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Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve

SMC

[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)

(i)Caution

Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
Some of the items are scheduled to be discontinued as of end of March in 2023. The manufacturer keep the items produced but they are not available with Misumi.
There are not the replacement items and the plan to resumption of sale. Please check the quotation and order screen for details.
Refer to the manufacturer's catalog for specification and material details.
The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

Part Number

Configured Part Number is shown.

Product Specifications
Part Numbers
Catalog

Drawing

Product Specifications

Part number		XLF (V)-16-2	XLF (V)-25-2	XLF (V)-40-2	XLF (V)-50-2	XLF (V)-63-2	XLF (V)-80-2
Valve Type		Normally closed (pressurize to open, spring seal)
Operating fluid		Inert gas vacuum
Operating temperature °C		5 to 50
Operating Pressure Pa (abs)		1 × 10^-5 to atmospheric pressure
Conductance L/s^*1)		5	14	45	80	160	200
Leakage Pa · m^3/s	Internal	For standard material (FKM) 1.3 × 10^-10 At room temperature, excluding gas permeation
Leakage Pa · m^3/s	External	For standard material (FKM) 1.3 × 10^-10 At room temperature, excluding gas permeation
Flange Type		KF (NW)				KF (NW)·K (DN)
Main materials^*2)		Main body: aluminum alloy main part: stainless steel, FKM (standard sealing material)
Surface Treatment		External: hard anodized aluminum, Internal: base material
Pilot pressure MPa (G)		0.4 to 0.7
Pilot Port Connection port diameter		M5: 1 (P) / 3 (R) ports			Rc1/8: 1 (P) port, M5: 3 (R) ports
Weight (kg)		0.34	0.54	1.3	2.0	3.4	5.8

Note 1: Conductance is the same as that of an elbow with the same dimensions.
*2) Vacuum grease [Y-VAC2] is applied to the sliding part of the seal of the vacuum part.

Standard table

: 30; 45; 60

Part Number
XLFV-16F-2-5G
XLFV-16G-2-5GZ
XLFV-16G-2M9//-5GZ
XLFV-16G-2M9NA-1G
XLFV-25G-2-5GZ
XLFV-25G-2-5MS
XLFV-25G-2M9//-5GZ
XLFV-25G-2M9BA-4G
XLFV-25G-2M9NLA-5GZ
XLFV-25J-2M9BLA-5HZ
XLFV-40F-2-4GZ
XLFV-40F-2M9NLA-5GS
XLFV-40G-2-1H
XLFV-40G-2-5LZ
XLFV-40G-2-5MS
XLFV-40G-2M9NA-1G
XLFV-40J-2M9NLA-5GS
XLFV-40K-2M9BLA-5LZ
XLFV-40M-2M9BLA-5LZ
XLFV-80G-2M9NA-5GU-XA
XLFV-80G-2M9NA-5GU-XAN1A
XLFV-80G-2M9NA-5GU-XAP1A
XLFV-80G-2M9NZA-5GU
XLFV-80G-2M9NZA-5GU-XA
XLFV-80G-2M9NZA-5GU-XN1A
XLFV-80G-2M9NZA-5GU-XN1B

Standard Unit Price	Minimum order quantity	Days to Ship	Flange Type	Flange Nominal	Voltage	Sonic Speed Conductance	Indicator	Pilot Port Direction	Switch Part Number	Number of Switches	Seal material	Amount of leakage (Pa·m³/s)	Electrical Entry Method	Light/Surge Voltage Suppressor	Body Surface Treatment	Seal Change Location	CE-marked	Length of Lead Wire for Switch (m)
-	1 Piece(s)	Quote	KF	16	DC24V	5L/S	With indicator	Flange surface, left	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-11	Grommet (lead wire length: 300 mm)	None	External: hard anodized aluminum, Internal: base material	None	Not compatible	-
-	1 Piece(s)	Quote	KF	16	DC24V	5L/S	With indicator	Flange surface, back	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-11	Grommet (lead wire length: 300 mm)	With light and surge voltage suppressor	External: hard anodized aluminum, Internal: base material	None	Not compatible	-
-	1 Piece(s)	Quote	KF	16	DC24V	5L/S	With indicator	Flange surface, back	No auto-switch (with magnet)	No switch	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-11	Grommet (lead wire length: 300 mm)	With light and surge voltage suppressor	External: hard anodized aluminum, Internal: base material	None	Not compatible	-
-	1 Piece(s)	Quote	KF	16	AC100V	5L/S	With indicator	Flange surface, back	D-M9N (solid-state auto switch)	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-11	Grommet (lead wire length: 300 mm)	None	External: hard anodized aluminum, Internal: base material	None	Not compatible	0.5
-	1 Piece(s)	Quote	KF	25	DC24V	14L/S	With indicator	Flange surface, back	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-11	Grommet (lead wire length: 300 mm)	With light and surge voltage suppressor	External: hard anodized aluminum, Internal: base material	None	Not compatible	-
-	1 Piece(s)	Quote	KF	25	DC24V	14L/S	With indicator	Flange surface, back	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-11	M-type plug connector	With surge voltage suppressor	External: hard anodized aluminum, Internal: base material	None	Not compatible	-
-	1 Piece(s)	Quote	KF	25	DC24V	14L/S	With indicator	Flange surface, back	No auto-switch (with magnet)	No switch	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-11	Grommet (lead wire length: 300 mm)	With light and surge voltage suppressor	External: hard anodized aluminum, Internal: base material	None	Not compatible	-
-	1 Piece(s)	Quote	KF	25	AC220V	14L/S	With indicator	Flange surface, back	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-11	Grommet (lead wire length: 300 mm)	None	External: hard anodized aluminum, Internal: base material	None	Not compatible	0.5
-	1 Piece(s)	Quote	KF	25	DC24V	14L/S	With indicator	Flange surface, back	D-M9N (solid-state auto switch)	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-11	Grommet (lead wire length: 300 mm)	With light and surge voltage suppressor	External: hard anodized aluminum, Internal: base material	None	Not compatible	3
-	1 Piece(s)	Quote	KF	25	DC24V	14L/S	With indicator	Flange surface, right	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-11	Grommet (lead wire length: 600 mm)	With light and surge voltage suppressor	External: hard anodized aluminum, Internal: base material	None	Not compatible	3
-	1 Piece(s)	Quote	KF	40	AC220V	45L/S	With indicator	Flange surface, left	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-11	Grommet (lead wire length: 300 mm)	With light and surge voltage suppressor	External: hard anodized aluminum, Internal: base material	None	Not compatible	-
-	1 Piece(s)	Quote	KF	40	DC24V	45L/S	With indicator	Flange surface, left	D-M9N (solid-state auto switch)	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-11	Grommet (lead wire length: 300 mm)	With surge voltage suppressor	External: hard anodized aluminum, Internal: base material	None	Not compatible	3
-	1 Piece(s)	Quote	KF	40	AC100V	45L/S	With indicator	Flange surface, back	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-11	Grommet (lead wire length: 600 mm)	None	External: hard anodized aluminum, Internal: base material	None	Not compatible	-
-	1 Piece(s)	Quote	KF	40	DC24V	45L/S	With indicator	Flange surface, back	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-11	L-type plug connector	With light and surge voltage suppressor	External: hard anodized aluminum, Internal: base material	None	Not compatible	-
-	1 Piece(s)	Quote	KF	40	DC24V	45L/S	With indicator	Flange surface, back	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-11	M-type plug connector	With surge voltage suppressor	External: hard anodized aluminum, Internal: base material	None	Not compatible	-
-	1 Piece(s)	Quote	KF	40	AC100V	45L/S	With indicator	Flange surface, back	D-M9N (solid-state auto switch)	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-11	Grommet (lead wire length: 300 mm)	None	External: hard anodized aluminum, Internal: base material	None	Not compatible	0.5
-	1 Piece(s)	Quote	KF	40	DC24V	45L/S	With indicator	Flange surface, right	D-M9N (solid-state auto switch)	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-11	Grommet (lead wire length: 300 mm)	With surge voltage suppressor	External: hard anodized aluminum, Internal: base material	None	Not compatible	3
-	1 Piece(s)	Quote	KF	40	DC24V	45L/S	No indicator	Flange surface, left	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-11	L-type plug connector	With light and surge voltage suppressor	External: hard anodized aluminum, Internal: base material	None	Not compatible	3
-	1 Piece(s)	Quote	KF	40	DC24V	45L/S	No indicator	Flange surface, right	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-11	L-type plug connector	With light and surge voltage suppressor	External: hard anodized aluminum, Internal: base material	None	Not compatible	3
-	1 Piece(s)	Quote	KF	80	DC24V	200L/S	With indicator	Flange surface, back	D-M9N (solid-state auto switch)	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-11	Grommet (lead wire length: 300 mm)	With light and surge voltage suppressor (non-polarized type)	External: hard anodized aluminum, internal: anodic oxidation	None	Not compatible	0.5
-	1 Piece(s)	Quote	KF	80	DC24V	200L/S	With indicator	Flange surface, back	D-M9N (solid-state auto switch)	2 pcs. valve open/closed	EPDM 2101-80	Internal: 1.3 × ^-8, External: 1.3 × ^-9	Grommet (lead wire length: 300 mm)	With light and surge voltage suppressor (non-polarized type)	External: hard anodized aluminum, internal: anodic oxidation	Valve seal 1 / valve seal 2 / external seal	Not compatible	0.5
-	1 Piece(s)	Quote	KF	80	DC24V	200L/S	With indicator	Flange surface, back	D-M9N (solid-state auto switch)	2 pcs. valve open/closed	Barrel Perfluoro 70W	Internal: 1.3 × ^-8, External: 1.3 × ^-9	Grommet (lead wire length: 300 mm)	With light and surge voltage suppressor (non-polarized type)	External: hard anodized aluminum, internal: anodic oxidation	Valve seal 1 / valve seal 2 / external seal	Not compatible	0.5
-	1 Piece(s)	Quote	KF	80	DC24V	200L/S	With indicator	Flange surface, back	D-M9N (solid-state auto switch)	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-11	Grommet (lead wire length: 300 mm)	With light and surge voltage suppressor (non-polarized type)	External: hard anodized aluminum, Internal: base material	None	Not compatible	5
-	1 Piece(s)	Quote	KF	80	DC24V	200L/S	With indicator	Flange surface, back	D-M9N (solid-state auto switch)	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-11	Grommet (lead wire length: 300 mm)	With light and surge voltage suppressor (non-polarized type)	External: hard anodized aluminum, internal: anodic oxidation	None	Not compatible	5
-	1 Piece(s)	Quote	KF	80	DC24V	200L/S	With indicator	Flange surface, back	D-M9N (solid-state auto switch)	2 pcs. valve open/closed	EPDM 2101-80	Internal: 1.3 × ^-8, External: 1.3 × ^-9	Grommet (lead wire length: 300 mm)	With light and surge voltage suppressor (non-polarized type)	External: hard anodized aluminum, Internal: base material	Valve seal 1 / valve seal 2 / external seal	Not compatible	5
-	1 Piece(s)	Quote	KF	80	DC24V	200L/S	With indicator	Flange surface, back	D-M9N (solid-state auto switch)	2 pcs. valve open/closed	EPDM 2101-80	Internal: 1.3 × ^-8, External: 1.3 × ^-9	Grommet (lead wire length: 300 mm)	With light and surge voltage suppressor (non-polarized type)	External: hard anodized aluminum, Internal: base material	Valve seal 1 / valve seal 2	Not compatible	5

Basic Information

Type	High Vacuum Solenoid	Application	Single Use	Mounting Orientation	Direct
Number of Ports	2-Port Valve	Solenoid Type	Single	Switching Type	2-Position Normally Closed
Driving Type	Directly Operated	Pipe Port Type	Flange	Seal Type	Elastic Seal

Configure

26 Part Numbers

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Configure Remaining Specifications

Completed

Specification/Dimensions

Flange Type
- KF
- K
Clear
Flange Nominal
- 16
- 25
- 40
- 50
- 63
- 80
Clear
Voltage
- DC24V
- AC100V
- AC220V
- AC220V
Clear
Sonic Speed Conductance
5L/S

14L/S

45L/S

80L/S

160L/S

200L/S
Clear
Indicator
- No indicator
- With indicator
Clear
Pilot Port Direction
- Flange surface, back
- Flange surface, left
- Flange surface, right
Clear
Switch Part Number
D-M9B solid-state auto switch

D-M9N (solid-state auto switch)

M9B

M9N

M9P

A93

No auto-switch (no magnet)

No auto-switch (with magnet)
Clear
Number of Switches
- With 1 pc. (Detection position: Valve opening)
- 2 pcs. valve open/closed
- With 2 pcs. (Detection position: Valve opening and closing)
- No auto switch
- No switch
Clear
Seal material
Barrel Perfluoro 70W

Barrel Perfluoro (Compound No.: 70 W)

FKM 1349-80

FKM (Formula No.: 1349-80)

EPDM 2101-80
Clear
Amount of leakage(Pa·m³/s)
- Internal: 1.3 × ^-10, External: 1.3 × ^-11
- Internal: 1.3 × ^-8, External: 1.3 × ^-9
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-11
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-9
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-11
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-9
Clear
Electrical Entry Method
- Grommet (lead wire length: 300 mm)
- Grommet (lead wire length: 600 mm)
- L-type plug connector
- M-type plug connector
Clear
Light/Surge Voltage Suppressor
- None
- With light and surge voltage suppressor
- With light and surge voltage suppressor (non-polarized type)
- With surge voltage suppressor
Clear
Body Surface Treatment
- External: hard anodized aluminum, Internal: base material
- External: hard anodized aluminum, internal: anodic oxidation
Clear
Seal Change Location
Valve seal 1

Valve seal 1 / external seal

Valve seal 1 / valve seal 2

Valve seal 1 / valve seal 2 / external seal

External seal

None
Clear
CE-marked
- Not compatible
Clear
Length of Lead Wire for Switch(m)
- 0.5
- 3
- 5
Clear
type
- XLFV
- XLFV-16
- XLFV-25
- XLFV-40
- XLFV-50
- XLFV-63
- XLFV-80
Clear
CAD
- 2D
- 3D
Clear

Days to Ship

All

21 Day(s) or Less

27 Day(s) or Less
Clear

Specify Alterations

The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .

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MISUMI Contact 9am – 6pm (Mon – Fri) * Order cut-off time is 5pm, 9am – 1pm(Sat) * Order cut-off time is 12pm

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Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve

(i)Caution

Drawing

Product Specifications

Product Specifications

Standard table

Basic Information

Configure

Specification/Dimensions

Flange Type

Flange Nominal

Voltage

Sonic Speed Conductance

Indicator

Pilot Port Direction

Switch Part Number

Number of Switches

Seal material

Amount of leakage(Pa·m3/s)

Electrical Entry Method

Light/Surge Voltage Suppressor

Body Surface Treatment

Seal Change Location

CE-marked

Length of Lead Wire for Switch(m)

type

CAD

Days to Ship

Specify Alterations

Additional Products in this Category

Tech Support

Payment Method

About MISUMI

About this Website

Useful Tools

Customer Service

Social Media

MISUMI Contact 9am – 6pm (Mon – Fri) * Order cut-off time is 5pm, 9am – 1pm(Sat) * Order cut-off time is 12pm

Amount of leakage(Pa·m³/s)