	Self-Retaining	-	Ø6	0.1 to 0.7	0.18	Internal	Push-turn locking screwdriver-operated type	None	Positive common	Without switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	Double	One-Touch Plumbing	Self-Retaining	-	Ø4	0.1 to 0.7	0.14	Internal	Non-locking, push type	None	Positive common	With switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	Double	One-Touch Plumbing	Self-Retaining	-	Ø6	0.1 to 0.7	0.18	Internal	Non-locking, push type	None	Positive common	With switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	Double	One-Touch Plumbing	Self-Retaining	-	Ø4	0.1 to 0.7	-	Internal	Push-turn locking screwdriver-operated type	None	Positive common	With switch	Downward
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	Double	One-Touch Plumbing	Self-Retaining	-	Ø6	0.1 to 0.7	-	Internal	Push-turn locking screwdriver-operated type	None	Positive common	With switch	Downward
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	Double	One-Touch Plumbing	Self-Retaining	-	Ø4	0.1 to 0.7	0.14	Internal	Push-turn locking screwdriver-operated type	None	Positive common	With switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	Double	One-Touch Plumbing	Self-Retaining	-	Ø6	0.1 to 0.7	0.18	Internal	Non-locking, push type	None	Negative common	Without switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	Double	One-Touch Plumbing	Self-Retaining	-	Ø4	0.1 to 0.7	0.14	Internal	Non-locking, push type	Built-in	Positive common	Without switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	Double	One-Touch Plumbing	Self-Retaining	-	Ø6	0.1 to 0.7	0.18	Internal	Non-locking, push type	Built-in	Positive common	Without switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	Double	One-Touch Plumbing	Self-Retaining	-	Ø6	0.1 to 0.7	0.18	Internal	Push-turn locking screwdriver-operated type	Built-in	Positive common	Without switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC12V	Double	One-Touch Plumbing	Self-Retaining	-	Ø4	0.1 to 0.7	0.14	Internal	Non-locking, push type	Built-in	Positive common	With switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	Double	One-Touch Plumbing	Self-Retaining	-	Ø4	0.25 to 0.7	0.14	External	Non-locking, push type	None	Positive common	Without switch	-
-	1 Piece(s)	Quote	2-Position Exhaust	DC24V	Double	One-Touch Plumbing	Self-Retaining	-	Ø6	0.25 to 0.7	0.18	External	Non-locking, push type	None	Positive common	Without switch	-
-	1 Piece(s)	Quote	3-Position Closed Center	DC24V	Double	One-Touch Plumbing	Self-Recovery (Spring Return)	-	Ø6	0.2 to 0.7	-	Internal	Non-locking, push type	None	Positive common	Without switch	Downward

Basic Information

Number of Ports	5-Port Valve	Application	Unit for Manifold Mounting	Mounting Orientation	Manifold Base
Specifications	Lubrication Free	Plumbing	Direct Plumbing	Type	Solenoid Valves
Driving Type	Pilot Type Spool	Seal Type	Standard

Configure

79 Part Numbers

View Part Numbers

Configure Remaining Specifications

Completed

Specification/Dimensions

Switching Type
- 2-Position Exhaust
- 3-Position Closed Center
- 3-Position Exhaust Center
- 3-Position Pressure Center
- Others
  - 4 positions (N.C. + N.C.)
  - 4 positions (N.C. + N.O.)
  - 4 positions (N.O. + N.O.)
Clear
Voltage
- DC12V
- DC24V
Clear
Number of Solenoids
- Single
  - Single
- Double
Clear
Status at Power Off
- Self-Retaining
- Self-Recovery (Spring Return)
- Self-Recovery (Pressure Differential Return)
Clear
Plumbing Thread Nominal
M5
Clear
Connecting Tube Diameter
- Ø4
- Ø6
Clear
Pressure Rating(MPa)
- 0.15 to 0.7
- 0.1 to 0.7
- 0.2 to 0.7
- 0.25 to 0.7
Clear
CV Value
0.14

0.17

0.18
Clear
Pilot Air Supply
- Internal
- External
Clear
Manual
- Non-locking, push type
- Push-turn locking screwdriver-operated type
Clear
Back-pressure check valve
- Built-in
- None
Clear
Common specifications
- Negative common
- Positive common
Clear
Switch specifications
- With switch
- Without switch
Clear
Pilot port thread type
- Downward
- Upward
Clear
type
- 10-SZ3000
Clear
Pipe Port Type
- One-Touch Plumbing
- Barbed Couplers
Clear

Specify Alterations

The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .

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5-Port Solenoid Valve, Plug-in Type, Clean Series, 10-SZ3000 Series

(i)Caution

Basic Information

Configure

Specification/Dimensions

Switching Type

Voltage

Number of Solenoids

Status at Power Off

Plumbing Thread Nominal

Connecting Tube Diameter

Pressure Rating(MPa)

CV Value

Pilot Air Supply

Manual

Back-pressure check valve

Common specifications

Switch specifications

Pilot port thread type

type

Pipe Port Type