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Vacuum Valves
Blocking valves: These valves are used to isolate vacuum sections and block pressure differentials and come in various types, such as gate valves, L type valves, straight valves, and butterfly valves, to suit the possible pressure zones and applications within a vacuum system.
Conductance valves: needle valves and butterfly valves (used to control the flow rate of gas entering the empty chamber.)
The term "valve" itself is a generic term for things that control the flow of liquid or gas in pipe networks, controlling the fluid direction, pressure, and flow rate
From L type valves through to gate valve and from atmospheric pressure through to vacuum pressures, valves for all types of areas, conditions, and applications are available, including those for ultra-high vacuum levels.
| Days to Ship |
|
|---|
-
SMC
Vacuum valve with precision-cast single-piece structure which helps prevent gas accumulation.
[Features]
· Bellows type is particulate-free and cleaned.
· Pressure balanced structure.
· Body material: SCS13 (SUS304 equivalent).
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.Days to Ship: 21 Day(s) or more -
Control Equipment Standard Electromagnetic Valve 182 Series Vacuum Compatible
KOGANEI
Lightweight, compact, 2- /3-port direct acting electromagnetic vacuum valve.
[Features]
·A series of vacuum and positive pressure combined types that enables forced release or vacuum break is available as well
·With full of various functions of 2- / 3-port valves by adopting an external pilot method
·It demonstrates versatility in spite of its compact body
·NC (normally closed) / NO (normally open) shared 2- / 3-port valve that is not restricted by piping port position and flow direction
·It can be used not only in vacuum but also in combination with positive pressure, and can be used as a valve for vacuum break and forced release
[Applications]
・ Compatible with pneumatic equipment and production lines in all industriesStandard Price: MYR 423.61- Days to Ship: 11 Day(s) or more -
Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series
SMC
Vacuum regulator with low outgassing.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Little heavy metal contamination.Days to Ship: 21 Day(s) or more -
SMC
A vacuum valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.Days to Ship: 21 Day(s) or more -
Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)Days to Ship: 21 Day(s) or more -
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)Days to Ship: 21 Day(s) or more -
Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3)
SMC
A normally closed type high vacuum solenoid valve with reduced particulate matter and improved sealing performance.
[Features]
・ Flame-retardant (UL94 V-0 compliant)
・ Two types of fittings (face seal fittings / compression fittings) and female threads (Rc, NPT) are available
・ By moving the spring from the sliding part of the armature to the body part, dust generation due to contact with the spring has been reduced
・ Securely seals with a large spring force
・ Power consumption *: 4.5 W (size 1) / 7 W (size 2) / 10.5 W (Size 3) (* For DC specifications / B type. )
・ Operating temperature range: 5 to 60℃Days to Ship: 21 Day(s) or more -
Vacuum Assist Valve ZP2V Series
SMC
A vacuum valve which inhibits drops in vacuum pressure, even when no workpiece is present.
[Features]
· Keeps hold of workpieces when multiple vacuum pads are used by a single vacuum generator.
· Protects against drops in vacuum pressure, even when some pads are not suctioning.
· Single-action fitting models now also available.
· No need for switching the operation when changing out workpieces.
· Allows the simplification of control circuits when workpieces have different shapes.
· Fixed orifice size: 0.3 mm, 0.5 mm, 0.7 mm, 1 mm.Days to Ship: 21 Day(s) or more -
High-Vacuum Angle Valve (Multi-Action / Single-Action)
IRIE KOKEN
[Features]
· The vacuum side valve material is completely made up of stainless steel (SUS).
· The entire unit is made small and lightweight by the compact design.
· There is no leakage even when normal pressure and reverse pressure use a pressure difference of 0.15MPa.
· Installation can be in any position. (Unless otherwise specified, it is recommended that installation be with the valve seat facing the direction with largest pressure fluctuation.)
· The functional design results in large conductance.
· It has a single-side rotating flange, so installation is easy (ConFlat flange).Standard Price: MYR 1,947.33- Days to Ship: 4 Day(s) or more -
High Vacuum Angle Valve (Manual Type)
IRIE KOKEN
Manual type angle valve with high corrosion resistance by using stainless steel for the entire part.
[Features]
·Since the vacuum valve can be opened and closed manually, it can be opened slowly.
·Compact design for the entire part, having achieved compactness and weight reduction.
·Both positive pressure and back pressure do not leak even with a differential pressure of 0.15 MPa.
·Free mounting posture (unless otherwise specified, the mounting posture is recommended with the valve seat facing the one with the larger pressure fluctuation).
·Greater conductance can be obtained by functional design.
·Easy to install due to one-sided rotating flange (CF flange).
[Applications]
·It can be used for manually operated devices such as general-purpose testing machines.Standard Price: MYR 1,829.84- Days to Ship: 4 Day(s) or more -
SMC
A vacuum valve with a pressure balanced structure.
[Features]
· Body material: SCS13 (SUS304 equivalent). Made of stainless steel.
· Precision-cast single-piece structure which helps prevent gas accumulation.
· Interchangeable with XL Series aluminum high-vacuum angle valves.
· Bellows type is particulate-free and cleaned.Days to Ship: 21 Day(s) or more -
SMC
A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
・ Achieves system compactness and piping savings
・ Prevents dust from rolling up in the chamber when exhausting
・ Adjustable initial exhaust valve flow rate
・ Air operated type / with solenoid valve
・ Since there is little outgas, the pump capacity can be small and the exhaust time can be shortened
・ It does not contain heavy metals such as Ni (nickel) and Cr (chromium), and the sputtering rate is low, so there is little heavy metal contamination on the wafer
・ Strong against fluorine
· Uniform baking temperature. Good thermal conductivity, uniform temperature throughout the body, drastically reducing product adhesion
· Lightweight and compactDays to Ship: 21 Day(s) or more -
Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)
SMC
A vacuum valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.Days to Ship: 21 Day(s) or more -
Controller equipment Rectangular Electromagnetic Vacuum Valve 200 Series
KOGANEI
This is a reliable mechanism that promises consistent operation and high durability for the vacuum line.
- CAD ：
- 3D
Standard Price: MYR 608.41- Days to Ship: 4 Day(s) or more -
FUJITECHNOLOGY
The LEV series is a normally open, pneumatic spring return automatic leak valve.
Standard Price: MYR 1,210.29- Days to Ship: 13 Day(s) or more -
Manual Slot Butterfly Valve AX Series
FUJITECHNOLOGY
It has a 2-year warranty for 1,000,000 open and close, and it has opening display and lock mechanism.
Standard Price: MYR 4,841.03- Days to Ship: 18 Day(s) or more -
High Vacuum Air Operated Valve AVB*17 Series
CKD
Durable with a long service life. NC type. Light and compact thanks to adoption of aluminum alloy body.
- CAD ：
- 2D
Standard Price: MYR 2,797.19- Days to Ship: 11 Day(s) or more -
Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series
SMC
A vacuum regulator with little heavy metal contamination.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Low outgassing.Days to Ship: 21 Day(s) or more -
Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)Days to Ship: 21 Day(s) or more -
Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve
SMC
A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Air-operated type with solenoid valve.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.Days to Ship: 21 Day(s) or more -
Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)
SMC
A high vacuum angle valve that requires no air to drive, enabling use in portable equipment.
[Features]
· Uses no sliding metal parts, minimizing particulate matter.
· The pressure balance mechanism allows an unrestricted exhaust direction.
· A control power supply circuit for solenoid valve drive is now standard.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.Days to Ship: 21 Day(s) or more -
Control Equipment Standard Electromagnetic Valve 112 Series Vacuum Compatible
KOGANEI
Lightweight, compact, 2- /3-port direct acting electromagnetic vacuum valve.
[Features]
·A series of vacuum and positive pressure combined types that enables forced release or vacuum break is available as well
·With full of various functions of 2- / 3-port valves by adopting an external pilot method
·It demonstrates versatility in spite of its compact body
·NC (normally closed) / NO (normally open) shared 2- / 3-port valve that is not restricted by piping port position and flow direction
·It can be used not only in vacuum but also in combination with positive pressure, and can be used as a valve for vacuum break and forced release
[Applications]
・ Compatible with pneumatic equipment and production lines in all industriesStandard Price: MYR 337.34- Days to Ship: 11 Day(s) or more -
《Vacuum Specification》Control Equipment Compact Solenoid Valve G010 Series
KOGANEI
In response to various control needs, the manufacturer has newly added positive pressure / always open specifications and vacuum specifications. The ideal control system for machines and equipment on the production line can now be selected.
Standard Price: MYR 237.76- Days to Ship: 12 Day(s) or more -
Vacuum switch valve unit MPV3 series
MYOUTOKU
This is ideal for a suction transport system on a vacuum pump line.
Standard Price: MYR 967.48 Days to Ship: 10 Day(s) or more -
Stainless Steel Valve, NW Flange Ball Valve for Vacuum
CONSUSS
If the need is for the MISUMI lowest cost vacuum valve, use CONSUSS.
This offers a vacuum valve with high quality and low cost.Standard Price: MYR 910.28- Days to Ship: 4 Day(s) or more -
Standard Price: MYR 4,841.03- Days to Ship: 18 Day(s) or more -
Motor-Driven Butterfly Valve MBV-LDⅡ-MP Series
FUJITECHNOLOGY
It has a 2-year warranty for 1,000,000 open/close, it has multi-position, and it can be used as APC.
Standard Price: MYR 15,556.48- Days to Ship: 18 Day(s) or more -
Automatic Butterfly Valve/BV-NII Series
FUJITECHNOLOGY
It can be operated with the degree of opening at 2 different positions, 0 to 45° and 90°.
Standard Price: MYR 5,809.26- Days to Ship: 18 Day(s) or more -
Manual Lever Handle Type Butterfly Valve AX Series
FUJITECHNOLOGY
It has a 2-year warranty for 1,000,000 open and close, and it has opening display and lock mechanism.
Standard Price: MYR 4,235.92- Days to Ship: 18 Day(s) or more -
High Vacuum Manual Valve MVB*17 Series
CKD
Stable sealing function using spring. Light and compact thanks to adoption of aluminum alloy body.
Standard Price: MYR 2,560.36- Days to Ship: 7 Day(s) or more -
Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)Days to Ship: 21 Day(s) or more -
Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series
SMC
A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.Days to Ship: 21 Day(s) or more -
Smooth Vent Valve (Supply Line) XVD2-02S, XVD2-02V
SMC
A smooth vent valve with an adjustable flow rate for both the initial and main air supplies.
[Features]
· An integrated valve and needle valve structure that requires on 1/4 the piping space of previous models.
· Uses a metal diaphragm for the seat section, greatly reducing the generation of particulate matter.
· Valve type: Normally closed (pressurize to open, spring seal).
Fluids: Nitrogen, air, inert gas.
· Operating temperature: 5 to 60°C (baking temperature, 150°C or less).
· Weight: 0.5 kg.Standard Price: MYR 5,048.25- Days to Ship: 21 Day(s)
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| Number of Ports |
| Solenoid Type |
| Switching Type |
| Driving Type |
| Effective Sectional Area(mm2) |
| Pipe Port Type |
| Plumbing Thread Nominal |
| Connecting Tube Diameter |
| Flange Type |
| Flange Nominal |
| CV Value |
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| Brand | SMC | KOGANEI | SMC | SMC | SMC | SMC | SMC | SMC | IRIE KOKEN | IRIE KOKEN | SMC | SMC | SMC | KOGANEI | FUJITECHNOLOGY | FUJITECHNOLOGY | CKD | SMC | SMC | SMC | SMC | KOGANEI | KOGANEI | MYOUTOKU | CONSUSS | FUJITECHNOLOGY | FUJITECHNOLOGY | FUJITECHNOLOGY | FUJITECHNOLOGY | CKD | SMC | SMC | SMC |
| Product Series | Control Equipment Standard Electromagnetic Valve 182 Series Vacuum Compatible | Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series | Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series | Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3) | Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal) | Controller equipment Rectangular Electromagnetic Vacuum Valve 200 Series | Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series | Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series | Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve | Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance) | Control Equipment Standard Electromagnetic Valve 112 Series Vacuum Compatible | 《Vacuum Specification》Control Equipment Compact Solenoid Valve G010 Series | Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series | Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series | |||||||||||||||||||
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| Days to Ship | 21 Day(s) or more | 11 Day(s) or more | 21 Day(s) or more | 21 Day(s) or more | 21 Day(s) or more | 21 Day(s) or more | 21 Day(s) or more | 21 Day(s) or more | 4 Day(s) or more | 4 Day(s) or more | 21 Day(s) or more | 21 Day(s) or more | 21 Day(s) or more | 4 Day(s) or more | 13 Day(s) or more | 18 Day(s) or more | 11 Day(s) or more | 21 Day(s) or more | 21 Day(s) or more | 21 Day(s) or more | 21 Day(s) or more | 11 Day(s) or more | 12 Day(s) or more | 10 Day(s) or more | 4 Day(s) or more | 18 Day(s) or more | 18 Day(s) or more | 18 Day(s) or more | 18 Day(s) or more | 7 Day(s) or more | 21 Day(s) or more | 21 Day(s) or more | 21 Day(s) |
| Type | Pilot Vacuum Valve | Solenoid Valve | Air-Actuated Vacuum Valve | Pilot Vacuum Valve | Pilot Vacuum Valve | High Vacuum Solenoid | High Vacuum Solenoid | Air-Actuated Vacuum Valve | Air-Actuated Vacuum Valve | Manual Vacuum Valve | Air-Actuated Vacuum Valve | Air-Actuated Vacuum Valve | Manual Vacuum Valve | Solenoid Valve | - | Manual Vacuum Valve | Air-Actuated Vacuum Valve | High Vacuum Solenoid | Pilot Vacuum Valve | High Vacuum Solenoid | Solenoid Valve | Solenoid Valve | Solenoid Valve | Solenoid Valve | Manual Vacuum Valve | Air-Actuated Vacuum Valve | Mechanically-Operated Vacuum Valve | Air-Actuated Vacuum Valve | Manual Vacuum Valve | - | Pilot Vacuum Valve | Manual Vacuum Valve | Manual Vacuum Valve |
| Application | Single Use | Single Use / Multi-Port | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | - | Single Use | - | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use / Multi-Port | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | - | Single Use | Single Use | Single Use |
| Mounting Orientation | Direct | Direct / Manifold Base | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | - | Direct | - | Direct | Direct | Direct | Direct | Direct | Direct / Manifold Base | Direct | Direct | Direct | Direct | Direct | Direct | - | Direct | Direct | Direct |
| Number of Ports | 2-Port Valve | 2-Port Valve / 3-Port Valve | 3-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | - | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve / 3-Port Valve | - | - | - | 3-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve / 3-Port Valve | 2-Port Valve / 3-Port Valve | 3-Port Valve | - | - | - | - | - | - | 2-Port Valve | 2-Port Valve | 2-Port Valve |
| Solenoid Type | - | Single | Single | - | - | Single | Single | - | - | - | - | - | - | Single | - | - | - | Single | - | Single | Single | Single | Single | - | - | - | - | - | - | - | - | - | - |
| Switching Type | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Open / 2-Position Normally Closed / Others | - | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | - | Others | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Open / 2-Position Normally Closed | 2-Position Normally Closed | - | Others | Others | Others | Others | - | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed |
| Driving Type | - | External Pilot Shape | - | - | - | Directly Operated | Directly Operated | - | Directly Operated | - | - | - | - | Directly Operated | - | - | - | Air Pilot | - | Directly Operated | Directly Operated | External Pilot Shape | Directly Operated | - | - | - | - | - | - | - | - | - | - |
| Effective Sectional Area(mm2) | - | 10.2 | - | - | - | - | - | 0.07 ～ 0.78 | - | - | - | - | - | 8.5 | - | - | - | - | - | - | - | 4.2 | 0.1 ～ 0.45 | - | - | - | - | - | - | - | - | - | 4.6 |
| Pipe Port Type | Flange | Rc | Flange | Flange | Flange | Flange | Rc / NPT / Face Seal Fitting / Compression Fitting | M / Rc / NPT / One-Touch Plumbing | Flange | Flange | Flange | Flange | Flange | Rc | - | Flange | - | Flange | Flange | Flange | Flange | M | M | - | Flange | Flange | Flange | Flange | Flange | - | Flange | Flange | Swaged Sleeve Fittings |
| Plumbing Thread Nominal | - | 1/8 | - | - | - | - | 1/8 / 1/4 / 3/8 | M5 / 1/8 / M6 / M8 | - | - | - | - | - | 1/4 | - | - | - | - | - | - | - | M5 | M5 / M3 | - | - | - | - | - | - | - | - | - | 1/4 |
| Connecting Tube Diameter | - | - | - | - | - | - | - | Ø4 / Ø6 | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - |
| Flange Type | KF / K / CF / Others | - | NW / Others | KF / K / CF | KF / K | KF / K | - | - | NW | NW | NW / Others | KF / K | KF / CF | - | - | NW / JIS / ISO / Others | - | NW / Others | KF / K | KF / K | KF | - | - | - | NW | NW / JIS / ISO / Others | NW / JIS / ISO | JIS / ISO | NW / JIS | - | KF / K | KF | - |
| Flange Nominal | 16 / 25 / 40 / 50 / 63 / 80 | - | 16 / 25 / 40 / 50 / 63 / 80 | 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 / 63 / 80 | - | - | 16 / 25 / 40 / 50 | 16 / 25 / 40 / 50 | 16 / 25 / 40 / 50 / 63 / 80 | 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 | - | - | 80 / 100 / 150 / 32 / 65 / 52 | - | 16 / 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 / 63 / 80 | 25 / 40 / 50 / 63 / 80 | 16 / 25 | - | - | - | 25 / 40 / 50 | 80 / 100 / 150 / 32 / 65 / 52 | 80 / 100 / 150 | 32 | 80 / 100 / 150 / 32 / 65 / 52 | - | 16 / 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 | - |
| CV Value | - | 0.57 | - | - | - | - | - | 0.0037940379 ～ 0.0422764228 | - | - | - | - | - | 0.47 | - | - | - | - | - | - | - | 0.23 | 0.006 ～ 0.025 | - | - | - | - | - | - | - | - | - | 84.87 |
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