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SMC Solenoid Valves(Page4)

Days to Ship
  • All
  • 1 Day(s) or Less
  • 2 Day(s) or Less
  • 4 Day(s) or Less
  • 5 Day(s) or Less
  • 6 Day(s) or Less
  • 7 Day(s) or Less
  • 8 Day(s) or Less
  • 9 Day(s) or Less
  • 10 Day(s) or Less
  • 11 Day(s) or Less
Brand
Product Series
CAD
Days to Ship
Number of Ports
Application
Switching Type
Voltage
Number of Solenoids
Mounting Orientation
Pipe Port Type
Specifications
Status at Power Off
Plumbing Thread Nominal
Plumbing
Applicable Cylinder Dia.(Ø)
Type
Driving Type
Connecting Tube Diameter
Pressure Rating(MPa)
Seal Type
CV Value
Pilot Air Supply

    3-port solenoid valve, Pilot type elastic seal, clean series 10-SYJ300 series

      3-port solenoid valve, pilot type, elastic seal, clean series 10-SYJ500 series

        3-port solenoid valve, pilot type, elastic seal, clean series 10-SYJ700 series

          3-Port 3-Position Valve, Base Piping Type VEX3 Series

            5-Port Solenoid Valve, Body Ported, Clean, 10-SY3000/5000/7000/9000

              5-Port Solenoid Valve, Base Mounted, Clean, 10-SY3000/5000/7000/9000

                5-Port Solenoid Valve, Body Ported, Clean, 10-SY3000/5000/7000, Type 60

                  3-Port Solenoid Valve, Direct-Acting, Elastic Body Seal, Clean Series 10-SY100 Series

                    3-Port Solenoid Valve, Direct Acting Type, Elastic Material Seal, Clean, Large Flow Rate Type

                      Explosion-Proof 5-Port Pilot Operated Solenoid Valve 50-VFE3000/5000 Series

                        UL Standard Compliant 5-Port Solenoid Valve, Base Mounted, SY3000/5000/7000/9000

                          UL Standard Compliant Product, 3-Port Solenoid Valve, Direct Piping Type, Single Unit SY300/500 Series

                            UL Standard Compliant Product, 3-Port Solenoid Valve, Base Piping Type, Single Unit SY300/500 Series

                              CSA Standard Compliant, 5-Port Solenoid Valve, Pilot Operated, Metal Seal, VFS2000

                                CSA Standard Compliant, 5-Port Solenoid Valve, Pilot Operated, Metal Seal, VFS3000

                                  CSA Standard Compliant, 5-Port Solenoid Valve, Pilot Operated, Metal Seal, VFS4000

                                    CSA Standard Compliant, 5-Port Solenoid Valve, Pilot Operated, Metal Seal, VFS5000

                                      CSA Standard Compliant, 5-Port Solenoid Valve, Pilot Operated, Metal Seal, VFS6000

                                        CSA Standard Compliant, 5-Port Solenoid Valve, Pilot Operated, Elastic Seal, VFR3000

                                          CSA Standard Compliant, 5-Port Solenoid Valve, Pilot Operated, Elastic Seal, VFR4000

                                            ATEX Directive 5-Port Solenoid Valve, 56-VQC1000 Series, ATEX Category 3

                                              ATEX Directive 5-Port Solenoid Valve, 56-VQC2000 Series, ATEX Category 3

                                                ATEX Directive 5-Port Solenoid Valve, 56-VQC4000 Series, ATEX Category 3

                                                  5-Port Solenoid Valve, Base Mounted Type, Clean, 10-S0700

                                                    5-Port Solenoid Valve, Base Mounted, Clean, 10-VQ1000

                                                      5-Port Solenoid Valve, Base Mounted, Clean, 10-VQ2000

                                                        5-Port Solenoid Valve, Plug-in Type, Clean Series, 10-SZ3000 Series

                                                          5-Port Solenoid Valve Non-Plug-in Type Clean Series 10-SZ3000 Series

                                                            Guide integrated cylinder with valve Valve for MVGQ series (For ø25 to ø63)

                                                              Guide integrated cylinder with valve Valve for MVGQ series (For ø12 to ø20)

                                                                5-Port Solenoid Valve, Plug-in SY5000/7000 Series Valve With Pressure Sensor

                                                                  CSA Standard Compliant, 5-Port Pilot Operated Solenoid Valve, Elastic Seal, VF1000/3000/5000

                                                                    4-Port Solenoid Valve, Direct Operated Poppet Type, Clean Series, 10-VQD1000 Series

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                                                                    Product Series

                                                                    3-port solenoid valve, Pilot type elastic seal, clean series 10-SYJ300 series

                                                                    3-port solenoid valve, pilot type, elastic seal, clean series 10-SYJ500 series

                                                                    3-port solenoid valve, pilot type, elastic seal, clean series 10-SYJ700 series

                                                                    3-Port 3-Position Valve, Base Piping Type VEX3 Series

                                                                    5-Port Solenoid Valve, Body Ported, Clean, 10-SY3000/5000/7000/9000

                                                                    5-Port Solenoid Valve, Base Mounted, Clean, 10-SY3000/5000/7000/9000

                                                                    5-Port Solenoid Valve, Body Ported, Clean, 10-SY3000/5000/7000, Type 60

                                                                    3-Port Solenoid Valve, Direct-Acting, Elastic Body Seal, Clean Series 10-SY100 Series

                                                                    3-Port Solenoid Valve, Direct Acting Type, Elastic Material Seal, Clean, Large Flow Rate Type

                                                                    Explosion-Proof 5-Port Pilot Operated Solenoid Valve 50-VFE3000/5000 Series

                                                                    UL Standard Compliant 5-Port Solenoid Valve, Base Mounted, SY3000/5000/7000/9000

                                                                    UL Standard Compliant Product, 3-Port Solenoid Valve, Direct Piping Type, Single Unit SY300/500 Series

                                                                    UL Standard Compliant Product, 3-Port Solenoid Valve, Base Piping Type, Single Unit SY300/500 Series

                                                                    CSA Standard Compliant, 5-Port Solenoid Valve, Pilot Operated, Metal Seal, VFS2000

                                                                    CSA Standard Compliant, 5-Port Solenoid Valve, Pilot Operated, Metal Seal, VFS3000

                                                                    CSA Standard Compliant, 5-Port Solenoid Valve, Pilot Operated, Metal Seal, VFS4000

                                                                    CSA Standard Compliant, 5-Port Solenoid Valve, Pilot Operated, Metal Seal, VFS5000

                                                                    CSA Standard Compliant, 5-Port Solenoid Valve, Pilot Operated, Metal Seal, VFS6000

                                                                    CSA Standard Compliant, 5-Port Solenoid Valve, Pilot Operated, Elastic Seal, VFR3000

                                                                    CSA Standard Compliant, 5-Port Solenoid Valve, Pilot Operated, Elastic Seal, VFR4000

                                                                    ATEX Directive 5-Port Solenoid Valve, 56-VQC1000 Series, ATEX Category 3

                                                                    ATEX Directive 5-Port Solenoid Valve, 56-VQC2000 Series, ATEX Category 3

                                                                    ATEX Directive 5-Port Solenoid Valve, 56-VQC4000 Series, ATEX Category 3

                                                                    5-Port Solenoid Valve, Base Mounted Type, Clean, 10-S0700

                                                                    5-Port Solenoid Valve, Base Mounted, Clean, 10-VQ1000

                                                                    5-Port Solenoid Valve, Base Mounted, Clean, 10-VQ2000

                                                                    5-Port Solenoid Valve, Plug-in Type, Clean Series, 10-SZ3000 Series

                                                                    5-Port Solenoid Valve Non-Plug-in Type Clean Series 10-SZ3000 Series

                                                                    Guide integrated cylinder with valve Valve for MVGQ series (For ø25 to ø63)

                                                                    Guide integrated cylinder with valve Valve for MVGQ series (For ø12 to ø20)

                                                                    5-Port Solenoid Valve, Plug-in SY5000/7000 Series Valve With Pressure Sensor

                                                                    CSA Standard Compliant, 5-Port Pilot Operated Solenoid Valve, Elastic Seal, VF1000/3000/5000

                                                                    4-Port Solenoid Valve, Direct Operated Poppet Type, Clean Series, 10-VQD1000 Series

                                                                    CAD
                                                                    • 2D / 3D
                                                                    • 2D / 3D
                                                                    • 2D / 3D
                                                                    • 2D / 3D
                                                                    • 2D / 3D
                                                                    • 2D / 3D
                                                                    • 2D / 3D
                                                                    Days to Ship 21 Day(s) or more 21 Day(s) or more 21 Day(s) or more 21 Day(s) or more 17 Day(s) or more 21 Day(s) or more 21 Day(s) or more 21 Day(s) or more 21 Day(s) or more 21 Day(s) or more 21 Day(s) or more Quote Quote 21 Day(s) or more 21 Day(s) or more 21 Day(s) or more 21 Day(s) or more Quote 21 Day(s) or more 21 Day(s) or more 21 Day(s) or more 21 Day(s) or more Quote 21 Day(s) or more Quote Quote Quote Quote 21 Day(s) or more 21 Day(s) or more Quote 27 Day(s) or more 21 Day(s)
                                                                    Number of Ports3-Port Valve3-Port Valve3-Port Valve3-Port Valve5-Port Valve5-Port Valve5-Port Valve3-Port Valve3-Port Valve5-Port Valve5-Port Valve3-Port Valve3-Port Valve5-Port Valve5-Port Valve5-Port Valve5-Port Valve5-Port Valve5-Port Valve5-Port Valve5-Port Valve / Dual 3-Port Valve5-Port Valve / Dual 3-Port Valve5-Port Valve5-Port Valve / Dual 3-Port Valve5-Port Valve5-Port Valve5-Port Valve5-Port Valve5-Port Valve4-Port Valve5-Port Valve5-Port Valve4-Port Valve
                                                                    ApplicationSingle Use / Unit for Manifold MountingSingle Use / Unit for Manifold MountingSingle Use / Unit for Manifold MountingSingle Use / Unit for Manifold MountingSingle UseSingle Use / Unit for Manifold MountingUnit for Manifold MountingSingle Use / Unit for Manifold MountingSingle Use / Unit for Manifold MountingSingle Use / Unit for Manifold MountingSingle Use / Unit for Manifold MountingSingle UseSingle Use / Unit for Manifold MountingSingle Use / Unit for Manifold MountingSingle Use / Unit for Manifold MountingSingle Use / Unit for Manifold MountingSingle Use / Unit for Manifold MountingSingle Use / Unit for Manifold MountingSingle Use / Unit for Manifold MountingSingle Use / Unit for Manifold MountingUnit for Manifold MountingUnit for Manifold MountingUnit for Manifold MountingSingle Use / Unit for Manifold MountingUnit for Manifold MountingUnit for Manifold MountingUnit for Manifold MountingUnit for Manifold MountingUnit for Manifold MountingUnit for Manifold MountingUnit for Manifold MountingSingle Use / Unit for Manifold MountingSingle Use / Unit for Manifold Mounting
                                                                    Switching Type2-Position Normally Open / 2-Position Normally Closed2-Position Normally Open / 2-Position Normally Closed2-Position Normally Open / 2-Position Normally Closed3-Position Closed Center2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center2-Position Normally Open / 2-Position Normally Closed2-Position Normally Open / 2-Position Normally Closed2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center2-Position Normally Open / 2-Position Normally Closed2-Position Normally Open / 2-Position Normally Closed2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center / Others2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center / Others2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center / Others2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center / Others2-Position Exhaust2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center / Others2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center / Others2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center2-Position Exhaust / Others2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center / Others2-Position Exhaust / 3-Position Closed Center / Others2-Position Exhaust2-Position Normally Closed2-Position Exhaust / 3-Position Closed Center2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center2-Position Exhaust
                                                                    VoltageDC12V / DC24V / AC100V / AC110V / AC200V / AC220V / DC5VDC12V / DC24V / AC100V / AC110V / AC200V / AC220V / DC5VDC12V / DC24V / AC100V / AC200VDC24V / AC100V / AC110V / AC200V / AC220VDC24V / AC100V / AC200V / DC5VDC24V / AC100V / AC110V / AC200V / AC220V / DC5VDC24V / AC100VDC12V / DC24V / AC100V / AC110V / AC200V / AC220V / DC5VDC12V / DC24V / DC5VDC12V / DC24V / DC100V / AC100V / AC110V / AC200V / AC220V / DC6V / DC48V / AC24V / AC240V / DC110V / AC120VDC12V / DC24V / DC5V / DC6V / AC24V / DC3VDC24VDC24VDC24V / AC100V / AC200V / 110/120 V ACDC24V / AC100V / AC200V / AC220V / 110/120 V ACDC24V / AC100V / AC200V / AC220V / 110/120 V ACDC24V / AC100V / AC220V / 110/120 V ACDC24V / AC100V / AC200V / 110/120 V ACDC24V / AC100V / AC200V / AC220V / 110/120 V ACDC24V / AC100V / AC200V / 110/120 V ACDC24VDC24VDC24VDC12V / DC24VDC24VDC24VDC12V / DC24VDC24VDC12V / DC24V / AC100V / AC110V / AC200V / AC220VDC12V / DC24V / AC100V / AC200V / AC220V / DC5VDC24VDC24V / AC100V / AC200V / AC220V / 110/120 V ACDC24V
                                                                    Number of SolenoidsSingleSingleSingleDoubleSingle / DoubleSingle / DoubleSingle / DoubleSingleSingleSingle / DoubleSingle / DoubleSingle / DoubleSingle / DoubleSingle / DoubleSingle / DoubleSingle / DoubleSingle / DoubleSingle / DoubleSingle / DoubleSingle / DoubleSingle / DoubleSingle / DoubleSingle / DoubleSingle / DoubleSingle / DoubleSingle / DoubleSingle / DoubleSingle / DoubleSingle / DoubleSingle / DoubleSingle / DoubleSingle / DoubleSingle
                                                                    Mounting OrientationDirect / Manifold BaseDirect / Manifold BaseDirect / Manifold BaseDirect / Manifold BaseDirectDirect / Manifold BaseManifold BaseDirect / Manifold BaseDirect / Manifold BaseDirect / Manifold BaseDirect / Manifold BaseDirectDirect / Manifold BaseDirect / Manifold BaseDirect / Manifold BaseDirect / Manifold BaseDirect / Manifold BaseDirect / Manifold BaseDirect / Manifold BaseDirect / Manifold BaseManifold BaseManifold BaseManifold BaseDirect / Manifold BaseManifold BaseManifold BaseManifold BaseManifold BaseManifold BaseManifold BaseManifold BaseDirect / Manifold BaseDirect / Manifold Base
                                                                    Pipe Port TypeMM / Rc (R) / GRc (R) / NPT / NPTF / GRc (R) / NPT / GM / Rc (R) / One-Touch PlumbingRc (R) / GM / Rc (R) / One-Touch PlumbingMMRc (R)Rc (R) / NPT / NPTF / GM / Rc (R) / NPT / G / One-Touch Plumbing-Rc (R) / NPT / NPTFRc (R) / NPT / NPTFRc (R) / NPT / NPTF / GRc (R) / NPT / NPTF / GRc (R) / NPTFRc (R) / NPT / GRc (R) / NPT / G---M--One-Touch Plumbing / Barbed CouplersOne-Touch Plumbing--One-Touch PlumbingRc (R) / NPT / GM
                                                                    SpecificationsLubrication Free / CleanroomLubrication Free / CleanroomLubrication Free / CleanroomLubrication FreeLubrication Free / CleanroomLubrication Free / CleanroomLubrication Free / CleanroomLubrication Free / CleanroomLubrication Free / CleanroomExplosion Proof / Lubrication FreeLubrication FreeLubrication FreeLubrication FreeLubrication FreeLubrication FreeLubrication FreeLubrication FreeLubrication FreeLubrication FreeLubrication FreeDrip-Proof / Lubrication FreeDrip-Proof / Lubrication FreeDrip-Proof / Lubrication FreeStandard / Lubrication FreeLubrication Free / CleanroomLubrication Free / CleanroomLubrication FreeStandardLubrication FreeLubrication FreeLubrication FreeLubrication FreeLubrication Free
                                                                    Status at Power OffSelf-Recovery (Pressure Differential Return)Self-Recovery (Spring Return)Self-Recovery (Spring Return)Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return) / Self-Recovery (Pressure Differential Return)Self-Retaining / Self-Recovery (Spring Return) / Self-Recovery (Pressure Differential Return)Self-Retaining / Self-Recovery (Spring Return) / Self-Recovery (Pressure Differential Return)Self-Recovery (Spring Return)Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return) / Self-Recovery (Pressure Differential Return)Self-Retaining / Self-Recovery (Pressure Differential Return)Self-Retaining / Self-Recovery (Pressure Differential Return)Self-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return)Self-Retaining / Self-Recovery (Spring Return) / Self-Recovery (Pressure Differential Return)Self-Retaining / Self-Recovery (Spring Return) / Self-Recovery (Pressure Differential Return)Self-Recovery (Spring Return)Self-Recovery (Pressure Differential Return)Self-Retaining / Self-Recovery (Spring Return) / Self-Recovery (Pressure Differential Return)Self-Retaining / Self-Recovery (Spring Return)Self-Recovery (Spring Return)
                                                                    Plumbing Thread NominalM3 ~ M51/8 ~ M51/4 ~ 1/81/2 ~ 3/81/4 ~ M51/2 ~ 3/81/4 ~ M5M3M31/4 ~ 3/81/2 ~ 3/81/8 ~ M5-1/4 ~ 1/81/4 ~ 3/81/2 ~ 3/81/2 ~ 3/81 ~ 3/41/4 ~ 3/81/2 ~ 3/8---M5--M5----1/2 ~ 3/8M5
                                                                    PlumbingDirect Plumbing / Sub-Base PlumbingDirect Plumbing / Sub-Base PlumbingDirect Plumbing / Sub-Base PlumbingSub-Base PlumbingDirect PlumbingSub-Base PlumbingDirect PlumbingDirect Plumbing / Sub-Base PlumbingDirect Plumbing / Sub-Base PlumbingDirect Plumbing / Sub-Base PlumbingSub-Base PlumbingDirect PlumbingSub-Base PlumbingSub-Base PlumbingSub-Base PlumbingSub-Base PlumbingSub-Base PlumbingSub-Base PlumbingSub-Base PlumbingSub-Base PlumbingSub-Base PlumbingSub-Base PlumbingSub-Base PlumbingSub-Base PlumbingSub-Base PlumbingSub-Base PlumbingDirect PlumbingDirect PlumbingSub-Base PlumbingSub-Base PlumbingDirect PlumbingDirect Plumbing / Sub-Base PlumbingSub-Base Plumbing
                                                                    Applicable Cylinder Dia.(Ø)---80 or Less ~ 125 or less63 or less ~ 160 or Less63 or less ~ 125 or less----63 or less ~ 125 or less--20 to 40 ~ 40 to 16040 to 140 ~ 40 to 20050 to 300 ~ 80 to 300--40 to 140 ~ 40 to 20050 to 300 ~ 80 to 30080 or Less100 or Less200 or less40 or less80 or Less100 or Less--40 or less ~ 50 or Less20 or Less125 or less80 or Less ~ 200 or less-
                                                                    TypeSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid Valves / Master ValveSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid Valves / Related ComponentsSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid ValvesSolenoid Valves
                                                                    Driving TypePilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type Poppet / Pilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolPilot Type SpoolLinear Motion Poppet
                                                                    Connecting Tube Diameter----Ø4 / Ø6 / Ø8 / Ø10 / Ø12-Ø4 / Ø6 / Ø8 / Ø10----Ø4 / Ø6 / Ø8 / Ø1/4--------------Ø4 / Ø6Ø4 / Ø6--Ø6--
                                                                    Pressure Rating(MPa)0.15 to 0.70.15 to 0.70.15 to 0.70.2 to 0.7 / -0.1 to 10.15 to 0.7 / 0.1 to 0.7 / 0.2 to 0.70.15 to 0.7 / 0.1 to 0.7 / 0.2 to 0.7 / -0.1 to 0.70.15 to 0.7 / 0.1 to 0.7 / 0.2 to 0.70 to 0.70 to 0.70.1 ~ 0.9 / 0.15 to 0.90.15 to 0.7 / 0.1 to 0.7 / 0.2 to 0.7 / -0.1 to 0.70.15 to 0.7 / 0.1 to 0.70.25 to 0.7 / 0.15 to 0.7 / 0.1 to 0.70.15 to 1 / 0.1 to 1.00.1 to 1.00.15 to 1 / 0.1 to 1.00.1 to 1.00.1 to 1.002 to 0.9 / 0.1 ~ 0.902 to 0.9 / 0.1 ~ 0.90.15 to 0.7 / 0.1 to 0.7 / 0.2 to 0.70.15 to 0.7 / 0.1 to 0.7 / 0.2 to 0.70.15 to 1 / 0.2 to 10.2 to 0.70.1 to 0.7 / 0.15 to 0.70 / 0.2 to 0.7 / 0.1 to 1.00.15 to 0.7 / 0.1 to 0.7 / 0.2 to 0.7 / 0.1 to 1.00.25 to 0.7 / 0.15 to 0.7 / 0.1 to 0.7 / 0.2 to 0.7-0.15 to 0.7 / 0.1 to 0.70.15 to 0.7 / 0.1 to 0.70.15 to 0.7 / 0.1 to 0.7 / 0.2 to 0.70.15 to 0.7 / 0.1 to 0.70 to 0.7
                                                                    Seal TypeSoft SealSoft SealSoft SealStandardSoft SealSoft SealSoft SealSoft SealSoft SealSoft SealSoft SealSoft SealSoft SealStandardStandardStandardStandardStandardSoft SealSoft SealStandard / Soft SealStandard / Soft SealStandard / Soft SealSoft SealStandard / Soft SealStandard / Soft SealStandardStandardSoft SealSoft SealStandard / Soft SealSoft SealSoft Seal
                                                                    CV Value0.086 ~ 0.0890.14 ~ 0.330.7 ~ 0.77-0.13 ~ 1.90.18 ~ 3.3-0.0080.012-0.18 ~ 3.3--0.53 ~ 0.631.4 ~ 1.82.5 ~ 2.93.7 ~ 4.26.81.7 ~ 2.23.2 ~ 40.16 ~ 0.210.46 ~ 0.81.5 ~ 2.10.09 ~ 0.110.16 ~ 0.210.46 ~ 0.550.14 ~ 0.180.14 ~ 0.18---0.17 ~ 2.40.05 ~ 0.07
                                                                    Pilot Air SupplyInternalInternalInternalInternal / ExternalInternalInternal / ExternalInternalInternalInternalInternalInternal / ExternalInternalInternal / ExternalInternalInternal / ExternalInternal / ExternalInternal / ExternalInternal / ExternalInternal / ExternalInternal / ExternalInternal / ExternalInternal / ExternalInternal / ExternalInternal / ExternalInternalInternalInternal / ExternalInternal / ExternalInternalInternalInternalInternal-

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