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Vacuum Valves（Flange Type：K）
Blocking valves: These valves are used to isolate vacuum sections and block pressure differentials and come in various types, such as gate valves, L type valves, straight valves, and butterfly valves, to suit the possible pressure zones and applications within a vacuum system.
Conductance valves: needle valves and butterfly valves (used to control the flow rate of gas entering the empty chamber.)
The term "valve" itself is a generic term for things that control the flow of liquid or gas in pipe networks, controlling the fluid direction, pressure, and flow rate
From L type valves through to gate valve and from atmospheric pressure through to vacuum pressures, valves for all types of areas, conditions, and applications are available, including those for ultra-high vacuum levels.
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SMC
A vacuum valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.Days to Ship: 21 Day(s) or more -
SMC
Vacuum valve with precision-cast single-piece structure which helps prevent gas accumulation.
[Features]
· Bellows type is particulate-free and cleaned.
· Pressure balanced structure.
· Body material: SCS13 (SUS304 equivalent).
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.Days to Ship: 21 Day(s) or more -
Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)Days to Ship: 21 Day(s) or more -
Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)Days to Ship: Quote -
Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)Days to Ship: Quote -
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)Days to Ship: 27 Day(s) or more -
SMC
A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
・ Achieves system compactness and piping savings
・ Prevents dust from rolling up in the chamber when exhausting
・ Adjustable initial exhaust valve flow rate
・ Air operated type / with solenoid valve
・ Since there is little outgas, the pump capacity can be small and the exhaust time can be shortened
・ It does not contain heavy metals such as Ni (nickel) and Cr (chromium), and the sputtering rate is low, so there is little heavy metal contamination on the wafer
・ Strong against fluorine
· Uniform baking temperature. Good thermal conductivity, uniform temperature throughout the body, drastically reducing product adhesion
· Lightweight and compactDays to Ship: 21 Day(s) or more -
Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve
SMC
A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Air-operated type with solenoid valve.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.Days to Ship: Quote
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| Switching Type |
| Driving Type |
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| Connecting Tube Diameter |
| Flange Type |
| Flange Nominal |
| CV Value |
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| Brand | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC |
| Product Series | Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series | Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series | Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series | Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve | ||||
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| Days to Ship | 21 Day(s) or more | 21 Day(s) or more | 21 Day(s) or more | Quote | Quote | 27 Day(s) or more | 21 Day(s) or more | Quote |
| Type | Pilot Vacuum Valve | Pilot Vacuum Valve | Pilot Vacuum Valve | Pilot Vacuum Valve | Pilot Vacuum Valve | High Vacuum Solenoid | Air-Actuated Vacuum Valve | High Vacuum Solenoid |
| Application | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use |
| Mounting Orientation | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct |
| Number of Ports | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve |
| Solenoid Type | - | - | - | - | - | Single | - | Single |
| Switching Type | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed |
| Driving Type | - | - | - | - | - | Directly Operated | - | Directly Operated |
| Effective Sectional Area(mm2) | - | - | - | - | - | - | - | - |
| Pipe Port Type | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange |
| Plumbing Thread Nominal | - | - | - | - | - | - | - | - |
| Connecting Tube Diameter | - | - | - | - | - | - | - | - |
| Flange Type | K | K | K | K | K | K | K | K |
| Flange Nominal | 63 / 80 | 63 / 80 | 63 / 80 | 63 / 80 | 63 / 80 | 63 | 63 / 80 | 63 / 80 |
| CV Value | - | - | - | - | - | - | - | - |
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Specification/Dimensions
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Type
- Solenoid Valve
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- Manual Vacuum Valve
- Mechanically-Operated Vacuum Valve
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Application
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- Multi-Port
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Mounting Orientation
- Direct
- Manifold Base
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Number of Ports
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Solenoid Type
- Single
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Switching Type
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Driving Type
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Effective Sectional Area(mm2)
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Pipe Port Type
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Plumbing Thread Nominal
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Connecting Tube Diameter
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Flange Type
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Flange Nominal
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CV Value
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